新型圆光栅测角误差补偿方法及其应用

于连栋; 鲍文慧; 赵会宁; 贾华坤; 张润

doi:10.3788/OPE.20192708.1719

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新型圆光栅测角误差补偿方法及其应用

现代应用光学 | 更新时间：2020-08-13

- 新型圆光栅测角误差补偿方法及其应用
- Application and novel angle measurement error compensation method of circular gratings
- 光学精密工程 2019年27卷第8期页码：1719-1726
- 作者机构：
  
  合肥工业大学仪器科学与光电工程学院，安徽合肥 230009
- 作者简介：
  
  [ "于连栋(1969-)，男，山东临沂人，教授，博士生导师，1993年、1999年、2003年于合肥工业大学分别获得学士、硕士、博士学位，主要从事坐标测量技术、现代测试精度理论研究、微纳米测量技术的研究。E-mail：liandongyu@hfut.edu.cn" ]
  [ "鲍文慧(1993-)，女，河北唐山人，硕士研究生，20016年于南京航空航天大学获得学士学位，主要从事大尺寸测量方面的研究。E-mail：bwh1993@mail.hfut.edu.cn" ]
- 基金信息：
  
  国家重大科学仪器设备开发专项(2013YQ220893);111计划项目(B12019);国家自然科学基金资助项目(51875165);国家自然基金青年基金资助项目(51805139)
- DOI：10.3788/OPE.20192708.1719
  中图分类号： TB922
- 收稿日期：2019-03-20，
  
  录用日期：2019-4-10，
  
  纸质出版日期：2019-08-15
- 稿件说明：
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于连栋, 鲍文慧, 赵会宁, 等. 新型圆光栅测角误差补偿方法及其应用[J]. 光学精密工程, 2019,27(8):1719-1726.

Lian-dong YU, Wen-hui BAO, Hui-ning ZHAO, et al. Application and novel angle measurement error compensation method of circular gratings[J]. Optics and precision engineering, 2019, 27(8): 1719-1726.
于连栋, 鲍文慧, 赵会宁, 等. 新型圆光栅测角误差补偿方法及其应用[J]. 光学精密工程, 2019,27(8):1719-1726. DOI： 10.3788/OPE.20192708.1719.

Lian-dong YU, Wen-hui BAO, Hui-ning ZHAO, et al. Application and novel angle measurement error compensation method of circular gratings[J]. Optics and precision engineering, 2019, 27(8): 1719-1726. DOI： 10.3788/OPE.20192708.1719.

摘要

在实际工业应用中，环境温度变化是便携关节式坐标测量机中旋转轴系测角精度的主要误差源。为了消除环境温度对旋转轴系测角精度的影响，本文提出了一种新型圆光栅测角误差补偿方法，即建立含有环境温度影响因子的圆光栅测角误差补偿模型。利用谐波方法建立在特定温度下的圆光栅测角误差补偿模型，利用多项式方法建立谐波系数与环境温度之间的函数关系。最后，以14 ℃下的实验数据为验证数据，分别代入到传统谐波误差补偿模型和本文提出的模型中。实验结果表明，相对于传统谐波误差补偿模型，使用本文提出的模型补偿后圆光栅的测角精度提高4倍左右，修正后的残差峰峰值在2″以内，能够有效地补偿10~40 ℃下圆光栅的测角误差。

Abstract

In practical industrial applications

ambient temperature change is the main source of error in the angular accuracy of the rotating shaft in Portable Articulated Coordinate Measurement Instruments Machines (PACMM). To eliminate this error

this paper proposes a new method to establish a circular grating angle measurement error compensation model with ambient temperature influence factors. First

the harmonic method is used to establish the compensation model of angle measurement error of circular gratings at a specific temperature. Second

the polynomial method is used to establish the functional relationship between the harmonic coefficient and the ambient temperature. Finally

the experimental data at 14 ℃ is used as the verification data that are substituted into both the traditional harmonic error compensation model and the model proposed by this paper. The experimental results show that compared with the traditional harmonic error compensation model

the accuracy of the compensation model proposed by this paper is improved by a factor of approximately four

and the corrected residual peak value is within 2″; this value can effectively compensate the angular error of the circular grating at 10 to 40 ℃.

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Keywords

references

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