硅微陀螺仪高精度数字化相敏解调ASIC

赵阳; 夏国明; 施芹; 裘安萍

doi:10.3788/OPE.20182609.2159

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硅微陀螺仪高精度数字化相敏解调ASIC

更新时间：2020-08-13

- 硅微陀螺仪高精度数字化相敏解调ASIC
- High-accuracy digitized phase-sensitive demodulation ASIC design for silicon microgyroscope
- 光学精密工程 2018年26卷第9期页码：2159-2168
- 作者机构：
  
  南京理工大学机械工程学院, 江苏南京 210094
- 作者简介：
  
  [ "赵阳(1988-), 男, 河南洛阳人, 博士研究生, 2011年于南京理工大学获得学士学位, 主要从事MEMS惯性技术方面的研究。E-mail:zhaoyang0216@yeah.net" ]
  裘安萍(1971-), 女, 浙江宁波人, 教授, 博士生导师, 1998年、2001年于东南大学分别获得硕士、博士学位, 主要从事MEMS惯性技术的研究。E-mail:apqiu@mail.njust.edu.cn QIU An-ping, E-mail:apqiu@mail.njust.edu.cn
- 基金信息：
  
  国家自然科学基金资助项目(61701236)
- DOI：10.3788/OPE.20182609.2159
  中图分类号： TN96;TP212
- 收稿日期：2018-01-10，
  
  录用日期：2018-2-10，
  
  纸质出版日期：2018-09-25
- 稿件说明：
移动端阅览
赵阳, 夏国明, 施芹, 等. 硅微陀螺仪高精度数字化相敏解调ASIC[J]. 光学精密工程, 2018,26(9):2159-2168.

Yang ZHAO, Guo-ming XIA, Qin SHI, et al. High-accuracy digitized phase-sensitive demodulation ASIC design for silicon microgyroscope[J]. Optics and precision engineering, 2018, 26(9): 2159-2168.
赵阳, 夏国明, 施芹, 等. 硅微陀螺仪高精度数字化相敏解调ASIC[J]. 光学精密工程, 2018,26(9):2159-2168. DOI： 10.3788/OPE.20182609.2159.

Yang ZHAO, Guo-ming XIA, Qin SHI, et al. High-accuracy digitized phase-sensitive demodulation ASIC design for silicon microgyroscope[J]. Optics and precision engineering, 2018, 26(9): 2159-2168. DOI： 10.3788/OPE.20182609.2159.

摘要

为了抑制相敏解调引入的闪频（1/

）噪声，实现硅微陀螺仪的高精度片上数字化输出，设计了一种基于sigma-delta模数转换器的相敏解调ASIC。首先，提出了一种量化硅微陀螺仪驱动及检测载波信号的低闪频噪声数字化方案，建立了sigma-delta模数转换器的系统级分析模型，并利用Simulink完成了基于谐振器级联前馈（CRFF）结构的三阶sigma-delta模数转换器系统级设计。其次，研究了sigma-delta模数转换器的电路级实现方法，在Cadence IC平台上完成了包括低噪声开关电容积分器、加法器及1 bit高速量化器等模块的晶体管级电路设计与验证，并采用AMS 0.35

m工艺进行了流片。实验表明：该sigma-delta模数转换器具有三阶噪声整形功能，在硅微陀螺仪的工作频率处（6.4 kHz）量化噪声小于200 nV/Hz

1/2

，等效精度位数为12。硅微陀螺仪数字化输出角度随机游走0.012（°）/h

1/2

，Allan方差零偏不稳定性为0.34（°）/h，零偏稳定性（1

）为0.94（°）/h，满足高精度硅微陀螺仪的数字化精度需求，并提高了整表集成度。

Abstract

In order to remove the flicker noise introduced by phase-sensitive demodulation and realize a digitized silicon microgyroscope

a phase-sensitive demodulation Application Specific Integrated Circuit (ASIC) was designed. First

a low flicker noise digitized phase-sensitive demodulation scheme was proposed

and the system level analysis model of a third-order Cascade-Resonator-Feedforward (CRFF) sigma-delta ADC was defined. Then

the circuit level realization method of the sigma-delta ADC was detailed; the low noise switched-cap integrator

the adder and the 1-bit quantizer were designed using Cadence IC design kits. Finally

the proposed phase sensitive demodulation system design was taped out in the AMS 0.35

m process. The experimental results indicate that the proposed ADC has a third-order noise shaping characteristic and its quantization noise floor at 6.4 kHz is below 200 nV/Hz

1/2

which corresponds to 12 bits equivalent accuracy. The digitized silicon microgyroscope has an 0.012(°)/h

1/2

angular random rate and a 0.34(°)/h bias instability

with 1σ bias stability of 0.94(°)/h

which satisfies the requirement of high accuracy digitization and improves the integration level of the gyroscope.

关键词

Keywords

references

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