高回转精度多阶柱状微电极电化学高效制备试验研究

刘勇; 邓世辉

doi:10.3788/OPE.20182604.0857

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高回转精度多阶柱状微电极电化学高效制备试验研究

微纳技术与精密机械 | 更新时间：2020-07-05

- 高回转精度多阶柱状微电极电化学高效制备试验研究
- Experimental research on high-efficiency electrochemical machining of multi-stepped cylindrical microelectrode with high rotating precision
- 光学精密工程 2018年26卷第4期页码：857-865
- 作者机构：
  
  山东大学力学与机电装备联合工程技术研究中心, 山东威海 264209
- 作者简介：
  
  [ "刘勇(1982-), 男, 山东日照人, 博士, 副教授, 硕士生导师, 2011年于南京航空航天大学获得博士学位, 主要从事精密、微细特种加工方面的研究。E-mail:rzliuyong@163.com" ]
  [ "邓世辉(1993-), 男, 安徽亳州人, 硕士研究生, 2016年于安徽理工大学获得学士学位, 主要研究方向为精密、微细电解加工技术。E-mail:971331437@qq.com" ]
- 基金信息：
  
  山东省自然科学基金资助项目(ZR2018MEE018);国家自然科学基金资助项目(51305238);中国博士后基金资助项目(2015M572023);山东大学（威海）青年学者未来计划资助项目(2015WHWLJH03)
- DOI：10.3788/OPE.20182604.0857
  中图分类号： V261.5;TG662
- 收稿日期：2017-09-12，
  
  录用日期：2017-10-9，
  
  纸质出版日期：2018-04-25
- 稿件说明：
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刘勇, 邓世辉. 高回转精度多阶柱状微电极电化学高效制备试验研究[J]. 光学精密工程, 2018,26(4):857-865.

Yong LIU, Shi-hui DENG. Experimental research on high-efficiency electrochemical machining of multi-stepped cylindrical microelectrode with high rotating precision[J]. Optics and precision engineering, 2018, 26(4): 857-865.
刘勇, 邓世辉. 高回转精度多阶柱状微电极电化学高效制备试验研究[J]. 光学精密工程, 2018,26(4):857-865. DOI： 10.3788/OPE.20182604.0857.

Yong LIU, Shi-hui DENG. Experimental research on high-efficiency electrochemical machining of multi-stepped cylindrical microelectrode with high rotating precision[J]. Optics and precision engineering, 2018, 26(4): 857-865. DOI： 10.3788/OPE.20182604.0857.

摘要

为实现高回转精度多阶柱状微电极的高效加工，对多阶柱状电极电化学刻蚀过程进行了深入的研究与改进。首先，根据电化学刻蚀理论推导了加工电流对电极直径变化的影响规律；通过试验证明了电极旋转可提高电流变化速率及有效起始电流进而提高加工效率，定性分析了电极旋转对电极回转精度的影响，提出了分阶变转速高效加工高回转精度多阶柱状微电极的方法；通过试验分析了各加工参数（电极转速、加工电压和切断电流）对电极形状及尺寸的影响；最后，在优化后的加工参数下，成功加工得到末端直径小于15

m且同轴度误差在1

m以内的多阶柱状微电极，与常规电化学刻蚀工艺相比，显著提高了加工效率。试验证明旋转电化学刻蚀是一种能够较好地提高微电极加工效率及回转精度的新工艺。

Abstract

In order to achieve the high-efficiency machining of multi-stepped cylindrical microelectrode with high rotating precision

the electrochemical etching process of multi-stepped electrode was studied and improved deeply. Firstly

according to the principle of electrochemical etching

the effect of machining current on the change of electrode diameter was deduced. Secondly

the experiments proved that the electrode rotation could improve the current change rate and the effective initial current and thus improved the machining efficiency. And then

the influence of electrode rotation on the rotating precision of the electrode was analyzed

and the method of fabricating multi-stepped cylindrical microelectrode with high rotating precision efficiently by different rotation speeds combination was proposed. Thirdly

the influence of machining parameters

such as the rotation speed

the voltage and the cut-off current

on the shape and size of the electrodes were analyzed. Finally

by using the optimized machining parameters

multi-stepped cylindrical microelectrodes with end diameter less than 15

m and the coaxial error within 1

m were successfully fabricated. Compared with the conventional electrochemical etching process

the method presented in the paper improves the machining efficiency significantly. It is proved that rotating electrochemical etching is a better method to improve the machining efficiency and rotating precision of microelectrodes.

关键词

Keywords

references

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