纳米胶体自激脉冲空化射流抛光技术

王星; 徐琴; 张勇; 张飞虎

doi:10.3788/OPE.20182609.2294

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纳米胶体自激脉冲空化射流抛光技术

更新时间：2020-08-13

- 纳米胶体自激脉冲空化射流抛光技术
- Nanoparticle colloid self-induced pulsed cavitation jet polishing
- 光学精密工程 2018年26卷第9期页码：2294-2303
- 作者机构：
  
  1.河南工业大学机电工程学院, 河南郑州 450001
  2.哈尔滨工业大学机电工程学院, 黑龙江哈尔滨 150001
- 作者简介：
  
  [ "王星(1982-), 男, 河南平顶山人, 博士, 讲师, 2004年、2009年于河南理工大学分别获得学士、硕士学位, 2014年于哈尔滨工业大学获得博士学位, 主要从事精密与超精密加工技术方面的研究。E-mail:wangxing@haut.edu.cn" ]
  [ "张飞虎(1964-), 男, 河南荥阳人, 博士, 教授, 1984年、1987年于西北工业大学分别获得学士、硕士学位, 1993年在哈尔滨工业大学获博士学位, 主要从事精密与超精密加工方面的研究。E-mail:zhangfh@hit.edu.cn" ]
- 基金信息：
  
  国家自然科学基金河南省联合基金重点项目资助(U1604254);国家自然科学基金面上项目资助(51775170);河南省教育厅自然科学项目资助(17A460009)
- DOI：10.3788/OPE.20182609.2294
  中图分类号： TG664
- 收稿日期：2018-02-01，
  
  录用日期：2018-4-2，
  
  纸质出版日期：2018-09-25
- 稿件说明：
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王星, 徐琴, 张勇, 等. 纳米胶体自激脉冲空化射流抛光技术[J]. 光学精密工程, 2018,26(9):2294-2303.

Xing WANG, Qin XU, Yong ZHANG, et al. Nanoparticle colloid self-induced pulsed cavitation jet polishing[J]. Optics and precision engineering, 2018, 26(9): 2294-2303.
王星, 徐琴, 张勇, 等. 纳米胶体自激脉冲空化射流抛光技术[J]. 光学精密工程, 2018,26(9):2294-2303. DOI： 10.3788/OPE.20182609.2294.

Xing WANG, Qin XU, Yong ZHANG, et al. Nanoparticle colloid self-induced pulsed cavitation jet polishing[J]. Optics and precision engineering, 2018, 26(9): 2294-2303. DOI： 10.3788/OPE.20182609.2294.

摘要

为了满足光学复杂曲面的精密、高效加工，提出一种利用空化效应促进射流加工效率的光学表面加工方法——纳米胶体自激脉冲空化射流抛光，并研制了加工系统。采用流体动力学对纳米胶体自激脉冲空化射流抛光中的喷射过程进行了仿真，获得了周期为0.3 s的自激脉冲射流典型时刻下加工流场的流体动、静压力、速度、空化效应分布规律。进行了纳米胶体自激脉冲空化射流抛光试验，结果表明该系统能够产生效果良好的自激脉冲空化射流。采用该方法对单晶硅表面进行加工可以得到表面粗糙度为

0.904 nm（

1.225 nm）的超光滑表面，此加工表面粗糙度质量与相同加工条件下的普通纳米胶体射流抛光相当，但其加工效率较普通纳米胶体射流抛光能够提升20%左右，能够满足光学表面高效精密加工的需要。

Abstract

An optical surface processing method using the cavitation effect

termed as nanoparticle colloid self-induced pulsed cavitation jet polishing (NPCJP)

has been proposed to precisely machine complex optical surfaces with enhanced machining efficiency. The NPCJP system has been developed and simulated by fluid dynamics simulation. The dynamic pressure

static pressure

fluid velocity and cavitation effect of the polishing flow field corresponding to a pulse period of 0.3 s

have been determined. NPCJP jet experiments have been performed and the results show that the NPCJP system can effectively produce self-excited pulsed cavitation jet. NPCJP experiment on a single crystal silicon surface show that supersmooth surface with roughness of

0.904 nm (

1.225 nm) can be obtained. The roughness of the surface obtained using the proposed method is equal to that obtained using the conventional nanoparticle colloid jet polishing method

but the processing efficiency of the NPCJP jet polishing method is higher by about 20%. The results show that the NPCJP method can effectively machine complex optical surfaces.

关键词

Keywords

references

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