线性位移台直线度高精密外差干涉测量装置

金涛; 刘景林; 杨卫; 乐燕芬; 侯文玫

doi:10.3788/OPE.20182607.1570

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线性位移台直线度高精密外差干涉测量装置

现代应用光学 | 更新时间：2020-08-13

- 线性位移台直线度高精密外差干涉测量装置
- High-precision straightness interferometer for linear moving stage
- 光学精密工程 2018年26卷第7期页码：1570-1577
- 作者机构：
  
  1.上海理工大学光电信息与计算机工程学院, 上海 200093
  2.普爱纳米位移技术(上海)有限公司, 上海 201203
- 作者简介：
  
  [ "金涛(1985-), 男, 安徽合肥人, 博士, 副教授, 2003年于皖西学院获得学士学位, 2010年于上海理工大学获得硕士学历, 2013年于日本群马大学获得博士学位, 主要从事精密测量的研究。E-mail:jintao@usst.edu.cn" ]
  [ "刘景林(1992-), 男, 江西萍乡人, 硕士研究生, 2010年于江西理工大学获得学士学位, 主要从事精密测量的研究。E-mail:764455968@qq.com" ]
- 基金信息：
  
  国家自然科学基金资助项目(51075280);国家自然科学基金资助项目(51705324);上海市自然基金资助项目(16ZR1423000);国家自然科学基金中德合作研究中心项目(GZ1287)
- DOI：10.3788/OPE.20182607.1570
  中图分类号： TN247;TH744.3
- 收稿日期：2018-03-06，
  
  录用日期：2018-4-2，
  
  纸质出版日期：2018-07-25
- 稿件说明：
移动端阅览
金涛, 刘景林, 杨卫, 等. 线性位移台直线度高精密外差干涉测量装置[J]. 光学精密工程, 2018,26(7):1570-1577.

Tao JIN, Jing-lin LIU, Wei YANG, et al. High-precision straightness interferometer for linear moving stage[J]. Optics and precision engineering, 2018, 26(7): 1570-1577.
金涛, 刘景林, 杨卫, 等. 线性位移台直线度高精密外差干涉测量装置[J]. 光学精密工程, 2018,26(7):1570-1577. DOI： 10.3788/OPE.20182607.1570.

Tao JIN, Jing-lin LIU, Wei YANG, et al. High-precision straightness interferometer for linear moving stage[J]. Optics and precision engineering, 2018, 26(7): 1570-1577. DOI： 10.3788/OPE.20182607.1570.

摘要

直线度测量中往往存在有限的测量范围、精度低和阿贝误差等问题。本文提出了一种高精密直线度外差干涉测量装置，该装置由Koester棱镜、角锥棱镜、1/4波片、楔面棱镜和楔面反射镜构成。楔面棱镜为直线度传感元件，角隅棱镜和楔面反射镜是测量信号的回光元件。双频激光信号进入直线度干涉仪后组成几何空间对称四光路测量信号。四路测量光走过几乎完全相同的路径有效地提高了干涉仪的稳定性，并且使空程误差最小化。使用楔角为1°的楔角棱镜和2π/512细分的相位计，直线度测量分辨力为17.71 nm。该方法不需要与行程同长的大反射参考镜，但同样能实现高分辨率，理论和实验证明空间对称测量结构避免了由俯仰，偏转和滚转角引起的阿贝误差的串扰，而且光学元件少，结构简单，方便易用，结果可以直接溯源到米的定义。

Abstract

An interferometer is proposed for high precision straightness measurement. This instrument consists of a Koester prism

corner cube

quarter-wave plate

wedge prism

and wedge reflector. The wedge prism acts as the straightness sensor while the corner cube and wedge reflector are used to reflect the measurement signal. During operation

the two frequency interferometer signal is decomposed into four beams with a spacially symmetrical measurement structure. The beams have common paths

which result in an improved stability of the interferometer and the minimization of dead path. A measurement resolution of 17.71 nm was determined with a phasemeter which has a resolution of 2π/512 and a wedge prism with one wedge angle. The setup does not require a mirror

which typically has a size that is comparable to that of the stroke of a linear moving stage. However

it can be used to measure straightness with very high resolution. The theoretical and experimental results demonstrate that the crosstalk of the Abbe error caused by pitch

yaw

and roll angle is avoided due to the spacially symmetrical measurement structure. The proposed interferometer has several advantages such as fewer optical components

a simple structure

ease of use

and repeatability of measurement results.

关键词

Keywords

references

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