静电驱动MOEMS保险机构的设计与试验

刘加凯

doi:10.3788/OPE.20192702.0334

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静电驱动MOEMS保险机构的设计与试验

微纳技术与精密机械 | 更新时间：2020-08-13

- 静电驱动MOEMS保险机构的设计与试验
- Design and test of electrostatic driving MOEMS arming device
- 光学精密工程 2019年27卷第2期页码：334-340
- 作者机构：
  
  1.西安交通大学机械工程学院，陕西西安 710049
  2.武警工程大学装备管理与保障学院，陕西西安 710086
- 作者简介：
  
  [ "刘加凯(1985-)，男，河南辉县人，博士，讲师，2013年于军械工程学院获得博士学位，主要从事引信微机电系统、智能弹药技术的研究。Email:liujiakai1129@163.com" ]
- 基金信息：
  
  国家博士后基金资助项目(2017M623155);陕西省自然科学基础研究计划资助项目(2018JQ5024)
- DOI：10.3788/OPE.20192702.0334
  中图分类号： TJ430.2;TN253
- 收稿日期：2018-09-12，
  
  录用日期：2018-10-23，
  
  纸质出版日期：2019-02-15
- 稿件说明：
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刘加凯. 静电驱动MOEMS保险机构的设计与试验[J]. 光学精密工程, 2019,27(2):334-340.

Jia-kai LIU. Design and test of electrostatic driving MOEMS arming device[J]. Optics and precision engineering, 2019, 27(2): 334-340.
刘加凯. 静电驱动MOEMS保险机构的设计与试验[J]. 光学精密工程, 2019,27(2):334-340. DOI： 10.3788/OPE.20192702.0334.

Jia-kai LIU. Design and test of electrostatic driving MOEMS arming device[J]. Optics and precision engineering, 2019, 27(2): 334-340. DOI： 10.3788/OPE.20192702.0334.

摘要

为了提高引信状态控制的安全性，增强其抵抗引信内、外强电磁干扰的能力，提出了一种应用于微小型引信安全系统的硅基微光机电保险机构。该机构采用光纤作为过程能量传输的载体，通过静电驱动方式实现对光纤光路错位与对准的控制，达到引信安全与解除保险的目的。设计了MOEMS保险机构的总体结构和耦合光路，并对它进行SOI+DRIE工艺设计和加工。通过开展静电微驱动器性能测试试验和光路性能测试试验得出，静电微驱动器能够实现130 μm的大位移输出，MOEMS保险机构的解除保险时间和恢复保险时间分别为13 ms和5 ms，光能传输效率为46.1%。所设计的MOEMS保险机构能够满足功能要求，具备天然的抗电磁干扰能力，有效提高了引信的本征安全性。

Abstract

To improve the state control safety of a fuze and enhance its ability to resist electromagnetic interference

this paper proposes a silicon-based Micro-Opto-Electro-Mechanical Systems (MOEMS) arming device used in the miniature safety and arming system of a fuze. The device adopts two optical fibers as the carriers of energy transmission

and their misalignment and alignment are controlled through an electrostatic driving mechanism

which determines the safety and arming state of the fuze. The overall structure and coupled optical path of the MOEMS arming device are designed

and subsequently

it is manufactured through a silicon-on-insulator deep reactive-ion etching process. Through experiments evaluating the performances of the electrostatic driving mechanism and optical path

it is concluded that the displacement output of the electrostatic driving mechanism can reach 130 μm

the arming time and restore safety time are 13 ms and 5 ms

respectively

and the light energy transfer efficiency is 46.1%. The MOEMS arming device can satisfy the functional requirements of a fuze and it can have natural resistance to electromagnetic interference

which improves the intrinsic safety of the fuze.

关键词

Keywords

references

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