阵列微沟槽的场域离散脉冲电解加工技术

郭钟宁; 詹顺达; 罗红平; 刘桂贤; 陈晓磊; 余浩

doi:10.3788/OPE.20182605.1098

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阵列微沟槽的场域离散脉冲电解加工技术

微纳技术与精密机械 | 更新时间：2020-08-13

- 阵列微沟槽的场域离散脉冲电解加工技术
- Pulse electrochemical machining of micro channel arrays in discrete fields and domains
- 光学精密工程 2018年26卷第5期页码：1098-1105
- 作者机构：
  
  1.广东工业大学机电工程学院, 广东广州 510006
  2.广州市非传统制造技术及装备重点实验室, 广东广州 510006
  3.佛山市铬维科技有限公司, 广东佛山 528225
- 作者简介：
  
  [ "郭钟宁(1957-), 男, 江苏南京人, 教授, 博士生导师, 1997年于香港理工大学获得博士学位, 中国机械工程学会特种加工分会常务理事, 主要从事特种加工技术、微纳加工技术及加工过程检测与控制的研究。E-mail: znguo@gdut.edu.cn" ]
  罗红平(1978-), 男, 江西南昌人, 博士, 讲师, 2009年于湖南大学获得博士学位, 主要从事特种加工技术及装备、微加工技术的研究。E-mail:luohongping@gdut.edu.cn LUO Hong-ping, E-mail:luohongping@gdut.edu.cn
- 基金信息：
  
  国家自然科学基金-广东省联合基金资助项目(U1601201);国家自然科学基金-青年基金资助项目(51705089);国家自然科学基金-面上基金资助项目(51575113)
- DOI：10.3788/OPE.20182605.1098
  中图分类号： TG662
- 收稿日期：2017-12-27，
  
  录用日期：2018-1-31，
  
  纸质出版日期：2018-05-25
- 稿件说明：
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郭钟宁, 詹顺达, 罗红平, 等. 阵列微沟槽的场域离散脉冲电解加工技术[J]. 光学精密工程, 2018,26(5):1098-1105.

Zhong-ning GUO, Shun-da ZHAN, Hong-ping LUO, et al. Pulse electrochemical machining of micro channel arrays in discrete fields and domains[J]. Optics and precision engineering, 2018, 26(5): 1098-1105.
郭钟宁, 詹顺达, 罗红平, 等. 阵列微沟槽的场域离散脉冲电解加工技术[J]. 光学精密工程, 2018,26(5):1098-1105. DOI： 10.3788/OPE.20182605.1098.

Zhong-ning GUO, Shun-da ZHAN, Hong-ping LUO, et al. Pulse electrochemical machining of micro channel arrays in discrete fields and domains[J]. Optics and precision engineering, 2018, 26(5): 1098-1105. DOI： 10.3788/OPE.20182605.1098.

摘要

针对难加工金属材料表面阵列非贯穿型微沟槽的高效高质量加工难题，提出一种场域离散脉冲电解加工方法，所加工沟槽具有表面质量好、尺寸微小、槽数多、沟槽前后非贯穿的特点。使用绝缘栅栏隔板作为活动掩模板对各微沟槽加工区进行离散，同时遮蔽非加工区，从而实现流场隔离和非加工区电场屏蔽等效果，有效提高沟槽的加工稳定性、精度和一致性。通过设计专用夹具，对影响加工精度的关键因素进行了单因素工艺实验研究，并利用Comsol Multiphysics软件对电解加工的流场和电场进行了仿真分析。仿真和试验结果显示：场域离散加工方法的流场和电场都比传统的掩膜电解加工、电解转印加工好。成功地在1 min内加工出9条宽538.76 μm，深25.78 μm，过切量为19.38 μm的阵列微沟槽，证实了该方法的有效性。采用短加工时间、低脉冲电压幅值、高脉冲频率、小脉冲占空比等工艺参数，有利于提高沟槽的加工精度。通过场域离散电解加工技术，可以实现对非贯穿型微沟槽的高效率、高质量、低成本加工。

Abstract

A method of pulse electrochemical machining in discrete fields and domains was introduced to solve the problems in microchannel arrays machining on difficult-to-cut metal surface. This method has the characteristics of processing microchannels with high surface quality and a non-penetrating structure. The machining zone of each channel was separated by the specially designed fence-like template made of nonconductive material

and hence the electrolyte flow field and electric field are confined and improved

because of which a higher process stability and good machining accuracy and consistency can be achieved. Both simulation analysis and experiments verified the effectiveness of the method. The distributions of flow field and electrical field of this method are better than those of the through-mask Electrochemical Machining (ECM) method and electrochemical pattern transfer method. Nine channels with a 538.76 μm width

25.78 μm depth

and an overcut of 19.38 μm are obtained within 1 min. Single-factor experiments were conducted and the results show that good process performance can be obtained with a short machining time

low voltage amplitude

low duty cycle

and high pulse frequency. Thus

the presented method of pulse EMC in discrete fields and domains is suitable for mass production of non-penetrating microstructures with the advantages of high efficiency

high quality

and low cost.

关键词

Keywords

references

RAJURKAR K P, ZHU D, MCGEOUGH J A, et al .. New developments in electro-chemical machining[J]. CIRP Annals , 1999, 48(2):567-579.

RAJURKAR K P, SUNDARAM M M, MALSHE A P. Review of electrochemical and electrodischarge machining[J]. Procedia CIRP , 2013, 6:13-26.

王艳萍, 徐文骥.微沟槽电解加工试验研究[J].电加工与模具, 2015(1):21-24.

WANG Y P, XU W J. Experimental study on electrochemical machining of microgrooves[J]. Electromachining & Mould , 2015(1):21-24. (in Chinese)

柳龙华, 刘刚, 熊瑛, 等.大高宽比、高线密度X射线透射光栅的制作[J].光学精密工程, 2009, 17(1):72-77.

LIU L H, LIU G, XIONG Y, et al .. Fabrication of high-aspect-ratio and high-density X-ray transmission grating[J]. Opt. Precision Eng ., 2009, 17(1):72-77. (in Chinese)

崔岩, 石二磊, 夏劲松, 等.掩模偏转方向对硅尖形状的影响[J].光学精密工程, 2009, 17(8):1865-1869.

CUI Y, SHI E L, XIA J S, et al .. Effect of changing mask direction on tip shape[J]. Opt. Precision Eng ., 2009, 17(8):1865-1869. (in Chinese)

RAFFELSTETTER P, MOLLAY B. On the modeling of shape evolution in through-mask electrochemical micromachining of complex patterned substrates[J]. Electrochimica Acta , 2010, 55(6):2149-2157.

李寒松, 李龙文, 高传平, 等.钼栅网活动模板电解加工技术研究[J].电加工与模具, 2015(1):37-41.

LI H S, LI L W, GAO CH P, et al .. Study on molybdenum aperture plate by electrochemical machining with movable cathode mask[J]. Electromachining & Mould , 2015(1):37-41. (in Chinese)

杨敏, 李寒松, 王国乾, 等. MA956高温合金活动模板电解加工小孔技术研究[J].电加工与模具, 2016(5):42-46.

YANG M, LI H S, WANG G Q, et al .. Study on small hole machining of MA956 superalloys by electrochemical machining with movable cathode mask[J]. Electromachining & Mould , 2016(5):42-46. (in Chinese)

王光强, 朱荻, 曲宁松.蜂窝状微坑结构的电化学加工研究[J].电加工与模具, 2007(2):32-34, 46.

WANG G Q, ZHU D, QU N S. Research of machining array micro-dimples in electrochemical machining[J]. Electromachining & Mould , 2007(2):32-34, 46. (in Chinese)

WANG G Q, LI H S, QU N S, et al .. Investigation of the hole-formation process during double-sided through-mask electrochemical machining[J]. Journal of Materials Processing Technology , 2016, 234:95-101.

CHEN X L, QU N S, LI H S, et al .. Electrochemical micromachining of micro-dimple arrays using a polydimethylsiloxane (PDMS) mask[J]. Journal of Materials Processing Technology , 2016, 229:102-110.

CHEN X L, QU N S, LI H S, et al .. Removal of islands from micro-dimple arrays prepared by through-mask electrochemical micromachining[J]. Precision Engineering , 2015, 39:204-211.

钱双庆, 张华, 鲍凯, 等.电解液非线性特性对电解转印加工表面织构定域性影响分析[J].机械设计与制造, 2015(10):139-141, 145.

QIAN SH Q, ZHANG H, BAO K, et al .. Influence of non-linear electrolyte on the localization of surface texturing with electrochemical pattern transfer[J]. Machinery Design & Manufacture , 2015(10):139-141, 145. (in Chinese)

王哲, 钱双庆, 曹红蓓, 等.基于电场的电解转印加工流道过程模拟与分析[J].现代制造工程, 2017(6):14-19.

WANG ZH, QIAN SH Q, CAO H B, et al .. Simulation based on electric field about processing of channels by electrochemical pattern transfer machining[J]. Modern Manufacturing Engineering , 2017(6):14-19. (in Chinese)

明平美, 朱荻, 周锋, 等.用UV-LIGA技术制造大通孔率精细镍网[J].光学精密工程, 2009, 17(6):1267-1273.

MING P M, ZHU D, ZHOU F, et al .. Fabrication of metal micro-precision sieves with high open areas using UV-LIGA process[J]. Opt. Precision Eng ., 2009, 17(6):1267-1273. (in Chinese)

明平美, 周维海, 赵晨昊, 等.极间柔性多孔物充填型活动掩膜电解加工微坑技术[J].中国科学:技术科学, 2016, 46(10):1005-1015.

MING P M, ZHOU W H, ZHAO CH H, et al .. Active through-mask electrochemical machining with its interelectrode gap filled with flexible porous material[J]. Scientia Sinica Technologica , 2016, 46(10):1005-1015. (in Chinese)

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