基于准布儒斯特角法研究抛光过程中光学材料的表面质量

胡春光; 孙兆阳; 方子璇; 刘军; 张昊; 房丰洲

doi:10.3788/OPE.20202802.0315

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基于准布儒斯特角法研究抛光过程中光学材料的表面质量

现代应用光学 | 更新时间：2020-07-16

- 基于准布儒斯特角法研究抛光过程中光学材料的表面质量
- Study on surface quality of polished optical materials with quasi-Brewster angle method
- 光学精密工程 2020年28卷第2期页码：315-323
- 作者机构：
  
  1.天津大学精密测试技术及仪器国家重点实验室，天津 300072
  2.中国船舶工业系统工程研究院，北京 100094
  3.天津津航技术物理研究所，天津 300380
- 作者简介：
  
  [ "胡春光(1981-)，男，河南光山人，博士，副教授，博士生导师，2002年、2007年于天津大学分别获得学士和博士学位，主要从事微纳测试技术的研究。E-mail: cghu@tju.edu.cn" ]
  [ "孙兆阳(1994-)，男，山东济南人，硕士研究生，2017年于中国石油大学(华东)获得学士学位，主要从事光学精密检测技术的研究。E-mail: szytmm@tju.edu.cn" ]
- 基金信息：
  
  国家重点研发计划资助项目(2016YFB1102203);国家自然科学基金资助项目(61008028)
- DOI：10.3788/OPE.20202802.0315
  中图分类号： TH161.1; TH744
- 收稿日期：2019-08-13，
  
  修回日期：2019-09-23，
  
  录用日期：2019-9-23，
  
  纸质出版日期：2020-02-15
- 稿件说明：
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胡春光, 孙兆阳, 方子璇, 等. 基于准布儒斯特角法研究抛光过程中光学材料的表面质量[J]. 光学精密工程, 2020,28(2):315-323.

Chun-guang HU, Zhao-yang SUN, Zi-xuan FANG, et al. Study on surface quality of polished optical materials with quasi-Brewster angle method[J]. Optics and precision engineering, 2020, 28(2): 315-323.
胡春光, 孙兆阳, 方子璇, 等. 基于准布儒斯特角法研究抛光过程中光学材料的表面质量[J]. 光学精密工程, 2020,28(2):315-323. DOI： 10.3788/OPE.20202802.0315.

Chun-guang HU, Zhao-yang SUN, Zi-xuan FANG, et al. Study on surface quality of polished optical materials with quasi-Brewster angle method[J]. Optics and precision engineering, 2020, 28(2): 315-323. DOI： 10.3788/OPE.20202802.0315.

摘要

光学硬脆材料在机械加工过程中不可避免地形成表面/亚表面损伤，对器件性能、使用寿命等具有至关重要的影响。相较于磨削、研磨两种前道工艺，抛光阶段材料的损伤逐渐减少至极其微量的程度，而最终残留的损伤将伴随材料的使用全周期，研究抛光阶段表面质量的变化过程对掌握抛光的工艺质量十分必要，但测量难度高。针对这一问题，本文在总结抛光阶段损伤形式的基础上，首先仿真分析了准布儒斯特角法检测表面质量的原理和优势，随后以Nd:GGG激光晶体为研究对象，利用椭偏仪对不同抛光工艺下样品表面质量的变化进行了实验研究。通过与白光干涉法测量的表面形貌进行对比，准布儒斯特角偏移量和相位角变化曲线斜率准确地反映了抛光过程中表面质量的变化，展现了该方法的无损伤和高灵敏度特性，以及辅助研究抛光工艺的可行性。最后，对准布儒斯特角法在表面质量检测方面面临的问题进行了分析和展望。

Abstract

Surface damages of optical materials are inevitably introduced during machining processes. These damages heavily degrade the working performance and lifetime of optical materials-based production. Compared to the machining process of grinding

the art of polishing smoothly removes the damage layer of the sample; however

it is often difficult to ensure the complete removal of the damage layer. Therefore

to determinethe sample's surface quality during polishing periods is very necessary despite difficulties in the measurement technique.Here

we analyzed the typical surface structure of a polished sample and studied the measurement principle of the quasi-Brewster angle method. Simulations show the advantages of this approach to characterize the surface quality of a polished optical plate. As a demonstration

Nd:GGG optical plates were polished with different processing time and tested carefully with a spectroscopic ellipsometer.Compared with the surface topography measured by white light interferometry

the quasi-Brewster angle offset and the slope of the phase-angle change curve accurately reflect the changes of surface quality during polishing

indicating that the quasi-Brewster angle method has a high sensitivity to the surface roughness and subsurface damages of the sample. This also implies the possibility of the proposed method in characterizing the changes of the surface quality under polishing progress. Finally

the future development trend of subsurface damage detection technology for polishing process.

关键词

Keywords

references

J L YUAN , B H LYU , W HANG , 等 . Review on the progress of ultra-precision machining technologies . Frontiers of Mechanical Engineering , 2017 . 12 ( 2 ): 158 - 180 .

P BLAINEAU , D ANDRÉ , R LAHEURTE , 等 . Subsurface mechanical damage during bound abrasive grinding of fused silica glass . Applied Surface Science , 2015 . 353 764 - 773 . http://www.wanfangdata.com.cn/details/detail.do?_type=perio&id=d905d60239cccd69c0019282c693dd05 http://www.wanfangdata.com.cn/details/detail.do?_type=perio&id=d905d60239cccd69c0019282c693dd05 .

H R WANG , H F CHEN , G L FU , 等 . Relationship between grinding process and the parameters of subsurface damage based on the image processing . The International Journal of Advanced Manufacturing Technology , 2016 . 83 ( 9/10/11/12 ): 1707 - 1715 . http://www.wanfangdata.com.cn/details/detail.do?_type=perio&id=be7ecb21f131d7d3b875a1223acd7130 http://www.wanfangdata.com.cn/details/detail.do?_type=perio&id=be7ecb21f131d7d3b875a1223acd7130 .

F Z FANG , F F XU . Recent advances in micro/nano-cutting: effect of tool edge and material properties . Nanomanufacturing and Metrology , 2018 . 1 ( 1 ): 4 - 31 .

J F YIN , Q BAI , B ZHANG . Methods for detection of subsurface damage: a review . Chinese Journal of Mechanical Engineering , 2018 . 31 41 .

M FEIT , A RUBENCHIK . Influence of subsurface cracks on laser-induced surface damage . Proceedings of SPIE - the International Society for Optical Engineering , 2004 . 5273 264 - 273 .

J CHENG , M J CHEN , W LIAO , 等 . Influence of surface cracks on laser-induced damage resistance of brittle KH 2 PO 4 crystal . Optics Express , 2014 . 22 ( 23 ): 28740 - 28755 .

X GAO , G Y FENG , L L ZHAI , 等 . Effect of subsurface impurities of fused silica on laser-induced damage probability . Optical Engineering , 2014 . 53 ( 2 ): 026101 http://www.wanfangdata.com.cn/details/detail.do?_type=perio&id=41ade1a096d6407556371eb258865f52 http://www.wanfangdata.com.cn/details/detail.do?_type=perio&id=41ade1a096d6407556371eb258865f52 .

J BUDE , C W CARR , P E MILLER , 等 . Particle damage sources for fused silica optics and their mitigation on high energy laser systems . Optics Express , 2017 . 25 ( 10 ): 11414 - 11435 .

NÉAUPORT J, AMBARD C, BERCEGOL H, et al .. Optimizing fused silica polishing processes for 351 nm high power laser application[C]. Boulder Damage Symposium XL Annual Symposium on Optical Materials for High Power Lasers. Proc SPIE 7132, Laser-Induced Damage in Optical Materials : 2008, Boulder , Colorado , USA , 2008: 71321I.

H Z WU , S G ROBERTS , G MÖBUS , 等 . Subsurface damage analysis by TEM and 3D FIB crack mapping in alumina and alumina/5vol.%SiC nanocomposites . Acta Materialia , 2003 . 51 ( 1 ): 149 - 163 .

朱楠楠 , 朱永伟 , 李军 , 等 . 铌酸锂晶体的研磨亚表面损伤深度 . 光学精密工程 , 2015 . 23 ( 12 ): 3387 - 3394 . http://www.eope.net/CN/abstract/abstract16218.shtml http://www.eope.net/CN/abstract/abstract16218.shtml .

N N ZHU , Y W ZHU , J LI , 等 . Subsurface damage depth of lithium niobate crystal in lapping . Opt. Precision Eng. , 2015 . 23 ( 12 ): 3387 - 3394 . http://www.eope.net/CN/abstract/abstract16218.shtml http://www.eope.net/CN/abstract/abstract16218.shtml .

刘颖 , 刘正坤 , 邱克强 , 等 . 大尺寸熔石英采样光栅的研究进展 . 光学精密工程 , 2016 . 24 ( 12 ): 2896 - 2901 . http://www.eope.net/CN/abstract/abstract16793.shtml http://www.eope.net/CN/abstract/abstract16793.shtml .

Y LIU , ZH K LIU , K Q QIU , 等 . Advances in large-aperture beam sampling gratings . Opt. Precision Eng. , 2016 . 24 ( 12 ): 2896 - 2901 . http://www.eope.net/CN/abstract/abstract16793.shtml http://www.eope.net/CN/abstract/abstract16793.shtml .

J NEAUPORT , C AMBARD , P CORMONT , 等 . Subsurface damage measurement of ground fused silica parts by HF etching techniques . Optics Express , 2009 . 17 ( 22 ): 20448 - 20456 . http://www.wanfangdata.com.cn/details/detail.do?_type=perio&id=Open J-Gate000002228983 http://www.wanfangdata.com.cn/details/detail.do?_type=perio&id=Open J-Gate000002228983 .

B BERTUSSI , P CORMONT , S PALMIER , 等 . Initiation of laser induced damage sites in fused silica optical components . Optics Express , 2009 . 17 ( 14 ): 11469 - 11479 . http://d.old.wanfangdata.com.cn/NSTLQK/10.1364-OE.17.011469/ http://d.old.wanfangdata.com.cn/NSTLQK/10.1364-OE.17.011469/ .

X P WU , W R GAO , Y HE , 等 . Quantitative measurement of subsurface damage with self-referenced spectral domain optical coherence tomography . Optical Materials Express , 2017 . 7 ( 11 ): 3919 - 3933 .

C J EVANS , E PAUL , D DORNFELD , 等 . Material removal mechanisms in lapping and polishing . CIRP Annals , 2003 . 52 ( 2 ): 611 - 633 . http://www.wanfangdata.com.cn/details/detail.do?_type=perio&id=545bbd0e3b32b9d4d3f509e3d4b8f417 http://www.wanfangdata.com.cn/details/detail.do?_type=perio&id=545bbd0e3b32b9d4d3f509e3d4b8f417 .

R K PAL , H GARG , V KARAR . Material removal characteristics of full aperture optical polishing process . Machining Science and Technology , 2017 . 21 ( 4 ): 493 - 525 . http://www.wanfangdata.com.cn/details/detail.do?_type=perio&id=10.1080/10910344.2017.1336626 http://www.wanfangdata.com.cn/details/detail.do?_type=perio&id=10.1080/10910344.2017.1336626 .

W L LIAO , Y F DAI , Z Z LIU , 等 . Detailed subsurface damage measurement and efficient damage-free fabrication of fused silica optics assisted by ion beam sputtering . Optics Express , 2016 . 24 ( 4 ): 4247 - 4257 .

J WANG , R L MAIER . Surface assessment of CaF 2 deep-ultraviolet and vacuum-ultraviolet optical components by the quasi-Brewster angle technique . Applied Optics , 2006 . 45 ( 22 ): 5621 - 5628 . http://www.wanfangdata.com.cn/details/detail.do?_type=perio&id=3ee5e45d72e07cb65ec22e955acbd51b http://www.wanfangdata.com.cn/details/detail.do?_type=perio&id=3ee5e45d72e07cb65ec22e955acbd51b .

B MA , Z X SHEN , P F HE , 等 . Subsurface quality of polished SiO 2 surface evaluated by quasi-Brewster angle technique . Optik , 2011 . 122 ( 16 ): 1418 - 1422 . http://www.wanfangdata.com.cn/details/detail.do?_type=perio&id=4b4f6ce695d71ef0a8ae405a5150dc5e http://www.wanfangdata.com.cn/details/detail.do?_type=perio&id=4b4f6ce695d71ef0a8ae405a5150dc5e .

F ELFALLAGH , B J INKSON . 3D analysis of crack morphologies in silicate glass using FIB tomography . Journal of the European Ceramic Society , 2009 . 29 ( 1 ): 47 - 52 . http://www.wanfangdata.com.cn/details/detail.do?_type=perio&id=39cfc486461312251f6fbc4ea166e9bf http://www.wanfangdata.com.cn/details/detail.do?_type=perio&id=39cfc486461312251f6fbc4ea166e9bf .

H Z WU , S G ROBERTS , G MÖBUS , 等 . Subsurface damage analysis by TEM and 3D FIB crack mapping in alumina and alumina/5vol.% SiC nanocomposites . Acta Materialia , 2003 . 51 ( 1 ): 149 - 163 .

MENAPACE J A, DAVIS P J, STEELE W A, et al .. MRF applications: measurement of process-dependent subsurface damage in optical materials using the MRF wedge technique[C]. Laser-Induced Damage in Optical Materials : 2005. International Society for Optics and Photonics , 2006, 5991: 599103.

J F YIN , Q BAI , B ZHANG . Methods for detection of subsurface damage: a review . Chinese Journal of Mechanical Engineering , 2018 . 31 41 http://d.old.wanfangdata.com.cn/Periodical/jxgcxb-e201803002 http://d.old.wanfangdata.com.cn/Periodical/jxgcxb-e201803002 .

Y LEE . Evaluating subsurface damage in optical glasses . Journal of the European Optical Society Rapid Publications , 2011 . 6 11001 http://www.wanfangdata.com.cn/details/detail.do?_type=perio&id=Open J-Gate000000887128 http://www.wanfangdata.com.cn/details/detail.do?_type=perio&id=Open J-Gate000000887128 .

WANG J, MAIER R L, BRUNING J H. Surface characterization of optically polished CaF 2 crystal by quasi-Brewster-angle technique[C]. Optical Science and Technology , SPIE's 48 th Annual Meeting. Proc SPIE 5188, Advanced Characterization Techniques for Optics , Semiconductors , and Nanotechnologies , San Diego , California , USA , 2003: 106-114.

J WANG , S VANKERKHOVE , H SCHREIBER . Evaluation of coated and uncoated CaF 2 optics by variable angle spectroscopic ellipsometry . Thin Solid Films , 2011 . 519 ( 9 ): 2881 - 2884 .

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