高阈值长脉宽响应的微流体惯性开关

李嘉杰; 聂伟荣; 刘国伟

doi:10.3788/OPE.20192701.0101

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高阈值长脉宽响应的微流体惯性开关

微纳技术与精密机械 | 更新时间：2020-08-13

- 高阈值长脉宽响应的微流体惯性开关
- Microfluidic inertial switch with high threshold and long pulse-width response
- 光学精密工程 2019年27卷第1期页码：101-109
- 作者机构：
  
  南京理工大学机械工程学院，江苏南京 210094
- 作者简介：
  
  [ "李嘉杰(1993-)，男，广东江门人，博士研究生，2016年于广州大学获得学士学位，研究方向为智能探测与控制。E-mail:jiajieli_1993@sina.com" ]
  聂伟荣(1969-)，女，山西原平人，博士，副教授，2002年于南京理工大学获得博士学位，主要从事MEMS器件的设计与工艺研究。E-mail: niewrhappy@163.com NIE Wei-rong, E-mail: niewrhappy@163.com
- 基金信息：
  
  国家自然科学基金资助项目(51475245)
- DOI：10.3788/OPE.20192701.0101
  中图分类号： TM564; TH824.4
- 收稿日期：2018-06-07，
  
  录用日期：2018-8-1，
  
  纸质出版日期：2019-01-25
- 稿件说明：
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李嘉杰, 聂伟荣, 刘国伟. 高阈值长脉宽响应的微流体惯性开关[J]. 光学精密工程, 2019,27(1):101-109.

Jia-jie LI, Wei-rong NIE, Guo-wei LIU. Microfluidic inertial switch with high threshold and long pulse-width response[J]. Optics and precision engineering, 2019, 27(1): 101-109.
李嘉杰, 聂伟荣, 刘国伟. 高阈值长脉宽响应的微流体惯性开关[J]. 光学精密工程, 2019,27(1):101-109. DOI： 10.3788/OPE.20192701.0101.

Jia-jie LI, Wei-rong NIE, Guo-wei LIU. Microfluidic inertial switch with high threshold and long pulse-width response[J]. Optics and precision engineering, 2019, 27(1): 101-109. DOI： 10.3788/OPE.20192701.0101.

摘要

为了实现智能武器电源管理，针对正常发射和勤务跌落两种典型的加速度信号，提出了一种高阈值长脉宽响应的微流体惯性开关。该开关主要由环形微通道和三级毛细阀组成，具有识别两种典型加速度的能力，并在正常发射后坐加速度的作用下实现可靠接通。首先，介绍了开关的设计概念及工作原理。然后，采用湿法刻蚀和磁控溅射金属技术制作了样机。最后，结合有限元仿真和样机实验验证了开关的功能。有限元仿真分析表明：该开关在幅值为12 000

，脉宽为300 μs的勤务跌落载荷下保持断开，在幅值为20 000

，脉宽为4 ms的后坐载荷下可靠接通，开关阈值为3 300

。实验结果表明：该开关在幅值为12 800

，脉宽为219 μs的勤务跌落载荷下保持断开，开关的静态阈值为3 257.2

~3 317.3

开关的理论阈值为3 590.9

，理论公式能较好地预测开关的阈值。

Abstract

In order to realize the power management of intelligent weapons

a microfluidic inertial switch with a high threshold and long pulse width response was proposed for two typical acceleration signals of launch and drop. The switch is mainly composed of a circular microchannel and a three-stage capillary valve that has the ability to identify the two typical accelerations and can be reliably connected under the action of the normal launching acceleration. First

the design concept of the switch was introduced

and the working principle of the switch was analyzed. Next

the prototype was fabricated by wet etching and magnetron sputtering. Finally

the function of the switch was verified by finite element simulation and prototype experiments. The finite element simulation analysis shows that the switch remains disconnected under the drop load (amplitude: 12 000

pulse width: 300 μs) and is reliably connected under the rear load (amplitude: 20 000

pulse width: 4 ms). The threshold of the switch is 3 300

. The experimental results show that the switch remains disconnected under the service drop load (amplitude: 12 800

pulse width: 219 μs). The static threshold of the switch is 3 257.2~3 317.3

. The theoretical threshold of the switch is 3 590.9

and the theoretical formula can predict the threshold of the switch with a higher accuracy. The results show that the designed switch can identify two typical accelerations and realize reliable connections.

关键词

Keywords

references

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