黏滑驱动式小型精密运动平台

时运来; 娄成树; 张军; 程丁继

doi:10.3788/OPE.20182605.1124

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黏滑驱动式小型精密运动平台

微纳技术与精密机械 | 更新时间：2020-08-13

- 黏滑驱动式小型精密运动平台
- Small precision motion platform based on stick-slip driving principle
- 光学精密工程 2018年26卷第5期页码：1124-1132
- 作者机构：
  
  南京航空航天大学机械结构力学及控制国家重点实验室, 江苏南京 210016
- 作者简介：
  
  [ "时运来(1976-), 男, 山东邹城人, 博士, 副教授, 2006年、2011年于南京航空航天大学分别获得硕士、博士学位, 主要从事压电作动技术和精密运动系统设计及控制方面的研究。E-mail:shuyunlai950438@nuaa.edu.cn" ]
  娄成树(1993-), 男, 浙江宁波人, 硕士研究生, 2015年于湘潭大学获得学士学位, 主要从事压电作动器方面的研究。E-mail:1248909930@qq.com LOU Cheng-shu, E-mail:1248909930@qq.com
- 基金信息：
  
  南京航空航天大学研究生创新基地（实验室）开放基金资助项目(kfjj20160102);航空科学基金资助项目(2016ZA52014);江苏高校优势学科建设工程
- DOI：10.3788/OPE.20182605.1124
  中图分类号： TP242
- 收稿日期：2017-11-23，
  
  录用日期：2018-1-2，
  
  纸质出版日期：2018-05-25
- 稿件说明：
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时运来, 娄成树, 张军, 等. 黏滑驱动式小型精密运动平台[J]. 光学精密工程, 2018,26(5):1124-1132.

Yun-lai SHI, Cheng-shu LOU, Jun ZHANG, et al. Small precision motion platform based on stick-slip driving principle[J]. Optics and precision engineering, 2018, 26(5): 1124-1132.
时运来, 娄成树, 张军, 等. 黏滑驱动式小型精密运动平台[J]. 光学精密工程, 2018,26(5):1124-1132. DOI： 10.3788/OPE.20182605.1124.

Yun-lai SHI, Cheng-shu LOU, Jun ZHANG, et al. Small precision motion platform based on stick-slip driving principle[J]. Optics and precision engineering, 2018, 26(5): 1124-1132. DOI： 10.3788/OPE.20182605.1124.

摘要

为满足微纳操作系统对精密驱动技术的需求，本文提出了一种基于黏滑原理的小型精密运动平台。该平台将柔性铰链、惯性质量块以及弹性元件结合为独立的定子基座，并与压电叠堆、陶瓷球固连为定子，安装在平台基座底部，通过螺钉调节弹性元件端部垂直方向的位置，就可以改变定子与移动台间的预压力，进而获得最佳的驱动力。为研究黏滑驱动的运动机理，分析各参数对平台运动的影响，进行了力学建模；而摩擦力作为黏滑驱动的关键因素，为了能准确地表达黏滑驱动的摩擦机理，在力学建模中引入了LuGre摩擦模型，并利用Matlab/Simulink软件进行了仿真分析。设计加工的黏滑驱动平台的整体尺寸为40 mm×40 mm×18 mm，质量为32 g。试验表明：该平台最小可实现10 nm的运动步长，速度最高可达2.5 mm/s，行程为22 mm。

Abstract

To realize precise actuation of micro/nano-manipulation systems

a type of nano-motion platform based on the stick-slip principle was designed. Flexure hinges

a mass block

and an elastic component were integrated as an independent stator base. The stator consisted of a stator base

a piezoelectric stack

and a ceramic ball installed in the base bottom. The vertical position of the end of the elastic component can be adjusted by rotating an adjustment screw to change the pre-pressure between the stator and moving platform. Thus

the optimal driving force can be obtained. Because of the motion mechanisms of stick-slip driving and the influence of various parameters on the platform motion

mechanical modeling was carried out. Friction force was of key significance for stick-slip driving. In order to accurately express the friction mechanism of stick-slip driving

the LuGre friction model was introduced into the mechanical modeling. The simulation analysis was performed using MATLAB/Simulink software. The overall size of the stick-slip driving platform is 40 mm×40 mm×18 mm

and its mass is 32 g. Experiments show that the platform can achieve a minimum step size of 10 nm

its highest speed is 2.5 mm/s

and its stroke is 22 mm.

关键词

Keywords

references

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