压电精密驱动柔性微夹钳设计

吴志刚; 陈敏

doi:10.3788/OPE.20202802.0398

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压电精密驱动柔性微夹钳设计

微纳技术与精密机械 | 更新时间：2020-07-16

- 压电精密驱动柔性微夹钳设计
- Design of flexure micro-gripper precision-driven by piezoceramics
- 光学精密工程 2020年28卷第2期页码：398-404
- 作者机构：
  
  江西理工大学能源与机械工程学院，江西南昌 330013
- 作者简介：
  
  [ "吴志刚(1985-)，男，江西南昌人，博士，讲师，2013年于天津理工大学获得硕士学位，2017年于澳门大学获得博士学位，主要从事柔性机器人及自动控制方面的研究。E-mail: wzgang2017@163.com" ]
  [ "陈敏 (1971-)，男，江西赣州人，副教授，1991年于江西理工大学获得学士学位，2000年于南昌大学获得硕士学位，主要从事移动机器人及算法研究。E-mail: 466794311@qq.com" ]
- 基金信息：
  
  江西省教育厅科学研究项目资助(GJJ170568)
- DOI：10.3788/OPE.20202802.0398
  中图分类号： TP241.3; TH361
- 收稿日期：2019-06-14，
  
  修回日期：2019-08-08，
  
  录用日期：2019-8-8，
  
  纸质出版日期：2020-02-25
- 稿件说明：
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吴志刚, 陈敏. 压电精密驱动柔性微夹钳设计[J]. 光学精密工程, 2020,28(2):398-404.

Zhi-gang WU, Min CHEN. Design of flexure micro-gripper precision-driven by piezoceramics[J]. Optics and precision engineering, 2020, 28(2): 398-404.
吴志刚, 陈敏. 压电精密驱动柔性微夹钳设计[J]. 光学精密工程, 2020,28(2):398-404. DOI： 10.3788/OPE.20202802.0398.

Zhi-gang WU, Min CHEN. Design of flexure micro-gripper precision-driven by piezoceramics[J]. Optics and precision engineering, 2020, 28(2): 398-404. DOI： 10.3788/OPE.20202802.0398.

摘要

为了实现对微纳尺度下物件的精密夹持，建立了柔性微夹钳系统。并对该系统柔性夹钳设计、运动学、动力学和控制方法等进行研究。首先，利用柔性铰链设计方法设计了柔性微夹钳，利用伪刚体法建立了机械的伪刚体模型。接着，以伪刚体模型法建立了系统的运动学模型，即机械放大比和输入刚度等数学模型。然后，利用拉格朗日方法建立了系统的动力学方程，得出系统的自然振动频率。最后，通过ANSYS有限元方法对系统建立的模型进行了仿真分析和验证，此外，利用PID控制算法对微夹钳系统进行实验控制。实验结果表明：跟踪控制结果误差为2.4%；放大比为9.12倍。基本满足微纳尺度下的微夹持工作，其工作精度可达微米级别甚至纳米级别，符合设计要求。

Abstract

A flexible micro-gripper system was developed to realize the precision clamping of micro-or Nano-sized objects. The design

kinematics

dynamics

and control methods of the flexible micro-gripper were studied. First

a flexible micro-gripper was designed by using a flexure hinge design method

and a Pseudo Rigid Body (PRB) model was established by using a PRB method. Moreover

the kinematic models of the system

for example

the mechanical amplification ratio and input stiffness

were established using the PRB model. Furthermore

the dynamic equation of the system was established by the Lagrange method

and the natural vibration frequencies of the system were obtained. Finally

the ANSYS finite element method was used to simulate and verify the model of the system. Additionally

a PID control algorithm was used to control the micro-gripping system. The experimental results show that the tracking control error is 2.4%

and the magnification ratio is 9.12. The system performs the micro-clamping function on the micro-or Nano-scale

and its total precision can reach the micron level or Nano-level. The micro-gripper meets the design requirements in several studies.

关键词

Keywords

references

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