飞秒激光抛光CVD金刚石涂层表面

马玉平; 张遥; 魏超; 李翔

doi:10.3788/OPE.20192701.0164

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飞秒激光抛光CVD金刚石涂层表面

微纳技术与精密机械 | 更新时间：2020-08-13

- 飞秒激光抛光CVD金刚石涂层表面
- Surface polishing of CVD diamond coating by femtosecond laser
- 光学精密工程 2019年27卷第1期页码：164-171
- 作者机构：
  
  安徽建筑大学机械与电气工程学院，安徽合肥 230601
- 作者简介：
  
  [ "马玉平(1975-)，男，博士，山东宁阳人，副教授，2002年于河南理工大学获得硕士学位，2007年于上海交通大学获得博士学位，主要从事精密与特种加工方面的研究。E-mail:wxlmyp@163.com" ]
- 基金信息：
  
  国家自然基金(51375011);安徽省自然科学基金(1208085ME63);安徽省教育厅自然科学基金(KJ2015A050);安徽省教育厅自然科学基金(KJ2015A013)
- DOI：10.3788/OPE.20192701.0164
  中图分类号： TN249
- 收稿日期：2018-05-02，
  
  录用日期：2018-7-29，
  
  纸质出版日期：2019-01-15
- 稿件说明：
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马玉平, 张遥, 魏超, 等. 飞秒激光抛光CVD金刚石涂层表面[J]. 光学精密工程, 2019,27(1):164-171.

Yu-ping MA, Yao ZHANG, Chao WEI, et al. Surface polishing of CVD diamond coating by femtosecond laser[J]. Optics and precision engineering, 2019, 27(1): 164-171.
马玉平, 张遥, 魏超, 等. 飞秒激光抛光CVD金刚石涂层表面[J]. 光学精密工程, 2019,27(1):164-171. DOI： 10.3788/OPE.20192701.0164.

Yu-ping MA, Yao ZHANG, Chao WEI, et al. Surface polishing of CVD diamond coating by femtosecond laser[J]. Optics and precision engineering, 2019, 27(1): 164-171. DOI： 10.3788/OPE.20192701.0164.

摘要

为了实现降低金刚石涂层粗糙度的目的，本文研究了飞秒激光功率，重复频率以及扫描速度对金刚石涂层表面粗糙度的影响，试验之后利用白光干涉仪检测抛光区域形貌以及粗糙度。试验结果表明：粗糙度随着功率的降低而减小，当功率降至100 mw以下时抛光后的粗糙度会随着功率的降低而略微的提高；重复频率对抛光后的粗糙度无显著影响；粗糙度随扫描速度的增大而减小，当扫描速度增加到1.6 mm/s之后，粗糙度会出现略微的升高。在功率100 mw，重复频率1 KHz，扫描速度1.6 mm/s的条件下，得到的粗糙度最低，约为0.14 μm，局部区域粗糙度可降至100 nm以下，并且抛光的区域相对于未抛光区域更具有致密性，基本上满足金刚石涂层低摩擦表面的要求。

Abstract

In this study

the effects of femtosecond laser power

repetitive frequency

and scanning speed on diamond roughness were examined for the purpose of diamond coating surface Ra improvements. The morphology and roughness of fs-laser polished regions were analyzed with white-light interferometry. The experimental results showed that the diamond coating roughness decreased if the laser power decreased

and when the laser power was less than 100 mW

the roughness increased slightly with the reduced power. The laser repetitive frequency did not exhibit deteriorative effects on the roughness. The roughness decreased with decreasing scanning speed; however

a slight increase in the surface roughness was observed when the scanning velocity increased to 1.6 mm/s. Finally

under the conditions of 100 mW laser power

1 KHz repetition rate

and 1.6 mm/s scanning speed

a minimum surface roughness of approximately 0.14 μm was obtained

reaching as low as 100 nm in certain local areas. Furthermore

the polished region had a higher compactness compared to the unpolished areas

and it met the requirements for low friction diamond coatings.

关键词

Keywords

references

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