三光束激光干涉诱导向后转移制备金纳米结构及其SERS特性

蒋旭珂; 曹亮; 刘日; 王作斌

doi:10.3788/OPE.20202802.0405

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三光束激光干涉诱导向后转移制备金纳米结构及其SERS特性

微纳技术与精密机械 | 更新时间：2020-07-16

- 三光束激光干涉诱导向后转移制备金纳米结构及其SERS特性
- Fabrication and SERS of Au nanostructures by three beams laser-interference-induced backward transfer technique
- 光学精密工程 2020年28卷第2期页码：405-414
- 作者机构：
  
  长春理工大学国家纳米操纵与制造国际联合研究中心，吉林长春 130022
- 作者简介：
  
  [ "蒋旭珂(1993-)，男，云南大理人，硕士研究生，主要研究方向激光干涉诱导向后转移及其应用。Email:xukejack@163.com" ]
- 基金信息：
  
  国家重点研发计划资助项目(2018YFB105400);欧盟地平线框架协议资助项目(644971);高等学校学科创新引智计划资助项目(D17017);吉林省科技发展计划资助项目(20180414002GH);吉林省科技发展计划资助项目(20180414081GH);吉林省科技发展计划资助项目(20180520203JH);吉林省科技发展计划资助项目(20190702002GH);长春理工大学青年基金资助项目(XJJLG-2017-14)
- DOI：10.3788/OPE.20202802.0405
  中图分类号： O436.1
- 收稿日期：2019-03-04，
  
  修回日期：2019-04-28，
  
  录用日期：2019-4-28，
  
  纸质出版日期：2020-02-25
- 稿件说明：
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蒋旭珂, 曹亮, 刘日, 等. 三光束激光干涉诱导向后转移制备金纳米结构及其SERS特性[J]. 光学精密工程, 2020,28(2):405-414.

Xu-ke JIANG, Liang CAO, Ri LIU, et al. Fabrication and SERS of Au nanostructures by three beams laser-interference-induced backward transfer technique[J]. Optics and precision engineering, 2020, 28(2): 405-414.
蒋旭珂, 曹亮, 刘日, 等. 三光束激光干涉诱导向后转移制备金纳米结构及其SERS特性[J]. 光学精密工程, 2020,28(2):405-414. DOI： 10.3788/OPE.20202802.0405.

Xu-ke JIANG, Liang CAO, Ri LIU, et al. Fabrication and SERS of Au nanostructures by three beams laser-interference-induced backward transfer technique[J]. Optics and precision engineering, 2020, 28(2): 405-414. DOI： 10.3788/OPE.20202802.0405.

摘要

为了提高激光诱导向后转移制备微纳阵列结构的效率，本文提出三光束激光干涉诱导向后转移(LIIBT)技术，为激光干涉技术与激光诱导向后转移的有机结合。本文以ITO玻璃为接收衬底，金薄膜为靶材，LIIBT过程中采用三光束激光干涉进行加工。SEM结果表明，在激光能量密度为25 mJ/cm

，金膜厚度为50 nm条件下，获得了较好的阵列结构，周期为5 μm，金纳米粒子均匀分布在其表面，尺寸小于100 nm的粒子达到80%以上。EDX分析结果表明微米尺度点阵由大量的In元素组成，该结构的形成源于激光与ITO层相互作用。将1.0×10

-5

，1.0×10

-7

和1.0×10

-9

M的罗丹明6G溶液，旋涂于微结构表面并进行拉曼光谱研究，在612 cm

-1

，773 cm

-1

，1 190 cm

-1

，1 319 cm

-1

和1 511 cm

-1

处发现了罗丹明6G的特征峰，说明制备的金纳米结构对微量的罗丹明6G有明显的SERS效应。本文提出的LIIBT技术将大大提高激光诱导向后转移制备微纳阵列结构的效率，在超灵敏检测、光电子器件、微流控等领域均具有广泛的应用前景。

Abstract

In order to improve the fabricating efficiency ofn micro-and nano-structures by laser-induced backward transfer technology

a three-beams laser-interference-induced backward transfer (LIIBT) method was established to fabricate micro-nano structure arrays

which was based on laser interference and laser-induced backward transfer technology. In this article

Indium Tin Oxide (ITO) glass was used as a substrate to receive an Au nanoparticles jet from Au thin film. The LIIBT was carried out by three-beams laser interference. The Scanning Electron Microscopy(SEM) images indicate that the a perfect 5-μm period structure could be fabricated under the laser fluence of 25 mJ/cm

for the Au 50 nm thin film 50 nm. Meanwhile

uniform distribution of the Au nanoparticles could be observed on the surface of the period structures

and the over 80% of Au nanoparticles over 80% were smaller than 100 nm. The Energy-Dispersive X-ray spectroscopy (EDX) analysis shows that the microscale period structures were composed of a lot of Inand Au elements

which prove validates the fabrication of theisemicroscale period structures due to the laser pulse ablation on the ITO layer

and then

Au nanoparticles were deposited on it

simultaneously. Finally

the SERS was studied by the Raman spectrum for the Au nanostructures after coating them with 1.0×10

-5

1.0×10

-7

and 1.0×10

-9

M rho damine 6G. The results show that these peaks are located at 612 cm

-1

773 cm

-1

1 190 cm

-1

1 319 cm

-1

and 1 511 cm

-1

which indicate that the Au nanostructures had obvious SERS effect for the trace of the R6G. The LIIBT will be used to improve the efficiency of the laser-induced backward transfer technique on the micro and nanostructure. This technique

which will have the potential applications for the ultra-sensitive detection

optoelectronic devices

and microfluidic flow control systems.

关键词

Keywords

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