激光聚变靶丸内表面轮廓测量系统的研制

赵维谦; 王龙肖; 邱丽荣; 王允; 马仙仙

doi:10.3788/OPE.20192705.1013

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激光聚变靶丸内表面轮廓测量系统的研制

现代应用光学 | 更新时间：2020-08-13

- 激光聚变靶丸内表面轮廓测量系统的研制
- Development of inner-surface profile measurement system for ICF capsule
- 光学精密工程 2019年27卷第5期页码：1013-1023
- 作者机构：
  
  北京理工大学光电学院精密光电测试仪器及技术北京市重点实验室，北京 100081
- 作者简介：
  
  [ "赵维谦 (1966-)，男，新疆伊宁人，教授，长江学者，1993年和2003年于哈尔滨工业大学分别获得硕士和博士学位，主要从事差动共焦理论与精密光学检测方面的研究。E-mail:zwq669@126.com" ]
  [ "邱丽荣 (1976-)，女，黑龙江哈尔滨人，教授，杰青，1997年和2000年于西安交通大学分别获得学士和硕士学位，2005年于哈尔滨工业大学获得博士学位，主要从事差动共焦理论与精密光学检测方面的研究。E-mail:qiugrass@126.com" ]
- 基金信息：
  
  国家自然科学基金资助项目(61475020);国家自然科学基金资助项目(61635002);国家自然科学基金资助项目(51535002);国家重点研发计划资助项目(2016YFF0201005)
- DOI：10.3788/OPE.20192705.1013
  中图分类号： TH741
- 收稿日期：2018-12-20，
  
  录用日期：2019-1-9，
  
  纸质出版日期：2019-05-15
- 稿件说明：
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赵维谦, 王龙肖, 邱丽荣, 等. 激光聚变靶丸内表面轮廓测量系统的研制[J]. 光学精密工程, 2019,27(5):1013-1023.

Wei-qian ZHAO, Long-xiao WANG, Li-rong QIU, et al. Development of inner-surface profile measurement system for ICF capsule[J]. Optics and precision engineering, 2019, 27(5): 1013-1023.
赵维谦, 王龙肖, 邱丽荣, 等. 激光聚变靶丸内表面轮廓测量系统的研制[J]. 光学精密工程, 2019,27(5):1013-1023. DOI： 10.3788/OPE.20192705.1013.

Wei-qian ZHAO, Long-xiao WANG, Li-rong QIU, et al. Development of inner-surface profile measurement system for ICF capsule[J]. Optics and precision engineering, 2019, 27(5): 1013-1023. DOI： 10.3788/OPE.20192705.1013.

摘要

针对激光聚变靶丸内表面轮廓高精度无损测量的迫切需求，研制了一套激光聚变靶丸内表面轮廓测量系统。该系统通过最小二乘算法(LSC)计算出靶丸回转偏心量，并利用偏心调整台对靶丸偏心进行自动快速调整；然后，系统软件控制气浮回转轴承驱动靶丸旋转，利用激光差动共焦传感器(LDCS)轴向响应曲线过零点及光线追迹算法精确计算出靶丸内表面轮廓上每个采样点的几何位置；最后，对靶丸内轮廓测量数据进行LSC评定得到其圆度信息。实验证明，靶丸回转偏心的自动调整时间可达22 s，当采样点分别为1 024，2 048及4 096时，靶丸内轮廓测量时间分别可达10，20及40 s，且圆度测量标准差可达19 nm(1 024点)。该系统实现了靶丸回转偏心的自动快速调整及其内轮廓的高精度、无损、快速、自动测量。

Abstract

Considering the urgent demand for high-precision and nondestructive measurements of a Inertial Confinement Fusion (ICF) capsule

an inner-surface profile measurement system for an ICF capsule was developed in this study. First

the system used a Least Square Circle (LSC) algorithm to calculate the capsule′s eccentricity and adjusts it automatically and quickly using the eccentricity adjustment table. The system then controlled via software an air-bearing shaft to drive the capsule rotation

and it used the zero-crossing point of the axial response curve of a laser differential confocal sensor and a ray tracing algorithm to calculate the geometric position of each sampling point on the capsule′s inner-surface profile. Finally

the roundness value of the inner profile was evaluated using LSC. Experimental results show that the eccentricity adjustment time can reach 22 s

and the inner profile measurement time can reach 10

and 40 s

which correspond to the sampling points of 1 024

2 048

and 4 096

respectively. In addition

the standard deviation of the inner profile roundness is shown to be as high as 19 nm (1 024 points). The system realizes an automatic rapid adjustment of the capsule′s eccentricity and a high-precision

nondestructive

rapid

and automatic measurement of the capsule′s inner profile.

关键词

Keywords

references

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