离心熔铸非球面镜镜胚面形偏差工艺参数的敏感性研究

张心明; 徐鑫莉; 蔡鹏; 于阳; 赵立新

doi:10.3788/OPE.20182607.1719

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离心熔铸非球面镜镜胚面形偏差工艺参数的敏感性研究

微纳技术与精密机械 | 更新时间：2020-08-13

- 离心熔铸非球面镜镜胚面形偏差工艺参数的敏感性研究
- Study on sensitivity of surface deviation for aspheric mirror blank on centrifugal melting casting
- 光学精密工程 2018年26卷第7期页码：1719-1727
- 作者机构：
  
  1.长春理工大学机电工程学院, 吉林长春 130022
  2.吉林工商学院工学院, 吉林长春 130507
  3.中国第一汽车集团公司智能网联开发院, 吉林长春 130000
  4.中国科学院长春光学精密机械与物理研究所, 吉林长春 130033
  5.吉林省留学回国人员和专家服务中心, 吉林长春 130022
- 作者简介：
  
  [ "张心明(1967-), 男, 黑龙江齐齐哈尔人, 博士, 研究员, 博士生导师, 1990年、2003年、2009年于长春理工大学分别获得学士、硕士、博士学位, 主要从事精密、超精密加工检测及装备等方面的研究。E-mail:zxm@cust.edu.cn" ]
  [ "徐鑫莉(1987-)女, 吉林辽源人, 博士, 讲师, 2010年于山东理工大学获得学士学位, 2013年、2017年于长春理工大学获得硕士、博士学位, 主要从事精密、超精密加工检测及装备的研究。E-mail:455855261@qq.com" ]
- 基金信息：
  
  吉林省自然科学基金资助项目(20150101024JC)
- DOI：10.3788/OPE.20182607.1719
  中图分类号： O439;TH171.65
- 收稿日期：2017-11-01，
  
  录用日期：2018-1-20，
  
  纸质出版日期：2018-07-25
- 稿件说明：
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张心明, 徐鑫莉, 蔡鹏, 等. 离心熔铸非球面镜镜胚面形偏差工艺参数的敏感性研究[J]. 光学精密工程, 2018,26(7):1719-1727.

Xin-ming ZHANG, Xin-li XU, Peng CAI, et al. Study on sensitivity of surface deviation for aspheric mirror blank on centrifugal melting casting[J]. Optics and precision engineering, 2018, 26(7): 1719-1727.
张心明, 徐鑫莉, 蔡鹏, 等. 离心熔铸非球面镜镜胚面形偏差工艺参数的敏感性研究[J]. 光学精密工程, 2018,26(7):1719-1727. DOI： 10.3788/OPE.20182607.1719.

Xin-ming ZHANG, Xin-li XU, Peng CAI, et al. Study on sensitivity of surface deviation for aspheric mirror blank on centrifugal melting casting[J]. Optics and precision engineering, 2018, 26(7): 1719-1727. DOI： 10.3788/OPE.20182607.1719.

摘要

离心熔铸技术在大口径非球面镜镜胚的制造方面具有独特优势。本文通过自行研制的缩比模型实验机进行试验，深入研究了离心熔铸工艺及成型镜胚质量，详细介绍了模具涂层的制备、离心熔铸的加热及冷却等工艺过程，制备了非球面镜镜胚模型。采用数值模拟与试验研究相结合的方法，对所得镜胚面形偏差工艺参数的敏感性进行了研究。分析了模具的热膨胀系数、镜胚冷却速率、直径及加热温度对面形偏差的影响，得到了偏差工艺参数的敏感性规律。通过对面形偏差进行两次迭代补偿，面形偏差值从-84 μm降到33 μm，补偿后的结果满足设计要求。采用离心熔铸技术，可以制备满足上表面垂直偏差在30~40 μm范围内的非球面镜镜胚。

Abstract

Centrifugal melting casting technology has unique advantages in the manufacture of large aspheric mirror blanks. In this paper

the centrifugal casting process and the quality of the mold embryo were studied in depth by using a self-developed shrinkage model experiment machine. In order to obtain the required mirror blank

the processes of preparing the coating

heating

cooling and preserving the heat of the mold were introduced in detail. The influencing factors of shape deviation in the mirror blank production were studied by comparing simulation values with experimental results. The influence of the coefficient of thermal expansion

cooling rate

diameter

and heating temperature on the surface deviation was analyzed

and a mathematical expression relating these parameters to the deviation was derived. The compensation of the deviation was then calculated in two iterations

thus reducing the surface deviation from 84 to 33 μm. The compensation results met the design requirements. Using centrifugal casting technology

the aspheric mirror embryo can be prepared to meet the vertical deviation specifications of its upper surface in the range of 30~40 μm.

关键词

Keywords

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