基于后验误差拟合的角位移测量误差补偿

于海; 万秋华; 赵长海; 卢新然; 杜颖财

doi:10.3788/OPE.20192701.0051

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基于后验误差拟合的角位移测量误差补偿

现代应用光学 | 更新时间：2020-08-13

- 基于后验误差拟合的角位移测量误差补偿
- Error-compensation of angular displacement measurement based on posteriori error fitting
- 光学精密工程 2019年27卷第1期页码：51-57
- 作者机构：
  
  中国科学院长春光学精密机械与物理研究所，吉林长春 130033
- 作者简介：
  
  [ "于海(1987-)，男，吉林敦化人，副研究员，2009年于东北电力大学获得学士学位，2014年于中国科学院长春光学精密机械与物理研究所获得博士学位，目前主要从事光电位移精密测量技术、数字全息显微技术的研究。E-mail:yuhai5158@163.com" ]
  [ "万秋华(1962-)，女，吉林长春人，研究员，1984年于长春光机学院获得学士学位，2009年于中国科学院长春光学精密机械与物理研究所获得博士学位，目前主要从事光电位移精密测量技术及高精度光电轴角编码器等方面的研究。E-mail:wanqh@ciomp.ac.cn" ]
- 基金信息：
  
  吉林省科技发展计划资助项目(20180520184JH);国家自然科学基金资助项目(51605465)
- DOI：10.3788/OPE.20192701.0051
  中图分类号： TP212.12;TN762
- 收稿日期：2018-03-19，
  
  录用日期：2018-5-7，
  
  纸质出版日期：2019-01-15
- 稿件说明：
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于海, 万秋华, 赵长海, 等. 基于后验误差拟合的角位移测量误差补偿[J]. 光学精密工程, 2019,27(1):51-57.

Hai YU, Qiu-hua WAN, Chang-hai ZHAO, et al. Error-compensation of angular displacement measurement based on posteriori error fitting[J]. Optics and precision engineering, 2019, 27(1): 51-57.
于海, 万秋华, 赵长海, 等. 基于后验误差拟合的角位移测量误差补偿[J]. 光学精密工程, 2019,27(1):51-57. DOI： 10.3788/OPE.20192701.0051.

Hai YU, Qiu-hua WAN, Chang-hai ZHAO, et al. Error-compensation of angular displacement measurement based on posteriori error fitting[J]. Optics and precision engineering, 2019, 27(1): 51-57. DOI： 10.3788/OPE.20192701.0051.

摘要

在航天、军事、工业这些对器件的体积有着严格要求的领域，光电编码器不仅要求减小外径尺寸和重量，更要提高其测量精度。本文以光电编码器误差补偿方法为研究对象，基于后验误差拟合方法确定误差模型参数，从而实现对小型光电编码器的深度误差补偿。分析了影响光电编码器测角误差的主要因素，建立了长周期误差和短周期误差模型。然后，采用后验误差拟合算法实现了对误差模型参数的确定，提出误差补偿算法；最后，对某一小型光电编码器进行实验，验证了所提出误差补偿算法的性能。某型号光电编码器补偿前的精度为22.48″，补偿后的精度为5.82″。实验表明，采用后验误差补偿方法可以不考虑误差影响因素的大小，直接对编码器进行误差补偿，具有效率高、补偿准确等优点，极大地提高了批量生产时光电编码器产品的精度。

Abstract

In the aerospace

military

and industrial fields

which have strict requirements on the volumes of devices

photoelectric encoders require not only a reduction in the size and weight of the outer diameter

but also improvements in the measurement accuracy. In this study

an error compensation method for photoelectric encoders was investigated. The error model parameters were determined based on a posteriori error-fitting method

and then depth error compensation was performed for a small photoelectric encoder. First

the main factors that affect the angle measurement error of the photoelectric encoder were analyzed

and the long-and short-period error models were established. Then

a posteriori error-fitting error compensation algorithm was proposed. Finally

a small photoelectric encoder was tested to verify the performance of the proposed error compensation algorithm. The test results demonstrate that the proposed posteriori error-fitting compensation method can significantly reduce the angle measurement error of the photoelectric encoder. We utilized an encoder to verify this method. The accuracy before compensation is 22.48″

and that after compensation is 5.82″. This approach employs a posteriori error compensation method

which can directly compensate the encoder error without considering the sizes of the error factors

and possesses the advantages of high efficiency and accurate compensation. The product precision is considerably improved when the photoelectric encoder is mass produced.

关键词

Keywords

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