辉光放电清洗在同步辐射光束线上的应用

李波; 陈明; 吴佳兴; 刘俊男

doi:10.3788/OPE.20182610.2389

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辉光放电清洗在同步辐射光束线上的应用

现代应用光学 | 更新时间：2020-07-05

- 辉光放电清洗在同步辐射光束线上的应用
- Applications of glow discharge cleaning in synchrotron radiation beamlines
- 光学精密工程 2018年26卷第10期页码：2389-2394
- 作者机构：
  
  1.中国科学院上海应用物理研究所, 上海 201204
  2.中国科学院大学, 北京 100049
- 作者简介：
  
  [ "李波(1989-), 男, 安徽舒城人, 博士研究生, 主要从事真空和等离子体清洗方面的研究。E-mail:libo1208_ok@126.com" ]
- 基金信息：
  
  国家重大科学仪器设备开发专项(Y319071061);中国科学院上海应用物理研究所青年学者发展协作组资助项目(Y329051061)
- DOI：10.3788/OPE.20182610.2389
  中图分类号： O434.1
- 收稿日期：2018-03-17，
  
  录用日期：2018-4-25，
  
  纸质出版日期：2018-10-25
- 稿件说明：
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李波, 陈明, 吴佳兴, 等. 辉光放电清洗在同步辐射光束线上的应用[J]. 光学精密工程, 2018,26(10):2389-2394.

Bo LI, Ming CHEN, Jia-xing WU, et al. Applications of glow discharge cleaning in synchrotron radiation beamlines[J]. Optics and precision engineering, 2018, 26(10): 2389-2394.
李波, 陈明, 吴佳兴, 等. 辉光放电清洗在同步辐射光束线上的应用[J]. 光学精密工程, 2018,26(10):2389-2394. DOI： 10.3788/OPE.20182610.2389.

Bo LI, Ming CHEN, Jia-xing WU, et al. Applications of glow discharge cleaning in synchrotron radiation beamlines[J]. Optics and precision engineering, 2018, 26(10): 2389-2394. DOI： 10.3788/OPE.20182610.2389.

摘要

同步辐射光束线上存在的碳污染是影响光束线特别是软X光束线传输效率的重要原因，污染的生成与镜箱腔壁上存在有少量的油有关。为了获得更加洁净的真空室，通过辉光放电对镜箱真空室壁进行清洗，力争从源头上减少光学元件碳污染的产生。设计并搭建了一套应用在同步辐射光束线镜箱上的辉光放电清洗系统，并研究了装置在不同真空度下辉光的伏安特性。利用四极质谱对辉光放电前后及过程中镜箱内的残气进行分析。研究得出，真空室表面残留油分子的初步裂解产物主要是分子量为69的粒子。通过辉光放电清洗，真空室内残存的微量油大分子的（分子量为39，41，43，55，57，69，71）减少幅度达到50%。辉光放电清洗对真空腔体内表面油分子有明显的去除效果。本文研究的内容对于减少光束线站特别是软X射线光束线上碳污染具有重要意义。

Abstract

Carbon contamination in a synchrotron radiation (SR) beamline is a significant factor affecting the transmission efficiency in the beamline

particularly in a soft X-ray beamline. Currently

the main solution to carbon contamination is to clean or replace the contaminated optical components. A large number of experimental studies have shown that the formation of carbon contamination is related to the presence of a small amount of oil on the chamber wall. Therefore

the purpose of this study was to clean the vacuum chamber wall of the mirror box and obtain a cleaner vacuum chamber by glow discharge

striving to fundamentally prevent the formation of carbon contamination. This paper applied the Glow Discharge Cleaning (GDC) system to the Shanghai Synchrotron Radiation Facility (SSRF) beamline mirror chamber. The volt-ampere characteristics of the device under different vacuum pressures were studied. Mass spectrometry was then performed to analyze the residual gas in the mirror chamber before and after the glow discharge as well as the GDC process. The result shows that the primary cracking products of residual oil molecules in the vacuum chamber were mainly particles with molecular weight of 69. After being cleaned by glow discharge

the quantity of oil molecules (molecular weight 39

71) can be reduced by 50%

proving that glow discharge has a remarkable effect on removing oil molecules from the surface of the mirror chamber in the beamline. The GDC system is of great significance to reduce carbon contamination

especially in soft X-ray beamlines.

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Keywords

references

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极紫外光刻机多层膜反射镜表面碳污染的清洗