电磁悬浮静电驱动旋转微镜控制系统设计

肖奇军; 罗忠辉

doi:10.3788/OPE.20192709.1935

您当前的位置：

首页 >

文章列表页 >

电磁悬浮静电驱动旋转微镜控制系统设计

微纳技术与精密机械 | 更新时间：2020-08-13

- 电磁悬浮静电驱动旋转微镜控制系统设计
- Control system for an electromagnetic suspension and electrostatically drive rotating micro mirror
- 光学精密工程 2019年27卷第9期页码：1935-1942
- 作者机构：
  
  1.肇庆学院电子与电气工程学院，广东肇庆 526061
  2.广东技术师范大学机电学院，广东广州 510665
- 作者简介：
  
  [ "肖奇军 (1975-)，男，湖南衡阳人，博士，副教授，2004年于广东工业大学获得硕士学位, 2010年于上海交通大学获得博士学位，新加坡南洋理工大学博士后，主要从事微机电系统方面的研究。E-mail:shawqj@126.com" ]
  罗忠辉 (1965-)，男，江西泰和人，教授，1988年于华中理工大学获得学士学位, 1995年于武汉工业大学获得硕士学位，2005年于广东工业大学获得博士学位，主要从事机电液传动与控制、现代检测技术、机械故障诊断理论与方法方面的教学与科研。E-mail: 1024968198@qq.com LUO Zhong-hui, E-mail: 1024968198@qq.com
- 基金信息：
  
  广东省自然科学基金资助项目(2016A030313846);广东省教育厅特色创新项目(2017KTSCX197)
- DOI：10.3788/OPE.20192709.1935
  中图分类号： TH703; TN703
- 收稿日期：2019-05-23，
  
  录用日期：2019-7-20，
  
  纸质出版日期：2019-09-15
- 稿件说明：
移动端阅览
肖奇军, 罗忠辉. 电磁悬浮静电驱动旋转微镜控制系统设计[J]. 光学精密工程, 2019,27(9):1935-1942.

Qi-jun XIAO, Zhong-hui LUO. Control system for an electromagnetic suspension and electrostatically drive rotating micro mirror[J]. Optics and precision engineering, 2019, 27(9): 1935-1942.
肖奇军, 罗忠辉. 电磁悬浮静电驱动旋转微镜控制系统设计[J]. 光学精密工程, 2019,27(9):1935-1942. DOI： 10.3788/OPE.20192709.1935.

Qi-jun XIAO, Zhong-hui LUO. Control system for an electromagnetic suspension and electrostatically drive rotating micro mirror[J]. Optics and precision engineering, 2019, 27(9): 1935-1942. DOI： 10.3788/OPE.20192709.1935.

摘要

为了实现对电磁悬浮微镜绕轴向-180°到+180°角度的旋转控制.对该系统所采用的电磁悬浮、静电驱动、转角闭环控制等进行研究。首先，设计和制造了电磁悬浮微镜的定子和转子结构。接着，对通过线圈的电流频率、电流大小与悬浮高度的关系进行仿真和实验，实验结果和仿真结果基本一致。然后，在分析变电容驱动原理的基础上，进行旋转控制实验，说明在按相序通电情况下，转子能实现旋转。最后，介绍了采用高精度的电容检测的转角闭环控制系统。实验结果表明：在激励电流峰-峰值是0.5 A，激励频率为20 MHz时，转子悬浮到100

m高度，能够实现指定角度的控制，基本满足电磁悬浮微镜的控制要求。

Abstract

In order to realize the rotation control of an electromagnetic levitation micromirror from -180° to +180°

the electromagnetic levitation

electrostatic drive

and closed-loop angle control used in this system were studied. First

the stator and rotor structures were designed and fabricated. Then

the relationship between levitation height and the frequency and amplitude applied to the coil were simulated and tested. The experimental results showed good agreement with the simulation results. On the basis of the analysis of the driving principle of variable capacitance

the rotation control experiment was performed

which showed that the rotor can rotate under the energizing condition in the phase sequence. Finally

a closed-loop control system with high-precision capacitance detection was introduced. The experimental results show that when the excitation current p-p value is 0.5 A and the excitation frequency is 20 MHz

suspension of the rotor at height of 100

m can control the specified angle and meet the control requirements of the electromagnetic suspension micromirror.

关键词

Keywords

references

SHEARWOOD C, HO K Y, WILLIAMS C B, et al . Development of a levitated micromotor for application as a gyroscope[J]. Sensors and Actuators A: Physical , 2000, 83(1/2/3): 85-92.

SHEARWOOD C, MATTINGLEY A D, GIBBS M R J, et al . Levitation of a micromachined rotor for application in a rotating gyroscope[J]. Electronics Letters , 1995, 31(21): 1845-1846.

WU X S, CHEN W Y, ZHAO X L, et al . Development of a micromachined rotating gyroscope with electromagnetically levitated rotor[J]. Journal of Micromechanics and Microengineering , 2006, 16(10): 1993-1999.

ZHANG W P, CHEN W Y, ZHAO X L, et al . The study of an electromagnetic levitating micromotor for application in a rotating gyroscope[J]. Sensors and Actuators A: Physical , 2006, 132(2): 651-657.

SARI I, KRAFT M. A micro electrostatic linear accelerator based on electromagnetic levitation[C] //2011 16th International Solid-State Sensors, Actuators and Microsystems Conference, June 5-9, 2011. Beijing, China. New York, USA: IEEE , 2011. https://www.researchgate.net/publication/252024275_A_micro_electrostatic_linear_accelerator_based_on_electromagnetic_levitation

SARI I, KRAFT M. A MEMS linear accelerator for levitated micro-objects[J]. Sensors and Actuators A: Physical , 2015, 222: 15-23.

POLETKIN K V, CHERNOMORSKY A I, SHEARWOOD C. Proposal for micromachined accelerometer, based on a contactless suspension with zero spring constant[J]. IEEE Sensors Journal , 2012, 12(7): 2407-2413.

POLETKIN K, LU Z Q, WALLRABE U, et al . A new hybrid micromachined contactless suspension with linear and angular positioning and adjustable dynamics[J]. Journal of Microelectromechanical Systems , 2015, 24(5): 1248-1250.

CHEN R T, NGUYEN H, WU M C. A low voltage micromachined optical switch by stress-induced bending[C] //Technical Digest. IEEE International MEMS 99 Conference. Twelfth IEEE International Conference on Micro Electro Mechanical Systems (Cat. No.99CH36291), January 21, 1999. Orlando, FL, USA. New York, USA: IEEE , 1999. https://www.researchgate.net/publication/3788725_A_low_voltage_micromachined_optical_switch_by_stress-induced_bending

MILANOVIC V, LAST M, PISTER K S J. Laterally actuated torsional micromirrors for large static deflection[J]. IEEE Photonics Technology Letters , 2003, 15(2): 245-247.

刘英明, 徐静, 钟少龙, 等.垂直梳齿驱动的大尺寸MOEMS扫描镜[J].光学精密工程, 2013, 21(2): 400-407.

LIU Y M, XU J, ZHONG SH L, et al . Large-scale MOEMS scanning mirror actuated by vertical comb[J]. Opt. Precision Eng. , 2013, 21(2): 400-407.(in Chinese)

李四华, 徐静, 龙亮, 等.多台阶平板静电驱动的高占空比微镜阵列的研制[J].光学精密工程, 2011, 19(8): 1816-1823.

LI S H, XU J, LONG L, et al . Fabrication of high fill-factor micro-mirror array with multi-terraced-plate structure[J]. Opt. Precision Eng. , 2011, 19(8): 1816-1823.(in Chinese)

XIAO Q J, CHEN W Y, LI S Y, et al . Modeling and simulation of levitation control for a micromachined electrostatically suspended gyroscope[J]. Microsystem Technologies , 2010, 16(3): 357-366.

浏览量

125

下载量

CSCD

文章被引用时，请邮件提醒。

提交

工具集

关联资源

1 470 nm大功率半导体激光溶脂仪控制系统设计

发光二极管显示屏分段灰度调制与优选扫描时钟获取

结肠诊疗微机器人控制系统的设计和实现

低电压集成电泳芯片的研制

全数字化高速同步摄影控制系统