结合激光准直的二维转角动态测量系统

楼志斌; 赵辉; 刘权; 郑超; 陶卫

doi:10.3788/OPE.20192703.0561

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结合激光准直的二维转角动态测量系统

现代应用光学 | 更新时间：2020-08-13

- 结合激光准直的二维转角动态测量系统
- Two-dimensional rotation angle dynamic measurement system combining laser collimation
- 光学精密工程 2019年27卷第3期页码：561-568
- 作者机构：
  
  1.上海科学院，上海 201203
  2.上海交通大学仪器科学与工程系，上海 200240
- 作者简介：
  
  [ "楼志斌(1966-)，男，浙江义乌人，硕士，高级工程师，硕士生导师，1987年于山东大学获得学士学位，2011年于中国科学技术大学获得硕士学位，目前主要从事光电检测与数据分析等方面的研究。E-mail：zblou66@163.com" ]
  [ "赵辉(1965-)，男，辽宁阜新人，博士，教授，博士生导师，1986年、1989年、1994年于哈尔滨工业大学分别获得学士、硕士和博士学位，主要从事现代传感器、机器视觉、光电检测技术等方面的研究。E-mail: huizhao@sjtu.edu.cn" ]
  陶卫(1975-)，女，辽宁大连人，博士，副教授，硕士生导师，1999年、2003年于哈尔滨工业大学分别获得硕士和博士学位，主要从事光电及视觉检测等方面的研究。E-mail: taowei@sjtu.edu.cnTAO Wei, E-mail: taowei@sjtu.edu.cn
- 基金信息：
  
  国家自然科学基金资助项目(U1637108)
- DOI：10.3788/OPE.20192703.0561
  中图分类号： TN249
- 收稿日期：2018-10-16，
  
  录用日期：2018-11-23，
  
  纸质出版日期：2019-03-15
- 稿件说明：
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楼志斌, 赵辉, 刘权, 等. 结合激光准直的二维转角动态测量系统[J]. 光学精密工程, 2019,27(3):561-568.

Zhi-bin LOU, Hui ZHAO, Quan LIU, et al. Two-dimensional rotation angle dynamic measurement system combining laser collimation[J]. Optics and precision engineering, 2019, 27(3): 561-568.
楼志斌, 赵辉, 刘权, 等. 结合激光准直的二维转角动态测量系统[J]. 光学精密工程, 2019,27(3):561-568. DOI： 10.3788/OPE.20192703.0561.

Zhi-bin LOU, Hui ZHAO, Quan LIU, et al. Two-dimensional rotation angle dynamic measurement system combining laser collimation[J]. Optics and precision engineering, 2019, 27(3): 561-568. DOI： 10.3788/OPE.20192703.0561.

摘要

为了克服现有二维转角动态测量方法结构复杂、成本昂贵的缺点，提出了结合激光准直的二维转角动态测量方法。首先，根据二维转角测量的关键问题提出基于激光准直的测量方法，采用准直激光作为测量基准，以远端的位置探测器作为检测器件。接着，设计测量系统和各组成模块，根据测量要求对系统中的关键模块进行设计和优化。然后，具体设计系统中的测量算法，完成测量模型建立。最后，在±2°范围内进行实验测试和分析。实验结果表明：系统可动态测量，稳定性好，测量重复性误差为1

rad，

轴非线性误差为1.8%，

轴非线性误差为1.7%，动态带载响应频率在±0.01°内优于200 Hz，基本满足二维转角测量的高精度、高重复性、高稳定性的要求。

Abstract

To dynamically measure a two-dimensional rotation angle and overcome the shortcomings of a complicated structure and high costs

a method based on laser collimation was proposed and a measurement system was established. First

a method was proposed based on the key measurement requirements. A collimated laser was used as a measurement datum and a remote position detector as a detection device. Second

a measurement system was developed

each module was designed

and the main modules were optimized. Third

the model was established completely after an algorithm was produced. Finally

tests were performed and the obtained data were analyzed within ± 2°. The experimental results show that the stability of the system is positive

the measurement repeatability error is 1

rad

the

-and

-axis nonlinearity errors are 1.8% and 1.7%

respectively

and the dynamic band response frequency is better than 200 Hz within ± 0.01°. The study confirms that the system basically offers high precision

high repeatability

high stability

and a dynamic measurement of a two-dimensional rotation angle.

关键词

Keywords

references

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