辊筒模具超精密机床系统设计与工艺

乔政; 刘玉涛; 吴言功; 张鹏

doi:10.3788/OPE.20182607.1661

您当前的位置：

首页 >

文章列表页 >

辊筒模具超精密机床系统设计与工艺

微纳技术与精密机械 | 更新时间：2020-08-13

- 辊筒模具超精密机床系统设计与工艺
- Design and process of ultra-precision drum roll lathe
- 光学精密工程 2018年26卷第7期页码：1661-1671
- 作者机构：
  
  哈尔滨工业大学机电工程学院, 黑龙江哈尔滨 150001
- 作者简介：
  
  [ "乔政(1989-), 男, 山东潍坊人, 博士研究生, 2013年于哈尔滨工业大学获得硕士学位, 主要从事超精密机床设计与运动控制以及超精密切削工艺方面的研究。E-mail:qiaozhengyunlong@126.com" ]
- 基金信息：
  
  国家科技重大专项(2011ZX04004-021);国家自然科学基金资助项目(51605119)
- DOI：10.3788/OPE.20182607.1661
  中图分类号： TG502
- 收稿日期：2018-01-18，
  
  录用日期：2018-2-10，
  
  纸质出版日期：2018-07-25
- 稿件说明：
移动端阅览
乔政, 刘玉涛, 吴言功, 等. 辊筒模具超精密机床系统设计与工艺[J]. 光学精密工程, 2018,26(7):1661-1671.

Zheng QIAO, Yu-tao LIU, Yan-gong WU, et al. Design and process of ultra-precision drum roll lathe[J]. Optics and precision engineering, 2018, 26(7): 1661-1671.
乔政, 刘玉涛, 吴言功, 等. 辊筒模具超精密机床系统设计与工艺[J]. 光学精密工程, 2018,26(7):1661-1671. DOI： 10.3788/OPE.20182607.1661.

Zheng QIAO, Yu-tao LIU, Yan-gong WU, et al. Design and process of ultra-precision drum roll lathe[J]. Optics and precision engineering, 2018, 26(7): 1661-1671. DOI： 10.3788/OPE.20182607.1661.

摘要

为了提高国内大尺寸光学微结构薄膜的光学级模具制造水平，打破国外在辊筒模具超精密加工装备的垄断，完成了国内首台套大尺寸光学微结构辊筒模具超精密机床的设计、集成以及典型微结构工艺的研究工作。首先，根据辊筒模具表面微结构加工工艺的特点，分析了辊筒模具超精密机床的关键技术并完成了机床结构与运动控制系统设计。在机床系统集成后，完成了运动控制系统的调试。直线轴执行阶梯运动完成了直线轴运动分辨率的测试。其次，通过准直仪和激光干涉仪完成了机床关键轴系的直线度及定位精度的测试和补偿。最后，采用多步切削法切削实验，以降低毛刺高度为目标，完成了V槽阵列的加工工艺参数优化。经测试，该超精密加工机床的直线运动分辨可达到5 nm，直线轴的双向定位精度均优于1

m/1 100 mm；采用多步切削法加工V槽阵列，最后一次切削深度建议在1~2

m，可以获得合格的V槽阵列。

Abstract

In order to improve the domestic roll-to-roll manufacturing level of optical microstructure films and change the fact that the manufacture of nearly all ultra-precision roll machining equipment is monopolized by foreign companies

the first domestic ultra-precision roll lathe is designed and integrated successfully with process experiments for typical microstructures. First

according to the characteristics of optical microstructures for roller mold processing

the key technologies of machine tools were analyzed. From this analysis

the machine's structure and motion control system are designed. After integration of the machine tool system

debugging of the motion control system and linear axis motion resolution tests are carried out. Second

the straightness and positioning accuracy of each axis are measured and compensated using a collimator and laser interferometer. Finally

parameter optimization tests for reducing the burr height when manufacturing V-groove arrays are performed through a cutting experiment by using a multi-step cutting method. Experimental results indicate that the linear motion resolution of the ultra-precision machining lathe can reach 5 nm

full-stroke bi-directional positioning accuracy of the linear axis is better than 1

and the V-groove micro-structure array processed with a final cutting depth of 1-2

m has excellent surface quality.

关键词

Keywords

references

孟繁斐, 步敬.集成成像系统中高填充率微透镜阵列的设计与加工[J].光学精密工程, 2017, 25(8):2130-2138.

MENG F F, BU J. Design and fabrication for micro-lens array with high fill factor in integral imaging system[J]. Opt. Precision Eng ., 2017, 25(8):2130-2138. (in Chinese)

董晓彬, 周天丰, 庞思勤, 等.玻璃模压成形用微沟槽磷化镍模具的超精密切削加工[J].光学精密工程, 2017, 25(12):2986-2993.

DONG X B, ZHOU T F, PANG S Q, et al. . Ultraprecision microgroove machining of nickel phosphorous plating mold for glass molding[J]. Opt. Precision Eng ., 2017, 25(12):2986-2993. (in Chinese)

WANG Y J, OUYANG S H, CHAO W C, et al .. High directional backlight using an integrated light guide plate[J]. Optics Express , 2015, 23(2):1567-1575.

LANGUY F, HABRAKEN S. Performance comparison of four kinds of flat nonimaging Fresnel lenses made of polycarbonates and polymethyl methacrylate for concentrated photovoltaics[J]. Optics Letters , 2011, 36(14):2743-2745.

KUMAR V, SHRIVASTAVA R L, UNTAWALE S P. Fresnel lens:A promising alternative of reflectors in concentrated solar power[J]. Renewable and Sustainable Energy Reviews , 2015, 44:376-390.

AHN S, CHOI M, BAE H, et al .. Design and fabrication of micro optical film by ultraviolet roll imprinting[J]. Japanese Journal of Applied Physics , 2007, 46(8S):5478.

CHANG C Y, TSAI M H. Development of a continuous roll-to-roll processing system for mass production of plastic optical film[J]. Journal of Micromechanics and Microengineering , 2015, 25(12):125014.

JASINEVICIUS R, DUDUCH J, CIRINO G, et al .. Diamond turning of small Fresnel lens array in single crystal InSb[J] . Journal of Micromechanics and Microengineering , 2013, 23(5):055025.

LI L. Fabrication of diffractive optics by use of slow tool servo diamond turning process[J]. Optical Engineering , 2006, 45(11):113401.

WANG M W, TSENG C C. Analysis and fabrication of a prism film with roll-to-roll fabrication process[J]. Optics Express , 2009, 17(6):4718-4725.

OH J S, SONG C K, HWANG J, et al .. An ultra-precision lathe for large-area micro-structured roll molds[J]. Journal of the Korean Society for Precision Engineering , 2013, 30(12):1303-1312.

Nanotech HDL2000/HDL2000-HD Specification Overview[R]. Swanzey: Moore Nanotechnology Systems, 2010.

DENKENA B, DE LEON L, KÄSTNER J. Burr Formation in Microstructuring Processes [M].Heidelberg:Springer Berlin, 2010:55-62.

陈玉龙. 飞刀切削加工中毛刺的形成过程仿真与实验研究[D]. 哈尔滨: 哈尔滨工业大学, 2014: 11-27. http://www.wanfangdata.com.cn/details/detail.do?_type=degree&id=D593018

CHEN Y L. Modeling and Experimental Study on Burr Formation Process in Fly-cutting [D]. Harbin: Harbin Institute of Technology, 2014: 11-27. (in Chinese)

浏览量

438

下载量

CSCD

文章被引用时，请邮件提醒。

提交

工具集

关联资源

镍磷合金微沟槽金刚石切削泊松毛刺形成机理

用于超薄MiniLED背光模组的光学膜设计

提高车载平视显示器观看亮度的微结构膜设计

用于汽车抬头显示器的光学增亮膜设计

NiC/Ti中子多层膜的微结构和界面研究