惯性约束聚变靶丸高精度X射线数字成像

王琦; 高党忠; 马小军; 徐春; 朱溢佞; 姜凯; 张园成; 杨诗棣

doi:10.3788/OPE.20202802.0324

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惯性约束聚变靶丸高精度X射线数字成像

现代应用光学 | 更新时间：2020-07-16

- 惯性约束聚变靶丸高精度X射线数字成像
- High precision X-ray digital imaging of inertial confinement fusion capsules
- 光学精密工程 2020年28卷第2期页码：324-333
- 作者机构：
  
  1.中国工程物理研究院激光聚变研究中心，四川绵阳 621900；
  2.天津三英精密仪器股份有限公司，天津 300399；
  3.首都师范大学数学科学学院，北京 100048
- 作者简介：
  
  [ "王琦(1987-)，男，吉林洮南人，博士，助理研究员，2014年于中国科学技术大学获得博士学位，主要从事ICF靶参数测量方面的研究。E-mail:wangqi_caep@163.com" ]
  马小军(1979-)，男，四川南部人，副研究员，2003年于西安电子科技大学获得学士学位，2013年于同济大学获得硕士学位，2017年于复旦大学获得博士学位，主要从事ICF靶参数精密检测技术的研究。E-mail：maxj802@163.com MA Xiao-jun, E-mail：maxj802@163.com
- 基金信息：
  
  科学挑战专题(TZ2018006-0204-01);中国工程物理研究院超精密加工技术重点实验室基金资助项目(ZD17003)
- DOI：10.3788/OPE.20202802.0324
  中图分类号： O434.12
- 收稿日期：2019-08-19，
  
  修回日期：2019-09-17，
  
  录用日期：2019-9-17，
  
  纸质出版日期：2020-02-15
- 稿件说明：
移动端阅览
王琦, 高党忠, 马小军, 等. 惯性约束聚变靶丸高精度X射线数字成像[J]. 光学精密工程, 2020,28(2):324-333.

Qi WANG, Dang-zhong GAO, Xiao-jun MA, et al. High precision X-ray digital imaging of inertial confinement fusion capsules[J]. Optics and precision engineering, 2020, 28(2): 324-333.
王琦, 高党忠, 马小军, 等. 惯性约束聚变靶丸高精度X射线数字成像[J]. 光学精密工程, 2020,28(2):324-333. DOI： 10.3788/OPE.20202802.0324.

Qi WANG, Dang-zhong GAO, Xiao-jun MA, et al. High precision X-ray digital imaging of inertial confinement fusion capsules[J]. Optics and precision engineering, 2020, 28(2): 324-333. DOI： 10.3788/OPE.20202802.0324.

摘要

为了实现惯性约束聚变(ICF)靶丸几何尺寸的高精度、高效率检测，开展了靶丸X射线数字化成像系统的设计与研制。首先，分析了X射线直接投影成像和X射线透镜耦合显微成像的适用范围，根据ICF靶丸尺寸小、吸收衬度弱的特点，确定了基于X射线透镜耦合显微成像的技术路线。然后，分析了影响系统成像分辨率、图像衬度和测量效率的关键因素，确定了低几何放大成像，低电压、小焦点、高功率X射线源及高分辨CCD探测的总体技术方案，该方案能够有效抑制相衬效应和半影误差，解决了现有X射线数字成像设备测量靶丸时边缘扩展严重、尺寸测量误差大的问题。最后，对系统的性能进行了分析测试，实验结果表明，系统成像衬度良好，成像效率较高，分辨率优于0.5 μm。靶丸几何尺寸的测量不确定度可达0.9 μm(

=2)，满足ICF靶丸几何尺寸高精度、高效率的检测需求。

Abstract

To realize high-precision and high-efficiency measurements of the geometric dimensions of inertial confinement fusion (ICF) capsules

an X-ray digital imaging system applied to characterize the geometric dimensions of capsules was designed and developed. First

the X-ray direct-projection imaging and X-ray lens coupled microimaging were theoretically analyzed and a technical approach based on X-ray lens coupled microimaging was chosen due to its small size and the weak-absorption contrast of ICF capsules. Then

the key factors affecting the imaging resolution

image contrast

and measurement efficiency of the system were analyzed. A technical scheme of low geometric magnification imaging

a low voltage X-ray source

a small focus

and high power and high-resolution charge-coupled device (CCD) detection was determined. Utilizing this scheme

the phase-contrast effect and penumbra error can be suppressed effectively and the problems of serious edge expansion and large measurement error

which exist in X-ray digital imaging equipment used to measure the capsules

can be solved. Finally

the system performances were tested and the experimental results illustrate that the system has an excellent imaging contrast

high efficiency

and high resolution better than 0.5 μm. The measurement uncertainty of the geometric dimensions of ICF capsules is approximately 0.9 μm (

=2)

meeting the high-precision and high-efficiency measurement needs of ICF capsules.

关键词

Keywords

references

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