双频激光干涉三自由度微振动测量系统

陈家键; 缪立军; 周一览; 舒晓武

doi:10.3788/OPE.20192707.1435

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双频激光干涉三自由度微振动测量系统

现代应用光学 | 更新时间：2020-08-13

- 双频激光干涉三自由度微振动测量系统
- Three-degree-of-freedom micro-vibration measurement system based on dual-frequency laser interference
- 光学精密工程 2019年27卷第7期页码：1435-1443
- 作者机构：
  
  浙江大学光电科学与工程学院现代光学仪器国家重点实验室, 浙江杭州 310027
- 作者简介：
  
  [ "陈家键(1994-), 男, 浙江温州人, 硕士, 2016年于南昌大学获得学士学位, 主要研究方向为惯性技术和光学传感。E-mail：chenjiajian@zju.edu.cn" ]
- 基金信息：
  
  技术基础科研项目(JSJL2017110B001);中央高校基本科研业务费专项资金资助项目(2016XZZX004 01)
- DOI：10.3788/OPE.20192707.1435
  中图分类号： O439
- 收稿日期：2019-04-01，
  
  录用日期：2019-4-17，
  
  纸质出版日期：2019-07-15
- 稿件说明：
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陈家键, 缪立军, 周一览, 等. 双频激光干涉三自由度微振动测量系统[J]. 光学精密工程, 2019,27(7):1435-1443.

Jia-jian CHEN, Li-jun MIAO, Yi-lan ZHOU, et al. Three-degree-of-freedom micro-vibration measurement system based on dual-frequency laser interference[J]. Optics and precision engineering, 2019, 27(7): 1435-1443.
陈家键, 缪立军, 周一览, 等. 双频激光干涉三自由度微振动测量系统[J]. 光学精密工程, 2019,27(7):1435-1443. DOI： 10.3788/OPE.20192707.1435.

Jia-jian CHEN, Li-jun MIAO, Yi-lan ZHOU, et al. Three-degree-of-freedom micro-vibration measurement system based on dual-frequency laser interference[J]. Optics and precision engineering, 2019, 27(7): 1435-1443. DOI： 10.3788/OPE.20192707.1435.

摘要

为获取光学平台多自由度微振动信息

设计了一种基于平面镜双频激光干涉的三自由度动态微振动测量系统。该系统利用激光多普勒效应

采用三个测量轴获得测量反射镜的三点位移信息

计算出测量镜平动、扭转角、俯仰角信息

实时检测三自由度的微振动情况

从而为光学系统的微振动补偿控制提供基础。对微振动测量系统进行了不确定度分析

建立了不确定度模型

为进一步提高系统精度提供理论依据

也为系统在校准和计量领域的应用奠定基础。实验过程中

采用高精度地震计对待测平台进行同步测量

与系统平动测量结果进行对比

验证了系统的测量准确性。该系统的平动分辨率可达到5 nm

扭转角分辨率为5.05

rad

俯仰角分辨率为4.69

rad

具有多自由度、非接触、高分辨、可溯源的优点。

Abstract

To obtain multi-degree-of-freedom micro-vibration information of an optical platform

a three-degree-of-freedom dynamic micro-vibration measurement system based on plane mirror dual-frequency laser interference is designed. The system utilizes the laser Doppler effect to obtain the three-point displacement information of the measuring mirror by using three measuring axes; calculates the overall displacement

torsion angle

and pitch angle information of the measuring mirror; and detects the three-degree-of-freedom micro-vibration in real time

thereby providing a basis for micro-vibration compensation control of the optical system. The uncertainty of the micro-angular vibration measurement system is analyzed

and an uncertainty model is established

which provides a theoretical basis for further improving the accuracy of the system and also lays a solid foundation for application of the system in the field of calibration and metrology. During the experiment

a high-precision seismometer was used to measure the platform simultaneously and

by comparison with the system translation measurement results

the measurement accuracy of the system was verified. The displacement resolution of the system is 5 nm

the torsion resolution is 5.05 rad

and the pitch resolution is 4.69 rad. The system has the advantages of multiple degrees of freedom

noncontact operability

high resolution

and traceability.

关键词

Keywords

references

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