像素级光学滤波-探测集成器件的研究进展

余晓畅; 赵建村

doi:10.3788/OPE.20192705.0999

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像素级光学滤波-探测集成器件的研究进展

现代应用光学 | 更新时间：2020-08-13

- 像素级光学滤波-探测集成器件的研究进展
- Research progress of pixel-level integrated devices for spectral imaging
- 光学精密工程 2019年27卷第5期页码：999-1012
- 作者机构：
  
  1.西北工业大学空天微纳系统教育部重点实验室，陕西西安 710072
  2.西北工业大学陕西省微纳机电系统重点实验室，陕西西安 710072
- 作者简介：
  
  [ "余晓畅 (1994-)，男，安徽广德人，博士研究生，2016年于西北工业大学获得学士学位，主要从事微纳滤波及多光谱成像方面的研究。E-mail：yuxiaochang@mail.nwpu.edu.cn" ]
- 基金信息：
  
  国家自然科学基金优秀青年基金资助项目(51622509);装备预研航天科技联合基金资助项目；军科委先导专项(6141B06240205)
- DOI：10.3788/OPE.20192705.0999
  中图分类号： O433;TN256
- 收稿日期：2019-01-29，
  
  录用日期：2019-3-13，
  
  纸质出版日期：2019-05-15
- 稿件说明：
移动端阅览
余晓畅, 赵建村. 像素级光学滤波-探测集成器件的研究进展[J]. 光学精密工程, 2019,27(5):999-1012.

Xiao-chang YU, Jian-cun ZHAO. Research progress of pixel-level integrated devices for spectral imaging[J]. Optics and precision engineering, 2019, 27(5): 999-1012.
余晓畅, 赵建村. 像素级光学滤波-探测集成器件的研究进展[J]. 光学精密工程, 2019,27(5):999-1012. DOI： 10.3788/OPE.20192705.0999.

Xiao-chang YU, Jian-cun ZHAO. Research progress of pixel-level integrated devices for spectral imaging[J]. Optics and precision engineering, 2019, 27(5): 999-1012. DOI： 10.3788/OPE.20192705.0999.

摘要

传统光谱成像系统采用探测器与传统分光元件耦合的方式，体积较大、定制化能力不足。微/纳光机电系统的快速发展，为微型化光谱成像系统提供了解决途径。基于表面等离激元学和光学超表面的微纳滤波结构，可实现像素级的光场调控，有望替代传统滤波器件并具有与成像系统片上集成的潜力。近年来，集成了动态或静态滤波结构的光谱成像微系统已崭露头角，逐渐构建起全新的光谱成像方法，但在原理机制、器件性能、制造成本、集成装配工艺等方面还有许多需要攻克的难题。本文综述了国内外在像素级微纳滤波结构、滤波和成像器件的集成制造和装配等方面的研究进展，梳理了光学滤波-探测集成器件的发展脉络，探讨了其局限性并展望了发展趋势。

Abstract

The majority of the present spectral imaging systems couple traditional filters with photodetectors

which are too large and cannot be customized. The rapid advances in micro/nano-opto-electro-mechanical systems have provided effective solutions for the continuing miniaturization of spectral imaging systems. Based on plasmonics and optical metasurfaces

micro/nano color filters are capable of regulating light fields at the pixel level and thus have the potential to replace traditional filters and to be integrated with imaging systems on chips. In recent years

microspectral imaging systems integrated with dynamic or static filters have come to the forefront of new research and are enabling the development of new methods of spectral imaging. However

complete understanding of the fundamental theories of plasmonic filters remains elusive. In addition

a host of problems exist in terms of device performance

manufacturing cost

and assembly processes. In this review

we present the research progress of pixel-level integrated microdevices for spectral imaging

including micro/nano color filters

integrated manufacturing of filters and imagers

and assembly techniques of microspectral imaging systems. We also summarize the limitations and discuss the development trends of microspectral imaging systems.

关键词

Keywords

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