高质量玻璃微孔电化学放电加工模型及试验

刘勇; 魏志远; 邓世辉; 李松松

doi:10.3788/OPE.20182607.1653

您当前的位置：

首页 >

文章列表页 >

高质量玻璃微孔电化学放电加工模型及试验

微纳技术与精密机械 | 更新时间：2020-08-13

- 高质量玻璃微孔电化学放电加工模型及试验
- Electrochemical discharge machining of glass micro-holes with high-quality
- 光学精密工程 2018年26卷第7期页码：1653-1660
- 作者机构：
  
  山东大学力学与机电装备联合工程技术研究中心, 山东威海 264209
- 作者简介：
  
  [ "刘勇(1982-), 男, 山东日照人, 博士, 副教授, 硕士生导师, 2011年于南京航空航天大学获得博士学位, 主要从事精密、微细特种加工方面的研究。E-mail: rzliuyong@163.com" ]
  [ "魏志远(1994-), 男, 内蒙古锡林浩特人, 硕士研究生, 2016年于山东大学获得学士学位, 主要研究方向为精密、微细电解电火花加工技术。E-mail:18369189101@163.com" ]
- 基金信息：
  
  山东省自然科学基金资助项目(ZR2018MEE018);国家自然科学基金资助项目(51305238);中国博士后基金资助项目(2018M630772);山东大学（威海）青年学者未来计划资助项目(2015WHWLJH03)
- DOI：10.3788/OPE.20182607.1653
  中图分类号： V261.5;TG661
- 收稿日期：2017-11-23，
  
  录用日期：2018-1-20，
  
  纸质出版日期：2018-07-25
- 稿件说明：
移动端阅览
刘勇, 魏志远, 邓世辉, 等. 高质量玻璃微孔电化学放电加工模型及试验[J]. 光学精密工程, 2018,26(7):1653-1660.

Yong LIU, Zhi-yuan WEI, Shi-hui DENG, et al. Electrochemical discharge machining of glass micro-holes with high-quality[J]. Optics and precision engineering, 2018, 26(7): 1653-1660.
刘勇, 魏志远, 邓世辉, 等. 高质量玻璃微孔电化学放电加工模型及试验[J]. 光学精密工程, 2018,26(7):1653-1660. DOI： 10.3788/OPE.20182607.1653.

Yong LIU, Zhi-yuan WEI, Shi-hui DENG, et al. Electrochemical discharge machining of glass micro-holes with high-quality[J]. Optics and precision engineering, 2018, 26(7): 1653-1660. DOI： 10.3788/OPE.20182607.1653.

摘要

超白玻璃是一种超透明低铁玻璃，因其具有优越的物理、光学性能，而广泛应用于精密电子、高档汽车及太阳能光伏发电领域。由于其本身的硬脆特性，玻璃微孔的出口极易破损，为提高玻璃微孔的加工定域性，降低微孔出口破损的可能性，对微细电化学放电钻削加工工艺进行了研究与优化。首先，根据电化学放电原理，探讨了气膜的形成和材料去除机理，分析了放电能量对玻璃微孔加工工艺的影响，建立了单位时间电化学放电加工能量控制模型；其次，试验分析了电压幅值、占空比、脉冲频率、进给速度等主要参数对微孔入口直径和出口质量的影响；最后，通过优化后的加工参数在厚度为300

m的超白玻璃试件上，成功加工得到入口直径为172

m、出口直径为167

m的3×3微孔阵列结构，出口无破损现象。实验结果表明，基于脉冲能量控制的微细电化学放电钻削工艺在玻璃微孔加工方面很有潜力。

Abstract

Ultra-white glass is a kind of transparent low-iron glass. Owing to its excellent physical and optical properties

it is widely used in many fields such as precision electronics

luxury automobiles

and solar photovoltaic power generation. Because of its hard and brittle characteristics

the outlets of glass micro-holes are easily damaged. In order to improve the machining localization of glass micro-holes and reduce the possibility of micro-hole outlet damage

the micro electrochemical discharge drilling process was studied and optimized. Firstly

according to the principle of electrochemical discharge

the film forming mechanism and the material removal mechanism were discussed

the influence of discharge energy on the micro-holes machining technology of glass was analyzed

and an energy control model of electrochemical discharge was established. Secondly

according to the experiment

the influence of pulse voltage

frequency

and feed rate on the inlet diameter and outlet quality of the micro-holes was analyzed. Finally

the optimized parameters were chosen to fabricate a 3×3 high quality glass micro holes array with an inlet diameter of 172

m and an outlet diameter of 167

m on an ultra-white glass workpiece with a thickness of 300

m; the outlets exhibited no signs of damage. The experimental results show that under the control of the discharge energy

micro electrochemical discharge drilling technology has great potential in glass micro-hole machining.

关键词

Keywords

references

ZHANG Z P, CHENG W H, HUANG F Y, et al .. 3D microstructuring of pyrex glass using the electrochemical discharge machining process[J]. Journal of Micromechanics and Microengineering , 2007, 17(5):960-966.

郑锦华, 吴双, 魏新熙, 等.研磨抛光表面微孔结构的形成[J].光学精密工程, 2016, 24(4):788-795.

ZHENG J H, WU SH, WEI X X, et al .. Formation of surface micro-pore texture by grinding and polishing[J]. Opt. Precision Eng ., 2016, 24(4):788-795.(in Chinese)

饶小双, 张飞虎, 刘立飞, 等.电火花机械复合磨削反应烧结SiC陶瓷的表面特征[J].光学精密工程, 2016, 24(9):2192-2199.

RAO X SH, ZHANG F H, LIU L F. Surface characteristics for RB-SiC ceramics by electrical discharge diamond grinding[J]. Opt. Precision Eng ., 2016, 24(9):2192-2199.(in Chinese)

沈剑云, 陈剑彬, 鲁浪, 等.径向超声振动辅助锯切光学玻璃[J].光学精密工程, 2016, 24(7):1615-1622.

SHEN J Y, CHEN J B, LU L, et al .. Sawing of optical glass assisted with ultrasonic vibration[J]. Opt. Precision Eng ., 2016, 24(7):1615-1622.(in Chinese)

NGUYEN K, LEE P A, KIM B H, et al .. Experimental investigation of ECDM for fabricating micro structures of quartz[J]. International Journal of Precision Engineering and Manufacturing , 2015, 16(1):5-12.

JIANG B Y, LAN S H, WILT K, et al .. Modeling and experimental investigation of gas film in micro-electrochemical discharge machining process[J]. International Journal of Machine Tools and Manufacture , 2015, 90(3):8-15.

SINGH S, MITTAL S, MUKHEJA J, et al .. Optimization of material removal rate using electro-chemical discharge machining for slotting operation[J]. International Journal of Scientific Research and Engineering Studie , 2015, 2(3):113-117.

DAFADE S V, WAGHMARE C A. Optimization of process parameters in Electrochemical Discharge Machining (ECDM)[J]. Journal of Basic and Applied Engineering Research , 2015, 2(16):1339-1343.

CHAK S K. Electrochemical discharge machining discharge generation:a review[J]. Journal of Material Science and Mechanical Engineering , 2015, 2(10):49-53.

LAIO Y S, WU L C, PENG W Y. A study to improve drilling quality of electrochemical discharge machining(ECDM) process[J]. Procedia CIRP , 2013, 6:609-614.

LADEESH V G, MANU R. Grinding aided Electrochemical Discharge Drilling (G-ECDD) of borosilicate glass and its performance evaluation[J]. Procedia Technology , 2016, 25:1122-1128.

ELHAMI S, RAZFAR M R. Effect of ultrasonic vibration on the single discharge of electrochemical discharge machining[J]. Materials and Manufacturing Processes , 2017, 33(4):444-451.

吴俊杰, 谷安, 吕传伟, 等.混粉电解电火花复合加工工艺研究[J].电加工与模具, 2012(5):64-66.

WU J J, GU A, LÜ CH W, et al .. Research on power-mixed electrochemical discharge machining process[J]. Electromachining & Mould , 2012(5):64-66.(in Chinese)

LIU Y, WEI Z Y, WANG M Y, et al .. Experimental investigation of micro wire electrochemical discharge machining by using a rotating helical tool[J]. Journal of Manufacturing Processes , 2017, 29:265-271.

孙艳琪, 唐伟东, 康小明, 等.基于力反馈控制进给的电化学放电加工方法[J].电加工与模具, 2015(3):31-36.

SUN Y Q, TANG D W, KANG X M, et al .. Electrochemical discharge machining method based on force feedback feeding[J]. Electromachining & Mould , 2015(3):31-36.(in Chinese)

孙艳琪. 绝缘硬脆材料电化学放电加工关键技术研究[D]. 上海: 上海交通大学, 2015. http://www.wanfangdata.com.cn/details/detail.do?_type=degree&id=D784048

SUN Y Q. Key Technologies For Ecdm Machining Of Non-Conductive Hard And Brittle Materials [D]. Shanghai: Shanghai Jiao Tong University, 2015. (in Chinese)

ZHANG Z Y, HUANG L, JIANG Y J, et al .. A study to explore the properties of electrochemical discharge effect based on pulse power supply[J]. International Journal of Advanced Manufacturing Technology , 2016, 85(9):2107-2114.

黄磊. 基于电化学放电加工工艺的玻璃微细加工研究[D]. 江苏: 江苏大学, 2016. http://www.wanfangdata.com.cn/details/detail.do?_type=degree&id=D823418

HUANG L. Research of Micro-machining of Glass Based on Electrochemical Discharge Machining [D]. Jiangsu: Jiangsu University, 2016. (in Chinese)

刘庆明, 汪建平, 李磊, 等.电火花放电能量及其损耗的计算[J].高电压技术, 2014, 40(4):1255-1260.

LIU Q M, WANG J P, LI L, et al .. Calculation of electric spark discharge energy and its energy loss[J]. High Voltage Engineering , 2014, 40(4):1255-1260.(in Chinese)

WÜTHRICHR, ABOUZIKI J D. Micromachining Using Electrochemical Discharge Phenomenon [M].Second Edition.US:Elsevier, 2015:84-88.

CAO X D, KIM B H, CHU C N. Miro-structuring of glass with features less than 100μm by electrochemical discharge machining[J]. Precision Engineering , 2009, 33(4):459-465.

王明宇. 玻璃微结构电解电火花加工关键技术研究[D]. 山东: 山东大学, 2017. http://www.wanfangdata.com.cn/details/detail.do?_type=degree&id=Y3240875

WANG M Y. Study on Key Technology of Micro Electrochemical Discharge Machining for Glass Microstructures [D]. Shandong: Shandong University, 2017. (in Chinese)

浏览量

699

下载量

CSCD

文章被引用时，请邮件提醒。

提交

工具集

关联资源

暂无数据