自研角度计量转台在圆分度器件校准中的应用

黄明; 夏仰球; 李梦阳; 唐强

doi:10.3788/OPE.20192701.0110

您当前的位置：

首页 >

文章列表页 >

自研角度计量转台在圆分度器件校准中的应用

微纳技术与精密机械 | 更新时间：2020-08-13

- 自研角度计量转台在圆分度器件校准中的应用
- Calibration of circular division artifacts using a self-developed angle comparator
- 光学精密工程 2019年27卷第1期页码：110-120
- 作者机构：
  
  1.上海交通大学机械与动力工程学院，上海 200240
  2.中国工程物理研究院机械制造工艺研究所，四川绵阳 62190
  3.国家机床产品质量监督检验中心(四川)，四川成都 610200
- 作者简介：
  
  [ "黄明(1972-)，男，四川汉源人，硕士，研究员，1998年于重庆大学获得硕士学位，中国工程物理研究院机械制造工艺研究所副所长，主要从事精密计量装备和超精密加工关键技术的研究。E-mail:hmhy1972@163.com" ]
  夏仰球(1987-)，男，江苏宿迁人，硕士，工程师，2010年、2013年于南京理工大学分别获得学士和硕士学位，主要从事高端工艺装备研制及检测技术的研究。E-mail：xiayqiu@caep.cn XIA Yang-qiu, E-mail:xiayqiu@caep.cn
- 基金信息：
  
  中国工程物理研究院超精密加工技术重点实验室基金资助项目(K1065)
- DOI：10.3788/OPE.20192701.0110
  中图分类号： TB922;TH712
- 收稿日期：2018-06-08，
  
  录用日期：2018-8-13，
  
  纸质出版日期：2019-01-25
- 稿件说明：
移动端阅览
黄明, 夏仰球, 李梦阳, 等. 自研角度计量转台在圆分度器件校准中的应用[J]. 光学精密工程, 2019,27(1):110-120.

Ming HUANG, Yang-qiu XIA, Meng-yang LI, et al. Calibration of circular division artifacts using a self-developed angle comparator[J]. Optics and precision engineering, 2019, 27(1): 110-120.
黄明, 夏仰球, 李梦阳, 等. 自研角度计量转台在圆分度器件校准中的应用[J]. 光学精密工程, 2019,27(1):110-120. DOI： 10.3788/OPE.20192701.0110.

Ming HUANG, Yang-qiu XIA, Meng-yang LI, et al. Calibration of circular division artifacts using a self-developed angle comparator[J]. Optics and precision engineering, 2019, 27(1): 110-120. DOI： 10.3788/OPE.20192701.0110.

摘要

为了实现亚角秒级圆分度器件的高精度校准，建立了基于角度计量转台和自准直仪的角度测量系统，研究了基于无实物基准的圆分度误差检测方法和控制测量系统引入误差的策略。简要介绍了基于真空预载气浮支承和超声马达驱动的自研转台的结构，搭建了整个测量系统。利用圆封闭原理和最小二乘原理分析了圆分度误差的测量算法，讨论了测量过程的误差来源，并分析了抑制各误差源的方法。最后，在构建的测量系统上测量了多齿分度台的圆分度误差，并对测量不确定度进行了分析。实验结果表明：自研计量转台和被校多齿分度台的最大圆分度误差分别为0.12″和0.15″，测量不确定度为0.05″(

=2)。通过比对，表明测量系统能够实现亚角秒级圆分度误差的高精度校准。

Abstract

In order to achieve high-precision calibration of circular division artifacts with sub-arcsecond level

an angular measuring system based on a high-precision angle comparator and an autocollimator was established. A nonphysical circular indexing error detection method was studied

and the scheme to control measurement error was investigated. Firstly

the structure of self-developed angle comparator based on vacuum preloaded air bearings and ultrasonic motors

and the construction of the whole measurement system were introduced. Secondly

the measurement algorithm for circular indexing error detection was analyzed by the circular closed principle and the least squares principle. Thirdly

the sources of error in the measurement process were discussed and the methods for eliminating error sources are analyzed. Finally

based on the measurement system

the circular indexing error of the multitooth indexing table was measured

and the measurement uncertainty was analyzed. The experimental results show that the maximum circular indexing error of the self-developed angle comparator and the indexing table is 0.12″ and 0.15″

respectively; the measurement uncertainty is 0.05″(

=2). Thus

it shows that the measurement system satisfies the high-accuracy calibration of circular indexing error with sub-arcsecond level.

关键词

Keywords

references

KIM J A, KIM J W, KANG C S, et al . Calibration of angle artifacts and instruments using a high precision; angle generator[J]. International Journal of Precision Engineering & Manufacturing , 2013, 14(3):367-371.

刘万里, 曲兴华, 欧阳健飞, 等.激光跟踪测量系统角度自动校正装置设计[J].光学精密工程, 2008, 16(9): 1695-1700.

LIU W L, QU X H, OUYANG J F, et al . Design of angular automatic calibration mechanism for laser tracker system[J]. Opt. Precision Eng. , 2008, 16(9):1695-1700. (in Chinese)

KESABA P, CHOUDHURY B B, MUNI M K. An effective prediction of position analysis of industrial robot using fuzzy logic approach[C]. Proceedings of 3rd International Conference on Advanced Computing, Networking and Informatics . Springer India, 2016: 45-54.

FENG X. A new watermarking algorithm for point model using angle quantization index modulation[C]. 4th National Conference on Electrical, Electronics and Computer Engineering , Xi'an, 2016: 963-968.

ZOU H B, CHEN X D, XIA H J. Modeling of the positioning error in ultra-precision machine tools[J]. Key Engineering Materials , 2016, 679:33-36.

OIWA T, KOBAYASHI K, TERABAYASHI K, et al .. Ultra-precision Machine System Feedback-controlled with Hexapod-type Measurement Device for Six-degree-of-freedom Relative Motions Between Tool and Workpiece [M]. Springer International Publishing, 2016: 330-334.

JUST A, KRAUSE M, PROBST R, et al .. Comparison of angle standards with the aid of a high-resolution angle encoder[J]. Precision Engineering , 2009, 33(4):530-533.

GECKELER R D, FRICKE A, ELSTER C. Calibration of angle encoders using transfer functions[J] . Measurement Science & Technology , 2006, 17(10):2811-2818.

YANDAYAN T, AKGOZ S A, ASAR M. Calibration of high-resolution electronic autocollimators with demanded low uncertainties using single reading head angle encoders[J]. Measurement Science & Technology , 2013, 25(25):303-309.

ESTLER W T, QUEEN Y H, BRYAN J. An advanced angle metrology system[J]. CIRP Annals - Manufacturing Technology , 1993, 42(1):573-576.

PROBST R, WITTEKOPF R, KRAUSE M, et al .. The new PTB angle comparator[J]. Measurement Science & Technology , 1998, 9(7):1059-1066.

PISANI M, ASTRUA M. Towards the realization of the new INRIM angle comparator[C]. 13th EUSPEN International Conference. Berlin, Germany , 2013: 179-183.

WATANABE T, KON M, NABESHIMA N, et al .. An angle encoder for super-high resolution and super-high accuracy using SelfA[J]. Measurement Science & Technology , 2014, 25(25):065002.

KIM J A, KIM J W, KANG C S, et al .. Note: high precision angle generator using multiple ultrasonic motors and a self-calibratable encoder[J]. Review of Scientific Instruments , 2011, 82(11):116108.

ANDREASSEN C N, ALSNER J, OVERGAARD M, et al .. A shearing-based method for the simultaneous calibration of angle measuring devices[J]. Measurement Science & Technology , 2014, 25(10):174-186.

SU A, LIU H. Multiple reflectors based autocollimator for three-dimensional angle measurement[C]. International Conference on Experimental Mechanics 2014 , 9302: 93023O1-93023O7.

JING X, CHENG H, XU C, et al .. Method to measure the position offset of multiple light spots in a distributed aperture laser angle measurement system.[J]. Applied Optics , 2017, 56(6):1740-1747.

范天泉, 谢长文, 陆德基, 等.排列互比法用于精测角时产生系统误差的研究[J].光学精密工程, 1997, 5(2):98-103.

FAN T Q, XIE CH W, LU D J, et al. Research on the systematical error of permutation intercomparision method using in superprecision angle measurement[J]. Opt. Precision Eng. , 1997, 5(2):98-103. (in Chinese)

AKAGAWA O, FUKAZU K, NAGAOKA R, et al .. Two-dimensional blood flow vector and wall shear stress of carotid artery obtained with dual-angle Doppler method[C]. Ultrasonics Symposium. IEEE, Tours, France , 2016: 1-4.

BUONO E W, VRIJENS B, BOSWORTH H B, et al .. Coming full circle in the measurement of medication adherence: opportunities and implications for health care[J]. Patient Preference & Adherence , 2017, 11:1009-1017.

田留德, 赵建科, 王涛, 等.测试设备位姿失调对自准直仪法测量圆分度误差的影响[J].光学精密工程, 2017, 25(9):2267-2276.

TIAN L D, ZHAO J K, WANG T, et al .. Influence of test equipment pose error on dividing error measurement based on autocollimator[J]. Opt. Precision Eng. , 2017, 25(9):2267-2276. (in Chinese)

艾晨光, 褚明, 孙汉旭, 等.基准圆光栅偏心检测及测角误差补偿[J].光学精密工程, 2012, 20(11):2479-2484.

AI CH G, CHU M, SUN H X, et al .. Eccentric testing of benchmark circular grating and compensation of angular error[J]. Opt. Precision Eng. , 2012, 20(11):2479-2484. (in Chinese)

卢荣胜, 李万红, 劳达宝, 等.激光跟踪仪测角误差补偿[J].光学精密工程, 2014, 22(9):2299-2305.

LU R SH, LI W H, LAO D B, et al .. Angular error compensation for laser tracker[J]. Opt. Precision Eng. , 2014, 22(9):2299-2305. (in Chinese)

王福全, 王珏, 谢志江, 等.精密转台角分度误差补偿[J].光学精密工程, 2017, 25(8):2165-2172.

WANG F Q, WANG J, XIE ZH J, et al .. Compensation of angular indexing error for precision turntable[J]. Opt. Precision Eng. , 2017, 25(8):2165-2172.(in Chinese)

全国几何量角度计量技术委员会. JJG 472-2007多齿分度台检定规程[S].北京: 中国计量出版社, 2007: 8.

National Geometric Metrology Technology Committee of China. JJG 472-2007 verification regulation of precise angle dividing table[S]. Beijing: China Metrology Press , 2007: 8. (in Chinese)

浏览量

162

下载量

CSCD

文章被引用时，请邮件提醒。

提交

工具集

关联资源

测试设备位姿失调对自准直仪法测量圆分度误差的影响

光学曲面的偏折测量技术：原理、挑战与展望（特邀）

场景切换感知的地基成像系统电子稳像技术

基于光谱共焦探针的Wolter-I型X射线显微镜芯轴高精度检测

新型旋转激光扫描系统轴系调整与误差标定