用于应力测量的可调谐光栅

杨江涛; 唐军; 王玉波; 郭浩

doi:10.3788/OPE.20182607.1596

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用于应力测量的可调谐光栅

现代应用光学 | 更新时间：2020-08-13

- 用于应力测量的可调谐光栅
- Tunable grating for stress measurement
- 光学精密工程 2018年26卷第7期页码：1596-1603
- 作者机构：
  
  中北大学电子测试技术国家重点实验室仪器科学与动态测试教育部重点实验室, 山西太原 030051
- 作者简介：
  
  [ "杨江涛(1988-), 男, 山西运城人, 博士研究生, 2012年于中北大学获得学士学位, 主要从事MEMS惯性器件及光电传感器方面的研究。E-mail:yangjiangtao_nuc@163.com" ]
- 基金信息：
  
  国家自然科学基金资助项目(51225504);国家自然科学基金资助项目(61127008);国家自然科学基金资助项目(61571405);国家自然科学基金资助项目(61603353);国家973重点基础研究发展计划资助项目(2012CB723404)
- DOI：10.3788/OPE.20182607.1596
  中图分类号： TH74;O433.1
- 收稿日期：2017-12-22，
  
  录用日期：2018-2-10，
  
  纸质出版日期：2018-07-25
- 稿件说明：
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杨江涛, 唐军, 王玉波, 等. 用于应力测量的可调谐光栅[J]. 光学精密工程, 2018,26(7):1596-1603.

Jiang-tao YANG, Jun TANG, Yu-bo WANG, et al. Tunable grating for stress measurement[J]. Optics and precision engineering, 2018, 26(7): 1596-1603.
杨江涛, 唐军, 王玉波, 等. 用于应力测量的可调谐光栅[J]. 光学精密工程, 2018,26(7):1596-1603. DOI： 10.3788/OPE.20182607.1596.

Jiang-tao YANG, Jun TANG, Yu-bo WANG, et al. Tunable grating for stress measurement[J]. Optics and precision engineering, 2018, 26(7): 1596-1603. DOI： 10.3788/OPE.20182607.1596.

摘要

为了更简单地制备出可用于应力测量的光栅褶皱结构，采用基于刚性薄膜/柔性衬底的自组装工艺制备了可调谐光栅。首先在聚乙烯对苯二酸脂（PET）薄膜上旋涂一层聚二甲基硅氧烷（PDMS）薄膜，将双层薄膜弯曲并用氧气等离子体处理，在其表面生成一层刚性氧化层，借助柔性PET对刚性层施加均匀应力，当应力超过临界值时，在PDMS基底上自组装形成光栅褶皱结构。然后根据光栅分光原理，将这种可调谐的光栅结构应用于应力测试。实验结果表明：当光栅的曲率半径为1.4 mm时，制备的可调谐光栅褶皱在0%~10%的应变范围得到的波长变化为452~507 nm；当光栅的曲率半径为5.6 mm时，制备的可调谐光栅褶皱在0%~15%的应变范围得到的波长变化为498~572 nm。本文提出的可调谐光栅制备方法是一种成本低、工艺简单、可批量化生产的工艺方法，也是一种制备变间距光栅的潜在方法，未来有望应用于光谱仪、光通讯等领域。

Abstract

In order to prepare well-ordered micron and submicron grating fold structures for simpler stress measurement

tunable grating was prepared by a self-assembly process based on a rigid film/flexible substrate. A polydimethylsiloxane (PDMS) substrate was prepared on polyethylene (PET) by the spin-coating method; then

the curved PDMS-PET substrates were processed in oxygen plasma. After appropriate surface treatment time in plasma

the curved substrates were flattened

and well-ordered wrinkling shape gratings were obtained due to mechanical buckling instability. Then

according to the principle of grating spectral

proper stress measurement can be achieved when a tunable grating structure was used for stress testing. The experimental results show that:When the curvature radius of the grating is 1.4 mm

the wavelength of the tunable grating folds prepared from 0 to 10% of the strain ranges from 452 to 507 nm; when the radius of curvature of the grating is 5.6 mm

the wavelength of the tunable grating folds prepared from 0 to 15% of the strain ranges from 498 to 572 nm. The proposed method of tunable grating fabrication is a low cost

simple process and enables mass production technology. It is a potential method to prepare variable spacing grating. Its expected applications in future include spectrometry

optical communication

and other related fields.

关键词

Keywords

references

EFIMENKO K, RACKAITIS M, MANIAS E, et al ..Nested self-similar wrinkling patterns in skins[J]. Nat. Mater ., 2005, 4(4):293-297.

ALVAREZ-PUEBLA A, et al ..Controlling inter-nanoparticle coupling by wrinkle-assisted assembly[J]. Soft Matter , 2011, 7(9):4093-4100.

OHZONO T, MONOBE H, YAMAGUCHI R, et al .. Dynamics of surface memory effect in liquid crystal alignment on reconfigurable microwrinkles[J]. Appl. Phys. Lett ., 2009, 95(1):014101.

KHANG D Y, JIANG H, HUANG Y, et al .. A stretchable form of single-crystal silicon for high-performance electronics on rubber substrates[J]. Science , 2006, 311(5758):208-212.

褚金奎, 康维东, 曾祥伟, 等.基于柔性纳米压印工艺制备中红外双层金属纳米光栅[J].光学精密工程, 2017, 25(12):3034-3040.

CHU J K, KANG W D, ZENG X W, et al .. Fabrication of bilayer metallic nano gratings in mid-infrared region based on flexible nanoimprint lithography[J] . Opt. Precision Eng ., 2017, 25(12):3034-3040. (in Chinese)

CHAN E P, CROSBY A J. Fabricating microlens arrays by surface wrinkling[J]. Adv. Mater ., 2006, 18(24):3238-3242.

KIM H S, CROSBY A J. Solvent-responsive surface via wrinkling instability[J]. Adv. Mater ., 2011, 23(36):4188-4192.

TAHK D, LEE H H, KHANG D Y. Elastic moduli of organic electronic materials by the buckling method[J]. Macromolecules , 2009, 42(18):7079-7083.

YOO P J, LEE H H. Complex pattern formation by adhesion-controlled anisotropic wrinkling[J]. Langmuir , 2008, 24(13):6897-6902.

WATANABE M, MIZUKAMI K. Well-ordered wrinkling patterns on chemically oxidized poly (dimethylsiloxane) surfaces[J]. Macromolecules , 2012, 45(17):7128-7134.

CLAUSSEN K U, TEBBE M, GIESA R, et al .. Towards tailored topography:facile preparation of surface-wrinkled gradient poly (dimethyl siloxane) with continuously changing wavelength[J]. RSC Adv ., 2012, 2(27):10185-10188.

KIM P, HU Y, ALVARENGA J, et al .. Rational design of mechano-responsive optical materials by fine tuning the evolution of strain-dependent wrinkling patterns[J]. Advanced Optical Materials , 2013, 1(5):381-388.

李国龙, 李进.微纳光栅结构增强聚合物太阳能电池光吸收的研究[J].物理学报, 2012, 61(20):435-440.

LI G L, LI J. The light absorption enhancement in polymer solar cells with periodic nano-structures gratings[J]. Acta Phys. Sin ., 2012, 61(20):435-440.(in Chinese)

姚雪峰, 崔继承, 尹禄, 等.中阶梯光栅光谱仪波段范围校正装置[J].光学精密工程, 2017, 25(2):304-311.

YAO X F, CUI J CH, YIN L, et al .. Calibration devices for band range of echelle spectrometer[J]. Opt. Precision Eng ., 2017, 25(2):304-311. (in Chinese)

郭永兴, 熊丽, 孔建益, 等.滑动式光纤布拉格光栅位移传感器[J].光学精密工程, 2017, 25(1):50-58.

GUO Y X, XIONG L, KONG J Y, et al .. Sliding type fiber Bragg grating displacement sensor[J]. Opt. Precision Eng ., 2017, 25(1):50-58. (in Chinese)

王晨光, 杨江涛, 康宁, 等. PDMS梯度光栅结构制备技术研究[J].光谱学与光谱分析, 2015, 35(12):3529-3533.

WANG CH G, YANG J T, KANG N, et al .. The study of PDMS grating structure gradient preparation techniques[J]. Spectrosc Spect. Anal ., 2015, 35(12):3529-3533. (in Chinese)

JIANG H, KHANG D Y, SONG J, et al . . Finite deformation mechanics in buckled thin films on compliant supports[J]. Proc. Natl. Acad. Sci . USA, 2007, 104(40): 15607-15612.

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