圆光栅配合自准直仪测量主轴径向运动误差

娄志峰; 郝秀朋; 刘力; 王晓东

doi:10.3788/OPE.20192709.2053

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圆光栅配合自准直仪测量主轴径向运动误差

微纳技术与精密机械 | 更新时间：2020-08-13

- 圆光栅配合自准直仪测量主轴径向运动误差
- Spindle radial motion error measurement using a circular grating and a autocollimator
- 光学精密工程 2019年27卷第9期页码：2053-2061
- 作者机构：
  
  大连理工大学机械工程学院，辽宁大连 116024
- 作者简介：
  
  [ "娄志峰(1978-)，男，黑龙江肇东人，博士，硕士生导师，1999年、2008年于大连理工大学分别获得学士、博士学位，现为大连理工大学副教授，主要从事机械装备精密测量与微小组件自动装配技术等研究工作。E-mail:louzf@dlut.edu.cn" ]
  [ "郝秀朋(1990-)，男，河北邯郸人，研究生，2016年于河北农业大学获得学士学位，现为大连理工大学机械工程学院研究生，主要从事精密测量方面的研究。E-mail: xphao0909@163.com" ]
- 基金信息：
  
  国家自然科学基金资助项目(U1508211);国家自然科学基金创新研究群体项目(51621064);国家重点研发计划资助项目(2017YFF0204800)
- DOI：10.3788/OPE.20192709.2053
  中图分类号： TG86;TH71
- 收稿日期：2019-03-11，
  
  录用日期：2019-5-4，
  
  纸质出版日期：2019-09-15
- 稿件说明：
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娄志峰, 郝秀朋, 刘力, 等. 圆光栅配合自准直仪测量主轴径向运动误差[J]. 光学精密工程, 2019,27(9):2053-2061.

Zhi-feng LOU, Xiu-peng HAO, Li LIU, et al. Spindle radial motion error measurement using a circular grating and a autocollimator[J]. Optics and precision engineering, 2019, 27(9): 2053-2061.
娄志峰, 郝秀朋, 刘力, 等. 圆光栅配合自准直仪测量主轴径向运动误差[J]. 光学精密工程, 2019,27(9):2053-2061. DOI： 10.3788/OPE.20192709.2053.

Zhi-feng LOU, Xiu-peng HAO, Li LIU, et al. Spindle radial motion error measurement using a circular grating and a autocollimator[J]. Optics and precision engineering, 2019, 27(9): 2053-2061. DOI： 10.3788/OPE.20192709.2053.

摘要

提出一种在线非接触式测量主轴径向回转误差的方法，为验证其准确性，搭建了主轴回转误差测量装置并进行了比对实验。该方法主要由圆光栅、读数头、环形平面镜以及激光自准直仪组成。首先，将圆光栅及环形平面镜安装在主轴上，并在双顶尖装置中将光栅安装偏心误差和平面镜与主轴不垂直误差进行标定。然后，将主轴安装在转台上，双读数头对径安装，自准直仪安装在平面镜下方。在主轴回转过程中，双读数头圆光栅可以测得主轴径向运动误差，自准直仪可以测得主轴径向运动误差方向上的偏摆角误差。最后，根据主轴上一点的径向运动误差及其在此方向上的偏摆角误差便可以计算出主轴轴向各个点的径向回转误差。设计了比对实验，结果表明在主轴径向回转误差为±12

m时，本方法与传统单向法比对残差在1

m以内。本文提出的主轴径向回转误差测量方法可以应用到精密主轴回转类装置中，实现在线检测主轴径向回转误差的目的。此外，该方法无需采用标准球，不受轴表面粗糙度、圆度等的影响。

Abstract

The purpose of this paper is to propose an online noncontact method for measuring the radial rotation error of the spindle and verify the accuracy of the method. This method used a circular grating

two reading heads

an annular plane mirror

and a laser autocollimator. First

the circular grating and annular plane mirror were mounted on the spindle

and the installation error was calibrated in the double center device. Then

the spindle was mounted on the turntable

the double reading head was mounted on the diameter

and the autocollimator was mounted under the flat mirror. During the spindle rotation process

the double reading head could measure the radial motion error of the spindle

and the autocollimator could measure the yaw angle error in the direction of the radial motion error of the spindle. Finally

the radial rotation error of each point of the spindle axis could be calculated according to the radial motion error of one point on the spindle and its yaw angle error in this direction. The results show that within ±12

m spindle radial rotation error measurement range. The residual error of the proposed method compared with the conventional method is within 1

which verifies the accuracy of the method. The proposed spindle radial rotation error measurement method does not need to use standard balls. It is not affected by the surface roughness

roundness

etc.

of the spindle. The measuring device can be embedded into the precision spindle rotary-type device to realize the real-time detection of the spindle radial rotation error.

关键词

Keywords

references

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