小型精密谐波转台角度定位精度标定与补偿

吴斌; 王航; 康杰虎

doi:10.3788/OPE.20192710.2207

您当前的位置：

首页 >

文章列表页 >

小型精密谐波转台角度定位精度标定与补偿

微纳技术与精密机械 | 更新时间：2020-08-13

- 小型精密谐波转台角度定位精度标定与补偿
- Calibration and compensation of small precision harmonic turntable
- 光学精密工程 2019年27卷第10期页码：2207-2214
- 作者机构：
  
  天津大学精密测试技术与仪器国家重点实验室，天津 300072
- 作者简介：
  
  [ "吴斌(1975-)，男，河南通许人，博士，教授，1993年于天津大学分别获得硕士、博士学位，主要从事激光及光电测试技术、视觉测量技术及应用、精密测量技术及仪器等方面的研究。E-mail：wubin@tju.edu.cn" ]
  [ "王航(1994-)，男，辽宁阜新人，硕士研究生，2017年于天津大学获得学士学位，主要从事激光及光电测试技术、视觉引导跟踪及应用等方面研究。E-mail：1065410650@qq.com" ]
  Corresponding author. E-mail:shongdian313@163.com
- 基金信息：
  
  国家自然科学基金资助项目(No.61771336);天津市自然科学基金资助项目(No.18JCZD38600)
- DOI：10.3788/OPE.20192710.2207
  中图分类号： TB922
- 收稿日期：2019-04-03，
  
  录用日期：2019-4-28，
  
  纸质出版日期：2019-10-25
- 稿件说明：
移动端阅览
吴斌, 王航, 康杰虎. 小型精密谐波转台角度定位精度标定与补偿[J]. 光学精密工程, 2019,27(10):2207-2214.

Bin WU, Hang WANG, Jie-hu KANG. Calibration and compensation of small precision harmonic turntable[J]. Optics and precision engineering, 2019, 27(10): 2207-2214.
吴斌, 王航, 康杰虎. 小型精密谐波转台角度定位精度标定与补偿[J]. 光学精密工程, 2019,27(10):2207-2214. DOI： 10.3788/OPE.20192710.2207.

Bin WU, Hang WANG, Jie-hu KANG. Calibration and compensation of small precision harmonic turntable[J]. Optics and precision engineering, 2019, 27(10): 2207-2214. DOI： 10.3788/OPE.20192710.2207.

摘要

为了解决应用于关节型三维激光传感器的小型谐波转台角度定位精度标定的问题，提出了一种基于Renishaw双频激光干涉仪的单自由度小型谐波转台旋转角度测量和补偿方法。首先依据干涉仪角度测量原理和光路调节方法，建立了测量光路系统，分析了回转台装配误差对角度测量精度的影响并进行了有效调整，而后提出了小型谐波转台360°范围角度标定的实验方案，最后通过曲线拟合的方法分析了转台转角误差的测量数据，总结转台转角误差随位置改变的变化规律，并将误差补偿函数嵌入控制器中，对转台的每次运动进行实时有效补偿。实验结果表明：使用该标定补偿方法能够将小型谐波转台的定位精度提高85%以上，补偿后的定位误差小于10″。采用该方法能够对小型谐波转台进行小间隔360°标定，标定后转台满足激光传感器空间精确定位的要求。

Abstract

To solve the problem of angel positioning accuracy calibration of a small harmonic turntable used in a joint-type laser sensor

a method for measuring and compensating the rotation angle of a single-degree-of-freedom small harmonic turntable using a Renishaw dual-frequency laser interferometer was proposed. First

based on the interferometer angle measurement principle and optical path adjustment method

a measurement optical path system was established. Next

the influence of the assembly error of the rotary table on angle measurement accuracy was analyzed

and the rotary table was adjusted effectively. Then

a 360° range angle calibration experimental scheme for a small harmonic turntable was proposed. Finally

the curve fitting method was used to analyze the measurement data of the turning angle error

and the variation law of the turning angle error with the position of the turntable was summarized. The error compensation function was embedded in the controller to compensate the real motion of the turntable in real time. Experimental results show that the positioning error improved the positioning accuracy of the small harmonic turntable by more than 85%

and the positioning error after compensation is less than 10″. This method can be used to calibrate a small harmonic turntable with a small interval of 360°. The rear turntable meets the requirements of the laser sensor for accurately locating targets in space.

关键词

Keywords

references

刘兵, 马勇, 凌四营, 等.基于多齿分度改善高精度齿轮齿距精度[J].机械传动仪器仪表学报, 2010, 34(4):6-9.

LIU B, MA Y, LING S Y, et al .. Improving the precision of high-precision gear pitch based on multi-tooth indexing [J]. Mechanical Transmission , 2010, 34(4): 6-9.(in Chinese)

GRAETZ R J. On-axis Self-calibration of Angle Measurement Errors in Precision Rotary Encoders [D]. Newyork: University of British Columbia, 2011.

金南, 程远增, 孙书鹰.基于磁栅位移传感器的角度测量系统设计[J].电子设计工程, 2017, 25(8):191-193.

JIN N, CHENG Y Z, SUN SH Y. Design of angle measurement system based on magnetic grid displacement sensor [J]. Electronic Design Engineering , 2017, 25(8): 191-193.(in Chinese)

殷侠, 徐健.应用圆感应同步器进行高精度角度测量的方法研究[J].南通航运职业技术学院学报, 2005, 4(4):49-50.

YIN X, XU J. Research on the method of high precision angle measurement using circular induction synchronizer [J]. Journal of Nantong Shipping Vocational and Technical College , 2005, 4(4): 49-50.(in Chinese)

崔勇, 徐岩.精密转台角位移精度的测量方法研究[J].计量与测试技术, 2012, 39(2):1-2.

CUI Y, XU Y. Research on measurement method of angle displacement accuracy of precision turntable [J]. Metrology & Testing Technology , 2012, 39(2): 1-2.(in Chinese)

彭思, 杨向东, 吴聊, 等.高精密转台标定方法研究[J].机械设计与制造, 2012(4):1-3.

PENG S, YANG X D, WU L, et al .. Research on calibration method of high precision turntable [J]. Mechanical Design & Manufacture , 2012(4):1-3.(in Chinese)

白普俊, 薛娜, 刘松涛, 等.基于激光追踪仪的精密转台角度标定方法[J].华南理工大学学报(自然科学版), 2016, 44(1):100-107.

BAI P J, XUE N, LIU S T, et al .. Angle calibration method of precision turntable based on laser tracker [J]. Journal of South China University of Technology(Natural Science Edition) , 2016, 44(1): 100-107.(in Chinese)

李春艳, 陆卫国, 乔琳.快速空间测角系统中偏振棱镜消光比的影响[J].光学精密工程, 2018, 26(4):749-756.

LI CH Y, LU W G, QIAO L. Influence of extinction ratio of polarizing prism in fast space angle measuring system [J]. Opt.Precision Eng., 2018, 26(4): 749-756.(in Chinese)

DONG H, FU Q, ZHAO X, et al .. Practical rotation angle measurement method by monocular vision [J]. Applied Optics , 2015, 54(3):425.

吴易明, 高立民, 陈良益.基于偏振光的精密角度测量及传递技术[J].红外与激光工程, 2008, 37(3):525-529.

WU Y M, GAO L M, CHEN L Y Precision angle measurement and transmission technology based on polarized light [J]. Infrared and Laser Engineering , 2008, 37(3): 525-529.(in Chinese)

王福全, 王珏, 谢志江, 等.精密转台角分度误差补偿[J].光学精密工程, 2017, 25(8):2165-2172.

WANG F Q, WANG Y, XIE ZH J, et al .. Compensation of angular indexing error of precision turntable [J]. Opt.Precision Eng., 2017, 25(8): 2165-2172.(in Chinese)

糜小涛, 高胜英.圆光栅偏心对仿真转台角位置精度的影响[J].长春理工大学学报(自然科学版), 2014(3):9-12.

MI X T, GAO SH Y. Influence of circular grating eccentricity on position accuracy of simulation turntable [J]. Journal of Changchun University of Science and Technology(Natural Science) , 2014(3): 9-12.(in Chinese)

雷尼绍.全新XR20-W系统显著提高回转轴校准的灵活性和便利性[J].航天制造技术, 2011(6):45-45.

RENISHAW. The new XR20-W system significant improves the flexibility and convenience of rotary axis calibration [J]. Aerospace Manufacturing Technology , 2011(6): 45-45.(in Chinese)

浏览量

127

下载量

CSCD

文章被引用时，请邮件提醒。

提交

工具集

关联资源

暂无数据