多面体塔差及其安装偏心对光电编码器精度检测的影响

陈赟; 高胜英; 韩庆阳; 张晰

doi:10.3788/OPE.20192708.1704

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多面体塔差及其安装偏心对光电编码器精度检测的影响

现代应用光学 | 更新时间：2020-08-13

- 多面体塔差及其安装偏心对光电编码器精度检测的影响
- Impact of polyhedron pyramidal error and installation eccentricity on precision detection of photoelectric encoder
- 光学精密工程 2019年27卷第8期页码：1704-1709
- 作者机构：
  
  中国科学院长春光学精密机械与物理研究所，吉林长春 130033
- 作者简介：
  
  [ "陈赟(1976-)，男，山东郓城人，副研究员，博士，1999年于长春光学精密机械学院(现为长春理工大学)获得学士学位，2002年、2006年于长春光学精密机械学院分别获得硕士、博士学位，主要从事光电编码器设计、计量光栅精密刻划、真空镀膜和检测方面的工作和研究。E-mail：tutorchy@163.com" ]
  [ "高胜英(1986-)，男，河南郑州人，助理研究员，2012年于哈尔滨工业大学获得硕士学位，主要从事光学设计及计量光栅真空镀膜方面的研究" ]
- 基金信息：
  
  中国科学院仪器设备功能开发技术创新项目(0932JSHN90)
- DOI：10.3788/OPE.20192708.1704
  中图分类号： TP212.12
- 收稿日期：2019-05-21，
  
  录用日期：2019-6-17，
  
  纸质出版日期：2019-08-15
- 稿件说明：
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陈赟, 高胜英, 韩庆阳, 等. 多面体塔差及其安装偏心对光电编码器精度检测的影响[J]. 光学精密工程, 2019,27(8):1704-1709.

Yun CHEN, Sheng-ying GAO, Qing-yang HAN, et al. Impact of polyhedron pyramidal error and installation eccentricity on precision detection of photoelectric encoder[J]. Optics and precision engineering, 2019, 27(8): 1704-1709.
陈赟, 高胜英, 韩庆阳, 等. 多面体塔差及其安装偏心对光电编码器精度检测的影响[J]. 光学精密工程, 2019,27(8):1704-1709. DOI： 10.3788/OPE.20192708.1704.

Yun CHEN, Sheng-ying GAO, Qing-yang HAN, et al. Impact of polyhedron pyramidal error and installation eccentricity on precision detection of photoelectric encoder[J]. Optics and precision engineering, 2019, 27(8): 1704-1709. DOI： 10.3788/OPE.20192708.1704.

摘要

自准直仪对安放在光电编码器轴系上的多面体进行检测是目前检测光电编码器的测角精度的常用方法之一。为了提高检测效率，根据自准直仪检测原理，对多面体塔差对自准直仪读数的影响进行理论分析；其次，依据偏心产生的原理，分析了多面体安装偏心对检测光电编码器精度的影响，得出了多面体塔差或多面体安装偏心在光电编码器精度检测中，因自准直仪的读数方式不同造成的影响不同。用23面体检测某种型号21位绝对式光电编码器，采用沿自准直仪

轴读数的方式，多面体安装偏心造成的检测误差为

p-p

=7.9″，多面体塔差造成的检测误差

p-p

=0.8″。实验结果表明，自准直仪读数方式不同，多面体塔差和安装偏心造成的检测误差不同，为提高检测效率提供了一定的理论指导。

Abstract

In a common method for precision detecton of photoelectric encoders

a polyhedron is joined with a photoelectric encoder and light from an autocollimation setup is reflected by the polyhedron; the precision of photoelectric encoder is then measured by reading the numerical value of the autocollimation. A feasible method to improve measurement efficiency was investigated with respect to the main factors that affect photoelectric encoder detection. Firstly

according to the principle of autocollimator detection

a theoretical analysis was conducted by analyzing polyhedron pyramidal error as it effects the reading of the numerical value of autocollimation. Secondly

according to the principle of installation eccentricity of a polyhedron pyramidal

the impact factors that affect the measurement precision of a photoelectric encoder were analyzed in detail. Pyramidal error and installation eccentricity are the main external factors

which are determined by the numerical value reading of autocollimation. A 21-bit photoelectric absolute encoder was detected using a 23-sided polyhedron; the numerical value of autocollimation is read along the

-axis

the detection error of polyhedron pyramidal error is 7.9″

and the detection of installation eccentricity is 0.8″. The testing results indicate the effects of pyramidal error and installation eccentricity on the precision are based on the reading of the numerical value of autocollimation

which offers an guidance to improve detection efficiency.

关键词

Keywords

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