Yb:LuScO<sub>3</sub>晶体的超精密光学加工及其激光性能

沈冯峰; 徐学科; 高文兰; 于浩海; 张龙; 邵建达

doi:10.3788/OPE.20182610.2407

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Yb:LuScO₃晶体的超精密光学加工及其激光性能

现代应用光学 | 更新时间：2020-07-05

- Yb:LuScO₃晶体的超精密光学加工及其激光性能
- Ultra-precision optical manufacture and laser performance of Yb:LuScO₃ crystal
- 光学精密工程 2018年26卷第10期页码：2407-2414
- 作者机构：
  
  1.中国科学院上海光学精密机械研究所强激光材料重点实验室, 上海 201800
  2.中国科学院大学, 北京 100049
  3.上海恒益光学精密机械有限公司, 上海 201800
  4.山东大学晶体材料国家重点实验室, 山东济南 250100
- 作者简介：
  
  [ "沈冯峰(1992-), 男, 江苏南通人, 2015年于盐城师范学院获得学士学位, 主要从事倍半氧化物晶体超精密光学加工方面的研究。E-mail:shenfengfeng@siom.ac.cn" ]
  [ "徐学科(1976-), 男, 安徽金寨人, 博士, 研究员, 硕士生导师, 2006年于中国科学院上海光学精密机械研究所获得博士学位, 主要从事超精密光学元件的加工及检测技术方面的研究。E-mail:xuxk@siom.ac.cn" ]
- 基金信息：
  
  科技部增材制造与激光制造重点专项(2016YFB1102300)
- DOI：10.3788/OPE.20182610.2407
  中图分类号： O614.346;TG580.692
- 收稿日期：2018-03-21，
  
  录用日期：2018-4-25，
  
  纸质出版日期：2018-10-25
- 稿件说明：
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沈冯峰, 徐学科, 高文兰, 等. Yb:LuScO₃晶体的超精密光学加工及其激光性能[J]. 光学精密工程, 2018,26(10):2407-2414.

Feng-feng SHEN, Xue-ke XU, Wen-lan GAO, et al. Ultra-precision optical manufacture and laser performance of Yb:LuScO₃ crystal[J]. Optics and precision engineering, 2018, 26(10): 2407-2414.
沈冯峰, 徐学科, 高文兰, 等. Yb:LuScO₃晶体的超精密光学加工及其激光性能[J]. 光学精密工程, 2018,26(10):2407-2414. DOI： 10.3788/OPE.20182610.2407.

Feng-feng SHEN, Xue-ke XU, Wen-lan GAO, et al. Ultra-precision optical manufacture and laser performance of Yb:LuScO₃ crystal[J]. Optics and precision engineering, 2018, 26(10): 2407-2414. DOI： 10.3788/OPE.20182610.2407.

摘要

Yb：LuScO

晶体作为固体激光器的新型增益介质，其面形和表面质量严重影响激光器的光束质量，因此探索Yb：LuScO

晶体的超精度光学加工工艺参数具有重要意义。本文系统开展了Yb：LuScO

晶体超精密光学加工的工艺参数研究，针对Yb：LuScO

晶体在加工过程中容易破裂和表面质量较差的问题，提出了拼接上盘和树脂铜盘抛光垫的关键技术。首先，使用COMSOL Multiphysics有限元软件对拼接工艺中选取的不同保护垫料的应力进行仿真。接着，研磨阶段逐步减小B

C磨料的粒径。然后，粗糙阶段使用树脂铜盘作为抛光垫，并对树脂铜盘抛光垫的作用进行了分析。最后，使用激光二极管泵浦加工好的样品进行激光输出实验。实验结果表明：基于该技术加工后的晶体表面粗糙度RMS=0.296 nm，面形精度PV=53 nm。在1 086 nm处获得了8.3 W的连续激光输出，斜效率为58%。该加工方法可以广泛应用于Yb：LuScO

晶体的高精度加工。

Abstract

Yb:LuScO

crystal is a new type of gain medium used in solid-state lasers. The surface profile and surface quality of the Yb:LuScO

crystal affect the characteristics of the output laser beam significantly. Therefore

it is extremely important to explore the processing parameters for its ultraprecision optical manufacture. In this paper

a systematic study of the processing parameters for the optical manufacture of Yb:LuScO

crystal was reported. To solve issues related to the brittleness of the Yb:LuScO

crystal and the poor quality of the generated surface

the key technology of stitching and the use of copper resin pads were proposed. First

the stress due to different protective paddings was simulated using COMSOL Multiphysics software and the size of abrasive B

C particles was continually decreased during the stitching and lapping stages

respectively. Next

copper resin pads were used during the stage of rough polishing

and their function was explained. Finally

the output power of the continuous wave laser was achieved by diode-pumping the finely polished Yb:LuScO

crystal. The results reveal a final surface roughness of 0.296 nm (root mean square value) and surface accuracy of 53 nm (peak-to-valley value). An output power of 8.3 W and a slope efficiency of 58% were obtained using a diode laser pump source at a wavelength of 1 086 nm. This method can be widely used for the high-precision machining of Yb:LuScO

crystals.

关键词

Keywords

references

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Yb:LuScO3晶体的超精密光学加工及其激光性能

Ultra-precision optical manufacture and laser performance of Yb:LuScO3 crystal

DOI：10.3788/OPE.20182610.2407

摘要

Abstract

关键词

Keywords

references

Yb:LuScO₃晶体的超精密光学加工及其激光性能

Ultra-precision optical manufacture and laser performance of Yb:LuScO₃ crystal