粘滑式压电驱动平台的复合控制

徐斯强; 朱晓博; 刘品宽

doi:10.3788/OPE.20192712.2571

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粘滑式压电驱动平台的复合控制

微纳技术与精密机械 | 更新时间：2020-07-09

- 粘滑式压电驱动平台的复合控制
- Composite control of piezo-actuated stick-slip devices
- 光学精密工程 2019年27卷第12期页码：2571-2580
- 作者机构：
  
  上海交通大学机械与动力工程学院，上海 200240
- 作者简介：
  
  [ "徐斯强 (1988-)，男，湖北赤壁人，博士研究生，2010年、2013年于武汉科技大学分别获得学士和硕士学位，主要从事柔顺机构建模和控制方面的研究。E-mail：xusiqiang@sjtu.edu.cn" ]
  刘品宽 (1969-)，男，湖北天门人，研究员，博士生导师，2003年于哈尔滨工业大学获得博士学位，主要从事纳米级微定位技术、微操作机器人，电子制造中的高速高精度定位与操纵，以及纳米制造中的精密驱动与控制等方面的研究。E-mail：pkliu@sjtu.edu.cn LIU Pin-kuan, E-mail: pkliu@sjtu.edu.cn
- 基金信息：
  
  国家科技挑战计划资助项目(JCKY2016212A506-0105);国家重大专项(2016ZX04002007)
- DOI：10.3788/OPE.20192712.2571
  中图分类号： TP394.1;TH691.9
- 收稿日期：2019-07-08，
  
  录用日期：2019-8-25，
  
  纸质出版日期：2019-12-25
- 稿件说明：
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徐斯强, 朱晓博, 刘品宽. 粘滑式压电驱动平台的复合控制[J]. 光学精密工程, 2019,27(12):2571-2580.

Si-qiang XU, Xiao-bo ZHU, Pin-kuan LIU. Composite control of piezo-actuated stick-slip devices[J]. Optics and precision engineering, 2019, 27(12): 2571-2580.
徐斯强, 朱晓博, 刘品宽. 粘滑式压电驱动平台的复合控制[J]. 光学精密工程, 2019,27(12):2571-2580. DOI： 10.3788/OPE.20192712.2571.

Si-qiang XU, Xiao-bo ZHU, Pin-kuan LIU. Composite control of piezo-actuated stick-slip devices[J]. Optics and precision engineering, 2019, 27(12): 2571-2580. DOI： 10.3788/OPE.20192712.2571.

摘要

粘滑式压电驱动平台能实现高精度的大行程运动，它由微动台和滑块组成，而微动台的低阻尼振动限制了粘滑式压电驱动平台的运动速度。为了解决这一问题，提出了一种基于主动阻尼的复合控制策略(PI-DPF-FF)。首先，对输入的锯齿波信号进行滤波，使其更平滑。接着，采用时滞位置反馈控制器来主动提高微动台的阻尼，抑制振动。选用跟踪控制器和改进型零相位误差跟踪控制器来减小跟踪误差，提高跟踪带宽。最后，在粘滑式压电驱动平台的样机上对PI-DPF-FF控制器进行了验证。实验结果表明：与常规的比例积分控制器相比，PI-DPF-FF控制器将微动台跟踪带宽由32.7 Hz提高到1 466.5 Hz。当系统输入占空比为0.2和频率为100 Hz的信号时，与常规的前馈控制器相比，PI-DPF-FF控制器将滑块角速度由3.52 mrad/s提高到9.03 mrad/s，平台运动速度有了明显的提高。

Abstract

A piezo-actuated stick-slip device

which consists of a micro-motion stage and a slider

can realize long-range motions with high resolution. Induced mechanical vibrations in the micro-motion stage impose an upper bound on the speed of the piezo-actuated stick-slip device. To address this issue

this study proposes a composite control scheme with active damping. First

the saw-tooth wave signal is filtered and made smoother. Then

a delayed position feedback controller is introduced to improve the damping of the micro-motion stage and mitigate its vibrations. Both tracking and feedforward controllers are designed to reduce the tracking errors and increase the control bandwidth. Finally

the proposed controller is implemented on the prototype of a piezo-actuated stick-slip rotational device. The experimental results show that

compared to a proportional integral controller

the proposed controller improves the control bandwidth from 32.7 to 1 466.5 Hz. In addition

compared to a conventional feedforward controller

the proposed controller under a 100-Hz saw-tooth wave signal with a duty cycle of 0.2 improves the angular velocity of the slider from 3.52 to 9.03 mrad/s. The device angular speed is improved significantly.

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references

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