基于导通角调节的双足式尺蠖电机驱动

赵勃; 史维佳; 王丙泉; 亓雪; 谭久彬

doi:10.3788/OPE.20202802.0363

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基于导通角调节的双足式尺蠖电机驱动

微纳技术与精密机械 | 更新时间：2020-07-16

- 基于导通角调节的双足式尺蠖电机驱动
- Driving method of V-shaped biped inchworm motor based on conduction angle regulation
- 光学精密工程 2020年28卷第2期页码：363-371
- 作者机构：
  
  1.哈尔滨工业大学超精密光电仪器工程研究所, 黑龙江哈尔滨 150080
  2.超精密仪器技术及智能化工业和信息化部重点实验室(哈尔滨工业大学), 黑龙江哈尔滨 150080
- 作者简介：
  
  [ "赵勃(1982-)，男，黑龙江哈尔滨人，副教授，博士生导师，2004年、2006年和2011年于哈尔滨工业大学分别获得学士、硕士和博士学位，主要从事隔微振技术、压电驱动技术等方面的研究。E-mail：hitzhaobo@hit.edu.cn" ]
  史维佳(1986-)，男，吉林公主岭人，讲师，博士，2009年于西北工业大学获得学士学位，2011年和2017年于哈尔滨工业大学分别获得硕士和博士学位，主要从事压电驱动与控制方面的研究。E-mail: shiweijia@hit.edu.cn SHI Wei-jia, E-mail: shiweijia@hit.edu.cn
- 基金信息：
  
  国家重点研发计划重大科学仪器设备开发专项课题(2018YFF01012003);中国博士后科学基金资助项目(2018M640294)
- DOI：10.3788/OPE.20202802.0363
  中图分类号： TM383.6;TP273
- 收稿日期：2019-08-13，
  
  修回日期：2019-11-21，
  
  录用日期：2019-11-21，
  
  纸质出版日期：2020-02-25
- 稿件说明：
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赵勃, 史维佳, 王丙泉, 等. 基于导通角调节的双足式尺蠖电机驱动[J]. 光学精密工程, 2020,28(2):363-371.

Bo ZHAO, Wei-jia SHI, Bing-quan WANG, et al. Driving method of V-shaped biped inchworm motor based on conduction angle regulation[J]. Optics and precision engineering, 2020, 28(2): 363-371.
赵勃, 史维佳, 王丙泉, 等. 基于导通角调节的双足式尺蠖电机驱动[J]. 光学精密工程, 2020,28(2):363-371. DOI： 10.3788/OPE.20202802.0363.

Bo ZHAO, Wei-jia SHI, Bing-quan WANG, et al. Driving method of V-shaped biped inchworm motor based on conduction angle regulation[J]. Optics and precision engineering, 2020, 28(2): 363-371. DOI： 10.3788/OPE.20202802.0363.

摘要

为了解决尺蠖电机难以兼顾高速和高精度的问题，提出一种基于导通角调节的驱动方法，对V形双足式尺蠖电机的机电耦合模型、驱动方法和运动机理等进行了研究。根据设计的V形双足式尺蠖电机结构建立其机电耦合模型，基于导通角调节确定尺蠖电机驱动方法。分析V形双足式尺蠖电机运动机理，并搭建实验平台进行实验验证。实验结果表明：在一定允许误差的范围内，实验结果与理论推导相符，验证了驱动方法的合理性与可行性。引入导通角，最小步距由500 nm降低到330 nm，降低了34%；通过同时调节频率

和导通角

，可使电机具备0.5 mm/s的最大驱动速度和330 nm的最小步距的能力。引入变量导通角

，成功实现了电机步距和驱动速度的独立调节。

Abstract

To solve the balancing problems of high speed and high precision

a drive method based on conduction angle adjustment was proposed. The electromechanical coupling model

drive method

and motion mechanism of a V-shaped double-foot-worm motor were studied. Firstly

the electromechanical coupling model of a V-shaped biped inchworm motor was established according to the designed structure of the V-shaped biped inchworm motor. Then

the driving method based on the conduction angle adjustment was determined. Then

the motion mechanism of the V-shaped biped inchworm motor was analyzed. Finally

an experimental platform was built for experimental verification. The experimental results adequately agree with the theoretical derivation within a certain allowable error range

verifying the rationality and feasibility of the driving method. With the introduction of the conduction angle

the minimum step distance is reduced from 500 nm to 300 nm

a reduction of approximately 34%. By adjusting the frequency f and the conduction angle concurrently

the motor achieves a driving speed of 0.5 mm/s and a 330 nm positioning accuracy at the same time. By introducing a variable conduction angle

the motor step distance is successfully realized and the driving speed is adjusted independently.

关键词

Keywords

references

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