压电陶瓷驱动器的迟滞非线性规律

范伟; 傅雨晨; 于欣妍

doi:10.3788/OPE.20192708.1793

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压电陶瓷驱动器的迟滞非线性规律

微纳技术与精密机械 | 更新时间：2020-08-13

- 压电陶瓷驱动器的迟滞非线性规律
- Hysteresis nonlinear law of piezoelectric ceramic actuator
- 光学精密工程 2019年27卷第8期页码：1793-1799
- 作者机构：
  
  华侨大学机电及自动化学院，福建厦门 361021
- 作者简介：
  
  [ "范伟(1980-)，男，甘肃玉门人，博士，讲师，硕士生导师，2002年、2009年于合肥工业大学分别获得学士、博士学位，主要从事微纳驱动控制技术、压电陶瓷特性领域的研究。E-mail：fanwei@hqu.edu.cn" ]
  [ "傅雨晨(1996-)，男，浙江湖州人，硕士研究生，2019年于华侨大学获得学士学位，主要从事压电陶瓷迟滞非线性和控制方面的研究。E-mail：1637749097@qq.com" ]
- 基金信息：
  
  国家自然科学基金资助项目(51505161);福建省自然科学基金资助项目(2017J01086);泉州市科技计划项目(2018Z001)
- DOI：10.3788/OPE.20192708.1793
  中图分类号： TN384
- 收稿日期：2018-12-28，
  
  录用日期：2019-2-20，
  
  纸质出版日期：2019-08-15
- 稿件说明：
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范伟, 傅雨晨, 于欣妍. 压电陶瓷驱动器的迟滞非线性规律[J]. 光学精密工程, 2019,27(8):1793-1799.

Wei FAN, Yu-chen FU, Xin-yan YU. Hysteresis nonlinear law of piezoelectric ceramic actuator[J]. Optics and precision engineering, 2019, 27(8): 1793-1799.
范伟, 傅雨晨, 于欣妍. 压电陶瓷驱动器的迟滞非线性规律[J]. 光学精密工程, 2019,27(8):1793-1799. DOI： 10.3788/OPE.20192708.1793.

Wei FAN, Yu-chen FU, Xin-yan YU. Hysteresis nonlinear law of piezoelectric ceramic actuator[J]. Optics and precision engineering, 2019, 27(8): 1793-1799. DOI： 10.3788/OPE.20192708.1793.

摘要

探究压电陶瓷的迟滞非线性规律，为进一步修正迟滞非线性提供参考依据和理论基础。通过实验测量得到迟滞模型并对实验数据分析，拟合出上升轨迹的修正直线，求出其在相同位移下与上升、下降轨迹的电压差作为补偿电压，发现两条轨迹采样点上的输入电压与补偿电压满足近似多项式关系；分别选定5，10和15 V不同步长进行驱动实验。实验结果：上升轨迹(下降轨迹)多项式参数R-square=0.999 2(0.999 9)，RMSE=0.083(0.080 86)；R-square=0.999 7(0.999 9)，RMSE=0.057 39(0.094 99)；R-square=0.995 2(0.999 8)，RMSE=0.291 6(0.165 5)。实验结论：两条轨迹的R-square近似为1，RMSE较接近0，重复性误差在1.13%~2.63%，输入电压与补偿电压满足近似多项式关系，拟合程度和匹配性较高，且重复性较好，具有可预测性，从而为进一步修正压电陶瓷驱动器的迟滞非线性提供了参考依据和理论基础。

Abstract

In this study

the hysteresis nonlinear law of piezoelectric ceramics was explored to provide a reference and theoretical basis for further correction of hysteresis nonlinearity. A hysteresis model was obtained through experimental measurements

and experimental data were analyzed. The corrected straight line of the rising trajectory was fitted; the voltage difference between the rising and falling trajectories at the same displacement was obtained as the compensation voltage; and the input voltage at the sampling points of the two trajectories was determined. The compensation voltage was found to satisfy an approximately polynomial relationship

where 5-

10-

and 15-V asynchronous lengths were selected for driving experiments. Experimental results show that the rising trajectory (falling trajectory) polynomial parameters are R-square=0.999 2 (0.999 9)

root mean square error (RMSE)=0.083 (0.080 86); R-square=0.999 7 (0.999 9)

RMSE=0.057 39 (0.094 99); and R-square=0.995 2 (0.999 8)

RMSE=0.291 6 (0.165 5). The experimental results also show that the R-square of the two trajectories is approximately 1; the RMSE is closer to 0; and the repeatability error is between 1.13% and 2.63%. The input and compensation voltages satisfied the approximately polynomial relationship

and the degree of fit and matching are high and repeated. The hysteresis model is proven to have good performance and predictability

thus providing a reference and theoretical basis to further correct the hysteresis nonlinearity of piezoelectric ceramic actuators.

关键词

Keywords

references

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