二级杠杆式微牛级微力发生机构

王勇; 刘和亮; 刘正士; 胡珊珊

doi:10.3788/OPE.20182610.2527

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二级杠杆式微牛级微力发生机构

微纳技术与精密机械 | 更新时间：2020-07-05

- 二级杠杆式微牛级微力发生机构
- Design and functional analysis of a micro-Newton force generator
- 光学精密工程 2018年26卷第10期页码：2527-2535
- 作者机构：
  
  合肥工业大学机械工程学院, 安徽合肥 230009
- 作者简介：
  
  [ "王勇(1969-), 男, 安徽肥东人, 2008年于合肥工业大学获得博士学位, 现为合肥工业大学教授, 博士生导师, 主要研究方向为机械设计、传感及测试技术。E-mail:simenkouwang@sina.com" ]
  [ "刘和亮(1993-), 男, 安徽安庆人, 硕士研究生, 主要研究方向为机械结构设计、传感器的开发与标定。E-mail:liuhelianglhl@sina.com" ]
- 基金信息：
  
  国家自然科学基金资助项目(41076061);国家自然科学基金资助项目(40876052)
- DOI：10.3788/OPE.20182610.2527
  中图分类号： TP132
- 收稿日期：2010-02-06，
  
  录用日期：2018-4-2，
  
  纸质出版日期：2018-10-25
- 稿件说明：
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王勇, 刘和亮, 刘正士, 等. 二级杠杆式微牛级微力发生机构[J]. 光学精密工程, 2018,26(10):2527-2535.

Yong WANG, He-liang LIU, Zheng-shi LIU, et al. Design and functional analysis of a micro-Newton force generator[J]. Optics and precision engineering, 2018, 26(10): 2527-2535.
王勇, 刘和亮, 刘正士, 等. 二级杠杆式微牛级微力发生机构[J]. 光学精密工程, 2018,26(10):2527-2535. DOI： 10.3788/OPE.20182610.2527.

Yong WANG, He-liang LIU, Zheng-shi LIU, et al. Design and functional analysis of a micro-Newton force generator[J]. Optics and precision engineering, 2018, 26(10): 2527-2535. DOI： 10.3788/OPE.20182610.2527.

摘要

针对力传感器标定系统难以精确加载微牛级微力的现状，设计了一种二级杠杆式微力发生机构。首先，在比较了常用柔性铰链精度性能的基础上，介绍了微力发生机构的工作原理。然后，在考虑杆件变形和柔性铰链中心偏转的基础上，分析了各级杠杆和各柔性铰链的受力和能量传递情况，推导了二级杠杆式微力发生机构力缩小倍数的理论计算方法，并以实现某一力缩小倍数为设计目标，据此提出了微力发生机构的优化设计方法。接着，进行有限元仿真分析，得到了不同输入力下的力值响应特性。最后搭建了微力发生机构的性能实验测试平台。结果表明，有限元分析、实验结果与理论力值间的最大误差分别为5.501%和7.391%，实验非线性误差为2.89%，可实现0~500

N的微力加载。认为力缩小倍数满足设计要求，验证了采用该优化设计方法准确设计二级杠杆式力柔顺机构、提高微力加载精度的有效性。

Abstract

A two-stage lever-type micro-force generator was designed to address the challenges in the calibration system of force sensor to provide accurate micro loads. Initially

the working principle of the micro-force generator was introduced based on the performance comparison among general flexure hinges. Next

the force and energy transmissions were analyzed and a theoretical calculation method to evaluate the minification ratio K was deduced by taking into consideration the deformation of the lever and the offset of the flexure hinge's rotation. To accomplish the aim of achieving a certain minification ratio

the optimization design of the micro-force generator was proposed. Moreover

the response characteristics under different input forces were obtained by performing finite element simulation. Subsequently

a test platform was fabricated to measure the power performance of the micro-force generator. The results show that the largest error between the finite element analysis (FEA) and the theoretical analysis result is 5.501%

whereas that between the experimental result and the theoretical analysis result is 7.391%

the linearity is 2.89%

and loading range of up to 500

N is reached. The results also indicate that the minification ratio K meets the design requirements and verify the validity of applying the optimization method to design two-stage lever-type micro-force generator and improve the accuracy of micro-Newton loads.

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references

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