喷嘴型腔对光耦合胶体射流抛光能力的影响

宋孝宗; 姚统

doi:10.3788/OPE.20192709.2011

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喷嘴型腔对光耦合胶体射流抛光能力的影响

微纳技术与精密机械 | 更新时间：2020-08-13

- 喷嘴型腔对光耦合胶体射流抛光能力的影响
- Effect of nozzle cavity on polishing ability of light coupled colloid jet
- 光学精密工程 2019年27卷第9期页码：2011-2019
- 作者机构：
  
  兰州理工大学机电工程学院，甘肃兰州 730050
- 作者简介：
  
  [ "宋孝宗(1981-)，男，甘肃会宁人，博士，副教授，2003年、2005年、2010年于哈尔滨工业大学分别获得学士、硕士、博士学位，主要从事超光滑表面加工方面的研究。E-mail:songxiaozong@126.com" ]
  [ "姚统(1995-)，男，甘肃通渭人，硕士，2016年于内蒙古科技大学获得学士学位，2019年于兰州理工大学获得硕士学位，主要从事光催化纳米颗粒胶体射流抛光方面的研究。E-mail: 836398066@qq.com" ]
- 基金信息：
  
  国家自然科学基金资助项目(51565031)
- DOI：10.3788/OPE.20192709.2011
  中图分类号： TG356.28
- 收稿日期：2019-05-21，
  
  录用日期：2019-6-3，
  
  纸质出版日期：2019-09-15
- 稿件说明：
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宋孝宗, 姚统. 喷嘴型腔对光耦合胶体射流抛光能力的影响[J]. 光学精密工程, 2019,27(9):2011-2019.

Xiao-zong SONG, Tong YAO. Effect of nozzle cavity on polishing ability of light coupled colloid jet[J]. Optics and precision engineering, 2019, 27(9): 2011-2019.
宋孝宗, 姚统. 喷嘴型腔对光耦合胶体射流抛光能力的影响[J]. 光学精密工程, 2019,27(9):2011-2019. DOI： 10.3788/OPE.20192709.2011.

Xiao-zong SONG, Tong YAO. Effect of nozzle cavity on polishing ability of light coupled colloid jet[J]. Optics and precision engineering, 2019, 27(9): 2011-2019. DOI： 10.3788/OPE.20192709.2011.

摘要

为了实现对工件表面的超精密抛光，建立了紫外光诱导纳米颗粒胶体射流加工系统。对不同型腔结构的两种喷嘴的光耦合纳米颗粒胶体射流抛光的流体动力学特性、抛光工艺、超光滑表面形貌特性进行了研究。首先，根据光-液耦合要求设计了锥柱和余弦光液耦合喷嘴。接着，对所设计的两种光液耦合喷嘴进行了非淹没射流三相流仿真，对比分析了纳米颗粒的流动径迹及流场分布情况。然后，用TiO

纳米颗粒胶体作为抛光液，用两种喷嘴对同一单晶硅工件分别进行了光耦合射流抛光试验。最后，对抛光前后的表面进行了表征及对比分析。结果表明：相同条件下余弦喷嘴获得的流动速度(20.73 m/s)和动压力(2.5 MPa)均高于锥柱喷嘴的流动速度(7.12 m/s)和动压力(0.2 MPa)，纳米颗粒在余弦喷嘴内的平均停留时间(0.005 s)比锥柱喷嘴的平均停留时间(0.023 s)更短。相同参数下余弦喷嘴射流抛光后的工件表面粗糙度(

=0.810 nm，

=0.651 nm)更低。光耦合纳米颗粒胶体射流抛光中利用余弦喷嘴可获得比锥柱喷嘴更低的表面粗糙度。

Abstract

In order to achieve ultra-precision polishing of the workpiece surface

a UV-induced nanoparticle colloid jet processing system was established. The hydrodynamic characteristics

polishing process

and ultra-smooth surface morphology of the UV-induced nanoparticle colloid jet processing of two nozzles with different cavity structures were studied. Firstly

conical and cosine opto-hydraulic coupling nozzles were designed according to the requirements of opto-hydraulic coupling. Then

three-phase flow simulation of non-submerged jet was carried out for two kinds of opto-hydraulic coupling nozzles

and the flow track and flow field distribution of nanoparticles were compared and analyzed. Next

light-coupled colloid jet polishing experiments were carried out on the same single crystal silicon workpiece with two kinds of nozzles using titanium dioxide nanoparticle colloid as polishing fluid. Finally

the surface before and after polishing was characterized and compared. The results show that the flow velocity (20.73 m/s) and dynamic pressure (2.5 MPa) obtained by the cosine nozzle are higher than that of the conical nozzle with flow velocity (7.12 m/s) and dynamic pressure (0.2 MPa). The average residence time of nanoparticles in the cosine nozzle (0.00 5 s) is shorter than that of the conical nozzle (0.023 s). Under the same polishing parameters

the surface roughness (Rq 0.810 nm

Ra 0.651 nm) of the workpiece polished by cosine nozzle is lower than that of the conical nozzle. Using the cosine nozzle in UV-induced nanoparticle colloid jet processing can result in lower surface roughness than with the conical nozzle.

关键词

Keywords

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