研磨压力对固结聚集体磨料垫自修正影响

牛凤丽; 朱永伟; 沈功明; 王子琨; 王科荣

doi:10.3788/OPE.20202802.0372

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研磨压力对固结聚集体磨料垫自修正影响

微纳技术与精密机械 | 更新时间：2020-07-16

- 研磨压力对固结聚集体磨料垫自修正影响
- Effect of lapping load on self-conditioning performance of fixed agglomerated abrasive pad
- 光学精密工程 2020年28卷第2期页码：372-381
- 作者机构：
  
  南京航空航天大学机电学院江苏省精密与微细制造技术重点实验室，江苏南京 210016
- 作者简介：
  
  [ "牛凤丽 (1990-)，女，山东菏泽人，博士研究生，2013年于青岛工学院获得学士学位，2016年于辽宁科技大学获得硕士学位，主要从事精密超精密加工的研究。E-mail: niufengli123@163.com" ]
  朱永伟 (1967-)，男，浙江平湖人，教授，博士生导师，1988年于中南大学获得学士学位，1991年于长沙矿冶研究院获得硕士学位，2002年于中南大学获得博士学位，主要从事纳米材料的制备与应用、精密超精密加工、表面工程等方面的研究。E-mail: meeywzhu@nuaa.edu.cn ZHU Yong-wei, E-mail: meeywzhu@nuaa.edu.cn
- 基金信息：
  
  国家自然科学基金资助项目(51675276)
- DOI：10.3788/OPE.20202802.0372
  中图分类号： TG73; TG74
- 收稿日期：2019-08-08，
  
  修回日期：2019-10-08，
  
  录用日期：2019-10-8，
  
  纸质出版日期：2020-02-25
- 稿件说明：
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牛凤丽, 朱永伟, 沈功明, 等. 研磨压力对固结聚集体磨料垫自修正影响[J]. 光学精密工程, 2020,28(2):372-381.

Feng-li NIU, Yong-wei ZHU, Gong-ming SHEN, et al. Effect of lapping load on self-conditioning performance of fixed agglomerated abrasive pad[J]. Optics and precision engineering, 2020, 28(2): 372-381.
牛凤丽, 朱永伟, 沈功明, 等. 研磨压力对固结聚集体磨料垫自修正影响[J]. 光学精密工程, 2020,28(2):372-381. DOI： 10.3788/OPE.20202802.0372.

Feng-li NIU, Yong-wei ZHU, Gong-ming SHEN, et al. Effect of lapping load on self-conditioning performance of fixed agglomerated abrasive pad[J]. Optics and precision engineering, 2020, 28(2): 372-381. DOI： 10.3788/OPE.20202802.0372.

摘要

固结磨料研磨过程中磨料的微破碎是实现固结磨料垫自修正特性的主要途径，研磨压力是影响磨粒微破碎的关键参数。选用单晶金刚石和聚集体金刚石作为磨粒制备固结磨料垫，在15 kPa压力下以石英玻璃为加工对象进行研磨实验，比较两者的材料去除率及加工稳定性；制备了4种陶瓷结合剂含量的聚集体金刚石，并制备成固结聚集体金刚石磨料垫，探索了不同压力下的固结聚集体金刚石磨料垫的自修正性能；分析了研磨后的工件表面粗糙度和表面微观形貌。结果表明：采用固结聚集体金刚石磨料垫，研磨后工件表面粗糙度低，去除效率稳定；在15~21 kPa的压力下，结合剂含量次高的聚集体金刚石研磨效率高，材料去除率达到8.94~12.43 μm/min，加工性能较稳定，研磨后的工件表面粗糙度

a在60 nm左右；在3.5~7 kPa压力下，结合剂含量次低的聚集体金刚石研磨性能较稳定，材料去除率在2.67~3.12 μm/min，研磨后的表面粗糙度

a在40 nm左右。高结合剂含量的聚集体金刚石磨粒更适合高研磨压力条件，而低结合剂的聚集体金刚石磨粒更适合于低研磨压力。

Abstract

During the process of fixed abrasive (FA) lapping

the micro-fracture of abrasives is the main approach to realize the self-conditioning process of the FA pad; the lapping load is one of the key parameters that affects it.The FA pads were prepared by using single diamond (SD) and agglomerated diamond (AD) abrasives. Marathon lapping tests were carried out

using quartz glass as the workpiece under a lapping load of 15 kPa. The material removal rate (MRR) and machining stability of the two FA pads were comparedtogether. Four kinds of AD abrasives with different concentrations of the ceramic binder were prepared and chosen as the abrasives to prepare the corresponding fixed AD abrasive (FADA)pads; their self-conditioning performance was evaluated under different lapping loads. The surface roughness(

a) and morphology of the lapped quartz glass were observed. The results show that: the

a of quartz glass lapped using the FADA pad is lower than of that lapped using fixed SD abrasive(FSDA) pad and that the former has a greater machining stability. Under a higher lapping load of 15-21 kPa

the FADA pad with the second highest ceramic binder concentration has the highest lapping efficiency; its MRR is 8.94-12.43 μm/min and

a is approximately 60 nm. Under a lower load of 3.5-7 kPa

the FADA pad with the second lowest ceramic binder concentration is the most stable; its MRR is 2.67-3.12 μm/min; the

a is approximately 40 nm. AD abrasive with a high ceramic binder concentration is more suitable as the abrasive for a FA pad in high-load applications

while that with a low concentration is more suitable for low-load applications.

关键词

Keywords

references

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