新型悬丝约束支撑微纳测头的变刚度特性分析

李保坤; 刘向阳; 杨洪涛; 吴耀东

doi:10.3788/OPE.20192702.0402

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新型悬丝约束支撑微纳测头的变刚度特性分析

微纳技术与精密机械 | 更新时间：2020-08-13

- 新型悬丝约束支撑微纳测头的变刚度特性分析
- Variable stiffness characteristic analysis of a novel micro-nano probe with wire constraint suspension
- 光学精密工程 2019年27卷第2期页码：402-409
- 作者机构：
  
  安徽理工大学机械工程学院，安徽淮南 232001
- 作者简介：
  
  [ "李保坤(1982-)，男，安徽舒城人，博士，副教授，硕士生导师，2004年、2007年于安徽理工大学获得学士、硕士学位，2014年于江南大学获得博士学位，主要从事机构学与精密机械设计等领域研究。E-mail：libkmail@126.com" ]
  [ "杨洪涛(1972-)，男，福建莆田人，博士，教授，博士生导师，1993年、2001年于安徽理工大学获得学士、硕士学位，2007年于合肥工业大学获得博士学位，主要从事精密测试技术、现代精度理论及应用等领域研究。E-mail：lloid@163.com" ]
- 基金信息：
  
  国家自然科学基金资助项目(51605006);国家自然科学基金资助项目(51675004);安徽省高等学校自然科学研究基金重点资助项目(KJ2015A121);广西省制造系统与先进制造技术重点实验室开放课题资助项目(17-259-05-013K)
- DOI：10.3788/OPE.20192702.0402
  中图分类号： TH721
- 收稿日期：2018-07-26，
  
  录用日期：2018-9-16，
  
  纸质出版日期：2019-02-15
- 稿件说明：
移动端阅览
李保坤, 刘向阳, 杨洪涛, 等. 新型悬丝约束支撑微纳测头的变刚度特性分析[J]. 光学精密工程, 2019,27(2):402-409.

Bao-kun LI, Xiang-yang LIU, Hong-tao YANG, et al. Variable stiffness characteristic analysis of a novel micro-nano probe with wire constraint suspension[J]. Optics and precision engineering, 2019, 27(2): 402-409.
李保坤, 刘向阳, 杨洪涛, 等. 新型悬丝约束支撑微纳测头的变刚度特性分析[J]. 光学精密工程, 2019,27(2):402-409. DOI： 10.3788/OPE.20192702.0402.

Bao-kun LI, Xiang-yang LIU, Hong-tao YANG, et al. Variable stiffness characteristic analysis of a novel micro-nano probe with wire constraint suspension[J]. Optics and precision engineering, 2019, 27(2): 402-409. DOI： 10.3788/OPE.20192702.0402.

摘要

针对传统微纳测量装置在测量过程中测头支撑机构刚度不可变化的问题，设计了一种基于悬丝约束支撑的变刚度微纳测头。利用压电装置驱动柔顺导向机构产生位移，以改变悬丝所受的轴向张紧力。基于应力刚化原理改变悬丝的横向刚度，进而改变测头支撑机构的整体刚度，以获得具有变刚度性能的新型微纳测头。根据测头支撑机构在测量过程中刚度的变化，分别建立刚性和柔性模式下微纳测头

向和横向的刚度理论模型。根据有限元仿真和刚度理论模型，分别得到测头刚度随悬丝端面受力的变化曲线。对比测头刚度的仿真值和理论值，得到测头

向和横向刚度的平均相对误差分别为2.41%和4.72%，结果表明理论模型具有较高的准确性。研究成果为该类型测头的变刚度控制奠定了前期理论基础。

Abstract

To address the problem that the stiffness of the probe support mechanism cannot be changed during the measurement process using a traditional micro-nano measuring device

a micro-nano probe with variable stiffness was designed based on the constraint support of the suspension wire. A piezoelectric device was employed to drive the compliant guide mechanism

which produces a displacement. Thus

the axial tension of the suspension wire changed. Based on the principle of stress stiffening

the transverse stiffness of the suspension wire was changed

and the overall stiffness of the probe support mechanism was varied to obtain a novel micro-nano probe with variable stiffness performance. Depending on the stiffness variation of the probe support mechanism during the measurement process

the theoretical model of the

-direction and the transverse stiffness of the micro-nano probe were established in the rigid and flexible modes

respectively. Based on the finite element simulation and the established theoretical stiffness model

the curve of the stiffness change of the probe versus the terminal force applied on the suspension wire was obtained. Comparing the simulated and theoretical values of the probe stiffness

the average relative errors of the

-direction and transverse stiffness of the probe were observed to be 2.41% and 4.72%

respectively. This indicates that the theoretical model had high accuracy. The research results laid a preliminary theoretical foundation for variable stiffness control of this type of probe.

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references

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