乙醇浓度对亲水性固结磨料垫自修整特性的影响

王子琨; 朱永伟; 金振弘; 李军; 王建彬

doi:10.3788/OPE.20182604.0843

您当前的位置：

首页 >

文章列表页 >

乙醇浓度对亲水性固结磨料垫自修整特性的影响

微纳技术与精密机械 | 更新时间：2020-07-05

- 乙醇浓度对亲水性固结磨料垫自修整特性的影响
- Effect of ethanol solution on self-condition property of hydrophilic fixed abrasive pad
- 光学精密工程 2018年26卷第4期页码：843-849
- 作者机构：
  
  1.南京航空航天大学机电学院江苏省精密与微细制造技术重点实验室, 江苏南京 210016
  2.安徽工程大学机械与汽车工程学院, 安徽芜湖 241000
- 作者简介：
  
  [ "王子琨(1991-), 男, 江西九江人, 博士研究生, 2012年于辽宁石油化工大学获得学士学位, 2015年于南昌航空大学获得硕士学位, 主要从事超精密加工技术的研究。E-mail:wangzikunde@gmail.com" ]
  [ "朱永伟(1967-), 男, 浙江平湖人, 教授, 博士生导师, 1988年于中南大学获得学士学位, 1991年于长沙矿冶研究院获得硕士学位, 2002年于中南大学获得博士学位, 主要从事纳米材料的制备与应用、精密超精密加工、表面工程等方面的研究。E-mail:meeywzhu@nuaa.edu.cn" ]
- 基金信息：
  
  国家自然科学基金资助项目(51675276);安徽省自然科学基金青年项目(1708085QE127);安徽省高校自然科学研究重点项目(KJ2016A798);江苏省重点实验室开放基金项目;南京航空航天大学研究生创新基地开放基金资助项目(kfjj20160502)
- DOI：10.3788/OPE.20182604.0843
  中图分类号： TG74;TG176
- 收稿日期：2017-08-13，
  
  录用日期：2017-9-30，
  
  纸质出版日期：2018-04-25
- 稿件说明：
移动端阅览
王子琨, 朱永伟, 金振弘, 等. 乙醇浓度对亲水性固结磨料垫自修整特性的影响[J]. 光学精密工程, 2018,26(4):843-849.

Zi-kun WANG, Yong-wei ZHU, Zhen-hong JIN, et al. Effect of ethanol solution on self-condition property of hydrophilic fixed abrasive pad[J]. Optics and precision engineering, 2018, 26(4): 843-849.
王子琨, 朱永伟, 金振弘, 等. 乙醇浓度对亲水性固结磨料垫自修整特性的影响[J]. 光学精密工程, 2018,26(4):843-849. DOI： 10.3788/OPE.20182604.0843.

Zi-kun WANG, Yong-wei ZHU, Zhen-hong JIN, et al. Effect of ethanol solution on self-condition property of hydrophilic fixed abrasive pad[J]. Optics and precision engineering, 2018, 26(4): 843-849. DOI： 10.3788/OPE.20182604.0843.

摘要

自修整能力是评价亲水性固结磨料研磨垫加工性能的重要指标。本文选择不同浓度的乙醇水溶液作为研磨介质，表征了亲水性固结磨料垫基体在研磨介质中的溶胀率与砂浆磨损速率，探索了亲水性固结磨料垫在不同研磨介质条件下研磨石英玻璃的加工性能，采用亲水性固结磨料垫在不同阶段的材料去除速率变化（Material Removal Rate Variation，MRRV）衡量固结磨料垫的自修整能力。结果表明：随着研磨介质中乙醇浓度的增加，溶胀率与砂浆磨损速率均增大，分别达到了1.05%与5.5 mg/h，不仅研磨垫的材料去除率与表面质量得到了提高，同时，不同阶段的MRRV大幅减小，体现了更优的自修整能力。当乙醇浓度为25%时，平均材料去除率达到11.82

m/min，表面粗糙度

a为75 nm，磨料垫具备了良好的加工性能。研磨介质中引入乙醇能有效提高固结磨料垫的加工性能。

Abstract

Self-condition property is one of the most important parameters to evaluate the processing performance of hydrophilic fixed abrasive pad. In this paper

the ethanol solution with different concentrations was selected as the abrasive media

and the swelling rate and slurry wear rate were developed to characterize the property of the matrix for hydrophilic fixed abrasive pad. The processing properties were described with the quartz glass lapping experiment with those slurries. Material Removal Rate Variation(MRRV) was proposed to measure the stability degree of the processing. The results show that

with the increase of the ethanol concentration in the abrasive media

the swelling rate and the slurry wear rate increase

which reach 1.05% and 5.5 mg/h

respectively. Not only the material removal rate and the surface quality of the abrasive pad are improved

but the MRRV of different stages decrease greatly

which show the better self-conditioning ability. When the ethanol concentration is 25%

the average material removal rate reaches 11.82

m/min

and the surface roughness

a is 75 nm

which has good processing performance. It shows that the study presented in the paper can effectively improve the processability of the hydrophilic fixed abrasive pad.

关键词

Keywords

references

VAN DER VELDEN P. Chemical mechanical polishing with fixed abrasives using different subpads to optimize wafer uniformity[J]. Microelectronic Engineering, 2000, 50(1-4):41-46.

DONG ZH CH, CHENG H B. Study on removal mechanism and removal characters for SiC and fused silica by fixed abrasive diamond pellets[J]. International Journal of Machine Tools and Manufacture, 2014, 85:1-13.

林魁, 朱永伟, 李军, 等.金刚石固结磨料研磨K9玻璃的研究[J].硅酸盐通报, 2010, 29(1):6-11.

LIN K, ZHU Y W, LI J, et al.. Study on lapping of K9 glass by fixed abrasive pad[J]. Bulletin of the Chinese Ceramic Society, 2010, 29(1):6-11. (in Chinese)

朱永伟, 王成, 徐俊, 等.固结磨料研磨垫孔隙结构对其加工性能的影响[J].光学精密工程, 2014, 22(4):911-917.

ZHU Y W, WANG CH, XU J, et al.. Influence of pore distribution of fixed abrasive pad on its machining performance[J]. Opt. Precision Eng., 2014, 22(4):911-917. (in Chinese)

KIM H, PARK B, LEE S, et al.. Self-conditioning fixed abrasive pad in CMP[J]. Journal of the Electrochemical Society, 2004, 151(12):G858-G862.

KIM H, KIM H, JEONG H, et al.. Self-conditioning of encapsulated abrasive pad in chemical mechanical polishing[J]. Journal of Materials Processing Technology, 2003, 142(3):614-618.

CHOI J Y, DO JEONG H. A study on polishing of molds using hydrophilic fixed abrasive pad[J]. International Journal of Machine Tools and Manufacture, 2004, 44(11):1163-1169.

TATEISHI T, GAO Q, TANI Y, et al.. Development of a high-porosity fixed-abrasive pad utilizing catalytic effects of TiO 2 on polyurethane matrix[J]. CIRP Annals, 2006, 55(1):321-324.

徐俊, 朱永伟, 朱楠楠, 等.亲水性固结磨料研磨垫自修整机理探索[J].纳米技术与精密工程, 2014, 12(6):429-434.

XU J, ZHU Y W, ZHU N N, et al.. Self-conditioning mechanism of hydrophilic fixed abrasive pad[J]. Nanotechnology and Precision Engineering, 2014, 12(6):429-434. (in Chinese)

王凯, 朱永伟, 郑方志, 等.游离碳化硅磨粒辅助的蓝宝石固结磨料研磨研究[J].人工晶体学报, 2015, 44(11):2937-2942.

WANG K, ZHU Y W, ZHENG F ZH, et al.. Study on the grinding of sapphire using fixed abrasive with free silicon carbide particles[J]. Journal of Synthetic Crystals, 2015, 44(11):2937-2942. (in Chinese)

卢文壮, 杨斌, 冯伟, 等.应用CVD金刚石涂层工具研磨单晶蓝宝石[J].光学精密工程, 2016, 24(3):540-546.

LU W ZH, YANG B, FENG W, et al.. Lapping of sapphire wafers by CVD diamond coated tools[J]. Opt. Precision Eng., 2016, 24(3):540-546. (in Chinese)

LI J, HUANG J D, XIA L, et al.. Effect of chemical additive on fixed abrasive pad self-conditioning in CMP[J]. The International Journal of Advanced Manufacturing Technology, 2017, 88(1-4):107-113.

李军, 夏磊, 王晓明, 等.三乙醇胺浓度对固结磨料研磨垫自锐性能的影响[J].光学精密工程, 2014, 22(12):3287-3293.

LI J, XIA L, WANG X M, et al.. Effect of triethanolamine concentration on self-sharpening performance of fixed abrasive pad[J]. Opt. Precision Eng., 2014, 22(12):3287-3293. (in Chinese)

计时鸣, 王成湖, 金明生, 等.渐进式黏磨层气压砂轮的设计[J].光学精密工程, 2016, 24(6):1365-1372.

JI SH M, WANG CH H, JIN M SH, et al.. Design of pneumatic wheel with progressive mesh abrasives[J]. Opt. Precision Eng., 2016, 24(6):1365-1372. (in Chinese)

ZHENG F ZH, ZHU N N, ZHU Y W, et al.. Self-conditioning performance of hydrophilic fixed abrasive pad[J]. The International Journal of Advanced Manufacturing Technology, 2017, 90(5-8):2217-2222.

朱永伟, 沈琦, 王子琨, 等.多晶金刚石固结磨料研磨垫精研石英玻璃的性能探索[J].红外与激光工程, 2016, 45(10):1003003.

ZHU Y W, SHEN Q, WANG Z K, et al.. Lapping performance on quartz glass of fixed abrasive pad embedded with multi-grain diamond grits[J]. Infrared and Laser Engineering, 2016, 45(10):1003003. (in Chinese)

王德勇, 廖光煊. 不同浓度酒精池火燃烧特性实验研究[C]. 中国工程热物理学会燃烧学2009年学术会议论文集, 中国工程热物理学会, 2009.

WANG D Y, LIAO G X. Experimental study on fire combustion characteristics of different concentration alcohol pool[C]. China National Symposium on Combustion 2009, Chinese Society of Engineering Thermophysics, 2009. (in Chinese)

浏览量

231

下载量

CSCD

文章被引用时，请邮件提醒。

提交

工具集

关联资源

蓝宝石衬底双面研磨表面裂纹深度检测

蜂窝状结构半固结磨料研磨盘的制备及应用

应用CVD金刚石涂层工具研磨单晶蓝宝石

三乙醇胺在镁铝尖晶石固结磨料研磨中的作用

固结磨料研磨垫孔隙结构对其加工性能的影响