扫描干涉光刻机的超精密移相锁定系统

王磊杰; 张鸣; 朱煜; 鲁森; 杨开明

doi:10.3788/OPE.20192708.1765

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扫描干涉光刻机的超精密移相锁定系统

现代应用光学 | 更新时间：2020-08-13

- 扫描干涉光刻机的超精密移相锁定系统
- Ultra-precision phase-shifting locking system of scanning beam interference lithography tool
- 光学精密工程 2019年27卷第8期页码：1765-1773
- 作者机构：
  
  清华大学机械工程系摩擦学国家重点实验室& 精密超精密制造装备及控制北京市重点实验室，北京 100084
- 作者简介：
  
  [ "王磊杰(1988-)，男，河南周口人，博士，助理研究员，2010年于中国矿业大学(北京)获得学士学位，2016年于清华大学获得博士学位，主要从事基于扫描干涉光刻的大口径光栅制造技术、超精密光栅干涉仪位移测量技术和超精密激光干涉仪位移测量技术的研究。E-mail：wang-lj66@mail.tsinghua.edu.cn" ]
  张鸣(1973-)，男，吉林扶余人，副研究员，1996年于北京科技大学获得学士学位，1999年于中国运载火箭研究院13所获得硕士学位，2005年于清华大学获得博士学位，主要从事高端光刻机超精密工件台的研究，涉及超精密工件台的系统设计和结构设计、超精密制造工艺、高性能驱动、超精密测量及超精密环境保障等工件台研发的核心领域。E-mail：zhangming@tsinghua.edu.cn ZHANG Ming, E-mail: zhangming@tsinghua.edu.cn
- 基金信息：
  
  国家自然科学基金资助项目(51677104);中国博士后科学基金资助项目(2017M610885);02国家重大科技专项资助项目(2018ZX02101003)
- DOI：10.3788/OPE.20192708.1765
  中图分类号： TH74; TP273
- 收稿日期：2019-01-25，
  
  录用日期：2019-3-25，
  
  纸质出版日期：2019-08-15
- 稿件说明：
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王磊杰, 张鸣, 朱煜, 等. 扫描干涉光刻机的超精密移相锁定系统[J]. 光学精密工程, 2019,27(8):1765-1773.

Lei-jie WANG, Ming ZHANG, Yu ZHU, et al. Ultra-precision phase-shifting locking system of scanning beam interference lithography tool[J]. Optics and precision engineering, 2019, 27(8): 1765-1773.
王磊杰, 张鸣, 朱煜, 等. 扫描干涉光刻机的超精密移相锁定系统[J]. 光学精密工程, 2019,27(8):1765-1773. DOI： 10.3788/OPE.20192708.1765.

Lei-jie WANG, Ming ZHANG, Yu ZHU, et al. Ultra-precision phase-shifting locking system of scanning beam interference lithography tool[J]. Optics and precision engineering, 2019, 27(8): 1765-1773. DOI： 10.3788/OPE.20192708.1765.

摘要

扫描干涉光刻机移相锁定是实现大面积高精度全息光栅曝光拼接的关键之一。为了实现大面积高精度全息光栅高精度曝光拼接，针对扫描干涉光刻机步进扫描拼接轨迹，重点开展了移相锁定系统的研究。在零差移频式相位锁定分系统和外差利特罗式光栅位移测量干涉仪的基础上，阐述了扫描干涉光刻机的新型移相锁定系统原理。针对新型的移相锁定系统原理，构建了移相锁定控制系统实验装置。最后，基于移相锁定控制实验装置，针对移相锁定定位性能，开展了移相锁定定位控制实验以及影响控制精度的因素分析，实现了±3.27 nm (3

，

=251 nm)的定位控制精度；针对移相跟踪控制性能，在移相跟踪控制精度实验分析的基础上，利用陷阱滤波

PID控制实现了±4.17 nm(3

，

=251 nm)的跟踪控制精度。

Abstract

Phase-shifting locking is one of the key aspects of Scanning Beam Interference Lithography (SBIL) in achieving highly accurate exposure stitching of a large grating. To achieve this objective

a phase-shifting locking system was investigated for the stepping/scanning exposure trajectory of SBIL. Firstly

based on a previously proposed homodyne frequency-shifting interference pattern locking system and a heterodyne Littrow grating interferometer

a novel phase-shifting locking system scheme was proposed for SBIL. An experimental setup was then designed for this proposed scheme. Based on the setup

experimental and factor analyses were conducted to facilitate precise phase-shifting positioning control and an accuracy of ±3.27 nm (3

=251 nm) was achieved. In addition

an accuracy of ±4.17 nm (3

=251 nm) was achieved for phase-shifting locking control using a notch and PID control.

关键词

Keywords

references

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