动压气浮马达轴承间隙测量设备

任同群; 秦波; 刘指柔; 徐向东; 王晓东

doi:10.3788/OPE.20182611.2714

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动压气浮马达轴承间隙测量设备

微纳技术与精密机械 | 更新时间：2020-07-05

- 动压气浮马达轴承间隙测量设备
- Clearance measurement equipment for air bearing of dynamic pressure gyro motor
- 光学精密工程 2018年26卷第11期页码：2714-2722
- 作者机构：
  
  1.大连理工大学精密与特种加工教育部重点实验室, 辽宁大连 116024
  2.大连理工大学微纳米技术及系统辽宁省重点实验室, 辽宁大连 116024
- 作者简介：
  
  [ "任同群(1980-), 男, 辽宁大连人, 博士, 副教授, 2005年、2008年于天津大学分别获得硕士、博士学位, 主要从事精密测量、机器视觉及信号处理方面的研究。E-mail:ren_tq@dlut.edu.cn" ]
  [ "王晓东(1967-), 男, 黑龙江哈尔滨人, 博士, 教授, 1992年于哈尔滨船舶工程学院获得硕士学位, 1995年于哈尔滨工业大学获得博士学位, 主要从事精密测量、微小器件装配方面的研究。E-mail:xdwang@dlut.edu.cn" ]
- 基金信息：
  
  国家科技重大专项基金资助项目(2013ZX04001091);国家自然科学基金创新研究群体项目(51621064)
- DOI：10.3788/OPE.20182611.2714
  中图分类号： TP23;TB921
- 收稿日期：2018-07-06，
  
  录用日期：2018-7-25，
  
  纸质出版日期：2018-11-25
- 稿件说明：
移动端阅览
任同群, 秦波, 刘指柔, 等. 动压气浮马达轴承间隙测量设备[J]. 光学精密工程, 2018,26(11):2714-2722.

Tong-qun REN, Bo QIN, Zhi-rou LIU, et al. Clearance measurement equipment for air bearing of dynamic pressure gyro motor[J]. Optics and precision engineering, 2018, 26(11): 2714-2722.
任同群, 秦波, 刘指柔, 等. 动压气浮马达轴承间隙测量设备[J]. 光学精密工程, 2018,26(11):2714-2722. DOI： 10.3788/OPE.20182611.2714.

Tong-qun REN, Bo QIN, Zhi-rou LIU, et al. Clearance measurement equipment for air bearing of dynamic pressure gyro motor[J]. Optics and precision engineering, 2018, 26(11): 2714-2722. DOI： 10.3788/OPE.20182611.2714.

摘要

动压气浮陀螺马达轴承间隙尺寸是决定其运转性能的重要指标。为提高轴承间隙测量的精度和自动化程度，并实现快速批量测量，研制了一台动压气浮陀螺马达轴承间隙自动测量设备。采用外部加力方式，使转子体与定子产生相对位移，从而将内部气膜间隙转化为外部微位移。设备整体结构采用模块化设计理念，包括夹持模块、自动施力模块和位移测量模块。夹持摸块实现被测动压马达定子在两轴端的固定，采用柔性支撑方式有利于保护被测件和保证施加力的平顺性；自动施力模块主要由三维精密位移平台集成三轴测力传感器构成，测量时转子体与力传感器通过夹指连接，位移平台使转子体与定子产生相对位移，三轴测力传感器则实现施加力的精确控制和定子的调中心控制；测量模块由二维精密位移平台集成双电感测头构成，基于相对测量原理实现微小位移测量。实验表明：设备测量精度在0.3

m以内。该设备可以实现外力的可控连续加载，适用于批量测量。

Abstract

The clearance size of the air bearing of the dynamic pressure gyro motor is an important index to determine the motor performance and running stability. To improve the precision

automation degree

and rapid batch measurement capacity of the clearance measurement for the dynamic pressure gyro motor

a measurement equipment was developed. In this work

the internal clearance was transformed into an external micro-displacement by applying external force to the rotor. The equipment

designed based on a modular concept

was composed of a clamping module

an automatic force application module

and a displacement measurement module. The clamping module provided resilient double-clamp mounting of the stator

which was conducive to protecting the motor and ensuring smooth force application. The automatic force application module was a 3-D precision motion platform integrating one triaxial force transducer. During measurement

the rotor and force transducer were connected by a pneumatic gripper

thereby the rotor would follow the motion of the platform and generate a relative displacement because of the internal clearance. The force transducer was used for precise control of the force application and the self-aligning centering of the stator. The displacement measurement module was a 2-D precision motion platform integrating double inductance probes

which measured micro-displacement based on a relative measurement principle. Experimental results show that the measurement accuracy is superior to 0.3

m. The equipment is capable of controllable and continuous force application

making it suitable for batch measurement.

关键词

Keywords

references

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