高功率体声波谐振器的自热效应及其修正

韩超; 张大鹏

doi:10.3788/OPE.20182609.2229

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高功率体声波谐振器的自热效应及其修正

更新时间：2020-08-13

- 高功率体声波谐振器的自热效应及其修正
- Self-heating effect and its modification of high power bulk acoustic-wave resonators
- 光学精密工程 2018年26卷第9期页码：2229-2235
- 作者机构：
  
  1.西南科技大学信息工程学院, 四川绵阳 621010
  2.中国工程物理研究院电子工程研究所, 四川绵阳 621999
  3.中国科学院高能物理研究所核探测与核电子学国家重点实验室, 北京 100049
- 作者简介：
  
  [ "韩超(1993-), 男, 重庆万州人, 主要从事微电子机械系统(MEMS)及其应用的研究。E-mail:hanchao54@qq.com" ]
- 基金信息：
  
  国家自然科学基金资助项目(61574131);中国工程物理研究院超精密加工技术重点实验室基金资助项目(2014ZA001);核探测与核电子学国家重点实验室开放课题基金资助项目(2016KF-02)
- DOI：10.3788/OPE.20182609.2229
  中图分类号： TN65;TN702
- 收稿日期：2018-05-18，
  
  录用日期：2018-7-2，
  
  纸质出版日期：2018-09-25
- 稿件说明：
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韩超, 张大鹏. 高功率体声波谐振器的自热效应及其修正[J]. 光学精密工程, 2018,26(9):2229-2235.

Chao HAN, Da-peng ZHANG. Self-heating effect and its modification of high power bulk acoustic-wave resonators[J]. Optics and precision engineering, 2018, 26(9): 2229-2235.
韩超, 张大鹏. 高功率体声波谐振器的自热效应及其修正[J]. 光学精密工程, 2018,26(9):2229-2235. DOI： 10.3788/OPE.20182609.2229.

Chao HAN, Da-peng ZHANG. Self-heating effect and its modification of high power bulk acoustic-wave resonators[J]. Optics and precision engineering, 2018, 26(9): 2229-2235. DOI： 10.3788/OPE.20182609.2229.

摘要

为了在高功率体声波谐振器的设计中考虑自热效应的影响，提出一种声-电磁-热多物理场协同仿真方法，来模拟自热导致的频率偏移，并针对此频率偏移的消除问题，提出了相应的修正方案。首先，由常用的Mason模型设计出满足谐振频率要求的初始谐振器。接着，通过声-电磁-热多物理场协同仿真得到自热导致的频率偏移。然后，初步调整压电层厚度，来抵消此频率偏移。最后，对调整后的谐振器迭代进行声-电磁-热多物理场协同仿真，以确定压电层厚度的调整量。结果表明：自热效应会导致高功率体声波谐振器的谐振频率明显下偏（谐振器案例的频率偏移量为3 MHz），通过减薄压电层厚度（案例中为1.7 nm）可彻底消除此频率偏移。所提出的高功率体声波谐振器的修正方案能有效地解决自热效应导致的谐振频率偏移问题。

Abstract

In order to study self-heating effects in the design of high-power bulk acoustic-wave resonators

an acoustic electromagnetic thermal multiphysics co-simulation method was proposed to simulate frequency shifts caused by self-heating. A corresponding design modification scheme was proposed to eliminate these frequency shifts. First

an initial resonator that satisfies the resonant frequency requirement was designed from the commonly used Mason model. Then

the frequency shifts caused by self-heating were obtained through acoustic electromagnetic thermal multiphysics co-simulation. Next

the frequency shifts were eliminated by adjusting the preliminary thickness of the piezo-layer. Finally

the acoustic electromagnetic thermal multiphysics co-simulation was performed iteratively on the adjusted resonator to determine the final thickness adjustment of the piezo-layer. The results show that the self-heating effect causes the resonant frequency of the high-power bulk acoustic-wave resonator to shift downward significantly (the frequency shift of the resonator case was 3 MHz)

and this frequency shift can be completely eliminated by reducing the thickness of the piezo-layer (1.7 nm for the resonator case). The proposed scheme for design modification of high-power bulk acoustic-wave resonators can effectively solve the problem of frequency shifts resulting from self-heating.

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references

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