大行程快速反射镜的结构设计及带宽特性

陈国真; 徐斯强; 刘品宽

doi:10.3788/OPE.20202801.0090

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大行程快速反射镜的结构设计及带宽特性

微纳技术与精密机械 | 更新时间：2020-08-13

- 大行程快速反射镜的结构设计及带宽特性
- Structural design and bandwidth characteristic of a fast steering mirror with large travel range
- 光学精密工程 2020年28卷第1期页码：90-102
- 作者机构：
  
  上海交通大学机械与动力工程学院，上海 200240
- 作者简介：
  
  [ "陈国真(1989-)，男，山东泰安人，博士研究生，2011年于吉林大学获得学士学位，主要从事柔性机构设计和控制方面的研究。E-mail:guozhen8912@163.com" ]
  [ "刘品宽(1969-)，男，湖北天门人，研究员，博士生导师，2003年于哈尔滨工业大学获得博士学位，主要从事纳米级微定位技术、微操作机器人，电子制造中的高速高精度定位与操纵，以及纳米制造中的精密驱动与控制等方向的研究。E-mail: pkliu@sjtu.edu.cn" ]
- 基金信息：
  
  国家科技挑战计划资助项目(JCKY2016212A506-0105);国家重大专项(2016ZX04002007)
- DOI：10.3788/OPE.20202801.0090
  中图分类号： TH74
- 收稿日期：2019-07-08，
  
  录用日期：2019-8-28，
  
  纸质出版日期：2020-01-15
- 稿件说明：
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陈国真, 徐斯强, 刘品宽. 大行程快速反射镜的结构设计及带宽特性[J]. 光学精密工程, 2020,28(1):90-102.

Guo-zhen CHEN, Si-qiang XU, Pin-kuan LIU. Structural design and bandwidth characteristic of a fast steering mirror with large travel range[J]. Optics and precision engineering, 2020, 28(1): 90-102.
陈国真, 徐斯强, 刘品宽. 大行程快速反射镜的结构设计及带宽特性[J]. 光学精密工程, 2020,28(1):90-102. DOI： 10.3788/OPE.20202801.0090.

Guo-zhen CHEN, Si-qiang XU, Pin-kuan LIU. Structural design and bandwidth characteristic of a fast steering mirror with large travel range[J]. Optics and precision engineering, 2020, 28(1): 90-102. DOI： 10.3788/OPE.20202801.0090.

摘要

为了解决音圈电机驱动的快速反射镜在大行程运动中电机动子和定子碰撞的问题，设计了新型的快速反射镜柔性机构，即采用柔性解耦机构来消除电机动子的横向位移。针对快速反射镜在大行程运动中由于力-位移的非线性特性而导致的共振频率随位置而变化的问题，设计了变值陷波滤波器来消除随位置变化而改变的共振模态的影响，并通过比例积分控制器实现闭环控制。与常值陷波滤波器相比，变值陷波滤波器的共振频率为快速反射镜运动位置的函数。通过有限元分析和实验比较了采用常值和变值陷波滤波器时快速反射镜的带宽性能。实验结果表明，采用常值陷波滤波器时，当系统的运动位置小于15.2 mrad时，快速反射镜沿

和

轴的带宽分别在95 Hz和110 Hz左右；当系统运动到18.2 mrad时，

和

轴的带宽分别骤降为47.92 Hz和57.1 Hz。采用变值陷波滤波器时，快速反射镜沿

和

轴的带宽基本稳定在95 Hz和110 Hz，说明了在运动行程较大的快速反射镜系统中设计变值陷波滤波器的必要性和有效性。

Abstract

For a Fast-Steering Mirror (FSM) driven by Voice Coil Motors (VCMs)

the coil of the VCM touches the stator as the FSM achieves a broad range of motion. A novel FSM was developed to prevent the occurrence of undesired contact between the coil and stator. A compliant decoupling mechanism was designed to minimize the transverse displacement of the coil of the VCM. Moreover

for the FSM with a broad range of motion

the force-displacement relationship was nonlinear

which resulted in variable resonant frequencies at different motion positions. We developed a variable notch filter to eliminate the variable resonant modes

and a Proportional-Integral(PI) controller was designed to achieve closed-loop control. Compared to the fixed notch filter

the resonant frequencies of the variable notch filter were a function of the motion positions of the FSM. The bandwidth of the FSM was studied by finite-element analysis and experiments using fixed and variable notch filters. According to the experimental results

as a fixed notch filter was applied

the bandwidth of the FSM varied in different motion positions. When the motion position is less than 15.2 mrad

the bandwidths of the FSM along the

and

axes are approximately 95 Hz and 110 Hz

respectively; when the motion position is 18.2 mrad

the bandwidths of the

and

axes drop to 47.92 Hz and 57.1 Hz

respectively. As a variable notch filter is applied

the bandwidths of the FSM along the

and

axes are stable at 95 Hz and 110 Hz

respectively; this result illustrates the need and effectiveness of applying a variable notch filter in an FSM system with a broad range of motion.

关键词

Keywords

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