多工位尖角电极电火花成形微尖槽结构

宋满仓; 李阳; 刘军山

doi:10.3788/OPE.20192707.1569

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多工位尖角电极电火花成形微尖槽结构

微纳技术与精密机械 | 更新时间：2020-08-13

- 多工位尖角电极电火花成形微尖槽结构
- Micro sharp groove by EDM with multi-station shape-angle electrode
- 光学精密工程 2019年27卷第7期页码：1569-1576
- 作者机构：
  
  1.大连理工大学精密与特种加工教育部重点实验室，辽宁大连 116024
  2.三菱电机大连理工大学电加工技术中心，辽宁大连 116024
  3.大连理工大学辽宁省微纳米技术及系统重点实验室，辽宁大连 116024
- 作者简介：
  
  [ "宋满仓(1964-)，男，辽宁本溪人，博士，副教授，1989年于清华大学获得硕士学位，2005年于大连理工大学获得博士学位，主要从事模具设计与制造技术及电火花加工工艺的研究。E-mail：mcsong@dlut.edu.cn" ]
  [ "李阳(1993-)，男，江苏淮安人，硕士研究生，2016年于南通大学获得学士学位，主要从事电火花加工技术的研究。E-mail：liyang3o0@163.com" ]
- 基金信息：
  
  国家重点研发计划资助项目(2016YFC1202503);国家科技支撑计划资助项目(2015BAI03B08)
- DOI：10.3788/OPE.20192707.1569
  中图分类号： TG661
- 收稿日期：2019-01-28，
  
  录用日期：2019-3-22，
  
  纸质出版日期：2019-07-15
- 稿件说明：
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宋满仓, 李阳, 刘军山. 多工位尖角电极电火花成形微尖槽结构[J]. 光学精密工程, 2019,27(7):1569-1576.

Man-cang SONG, Yang LI, Jun-shan LIU. Micro sharp groove by EDM with multi-station shape-angle electrode[J]. Optics and precision engineering, 2019, 27(7): 1569-1576.
宋满仓, 李阳, 刘军山. 多工位尖角电极电火花成形微尖槽结构[J]. 光学精密工程, 2019,27(7):1569-1576. DOI： 10.3788/OPE.20192707.1569.

Man-cang SONG, Yang LI, Jun-shan LIU. Micro sharp groove by EDM with multi-station shape-angle electrode[J]. Optics and precision engineering, 2019, 27(7): 1569-1576. DOI： 10.3788/OPE.20192707.1569.

摘要

针对加工某微小装置的局部微尖槽形状精度难以保证的问题，提出一种多工位尖角电极电火花成形的方法。以304不锈钢为工件材料，选择纯铜和铜钨合金(W75%)作为电极材料并进行试验比较。为减小电极损耗和重复定位误差对加工精度的影响，采用慢走丝电火花线切割加工多工位尖角电极，然后利用多工位尖角电极电火花成形夹角为16°、深度为0.36 mm的微尖槽。结果表明：采用较低进给速度，恒速多次线切割的方法能制作出质量较好的多工位尖角电极；尖槽成形精度随着工位数的增加而提高，且相同工位数时由于铜钨合金电极的低损耗性能使尖槽成形精度更好。最终采用6工位的铜钨合金电极成形微尖槽角度为16.3°，相对误差1.9%；深度为0.356 mm，相对误差1.1%，形状精度也较好。该方法可以满足某微小装置中微尖槽部分的加工精度和使用要求。

Abstract

To solve the difficulty of ensuring the shape accuracy of micro grooves in a micro device

a new method of using multi-station shape-angle electrodes through Electrical Discharge Machining (EDM) was proposed. A total of 304 stainless steel samples were used as workpiece materials

and pure copper and copper-tungsten alloy (W75%) were selected and compared as electrode materials. To reduce the influence of electrode wear and installation error

multi-station shape-angle electrodes were machined by low-speed Wire-cut EDM (WEDM)

and then a 16° and 0.36-mm-depth groove was formed by EDM. Results show that a multi-station shape-angle electrode having enhanced surface quality can be fabricated using a lower feed rate

a constant speed

and multiple cutting through WEDM. The forming accuracy of the grooves was improved with the increase in the number of stations

and the forming accuracy of the copper-tungsten alloy was improved as a result of its low loss at the same station number. Therefore

a six-station copper-tungsten electrode was used to machine the workpiece with a sharp angle of 16.3° (relative error of 1.9%)

a 0.356-mm depth (relative error of 1.1%)

and improved form accuracy. This method can meet the processing accuracy and application requirements of sharp grooves in a micro device.

关键词

Keywords

references

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