双测头复合型微纳米测量仪的研制

吴俊杰; 刘俭; 魏佳斯; 傅云霞

doi:10.3788/OPE.20202802.0415

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双测头复合型微纳米测量仪的研制

微纳技术与精密机械 | 更新时间：2020-07-16

- 双测头复合型微纳米测量仪的研制
- Development of double probe composite micro-and nano measuring instrument
- 光学精密工程 2020年28卷第2期页码：415-423
- 作者机构：
  
  1.上海市计量测试技术研究院机械与制造计量技术研究所, 上海 201203
  2.哈尔滨工业大学仪器科学与工程学院, 黑龙江哈尔滨 150001
- 作者简介：
  
  [ "吴俊杰(1989-)，男，浙江金华人，博士，2011年、2014年分别于中国计量大学获得学士、硕士学位，2018年于上海交通大学获得博士学位，现为上海市计量测试技术研究院与哈尔滨工业大学联合培养博士后。主要从事微纳米测量及仪器开发方面的研究。E-mail:wujunjie@simt.com.cn" ]
- 基金信息：
  
  上海市市场监督管理局科技项目资助(2019-02);上海市青年科技英才扬帆计划资助项目(19YF1441700);上海市质量技术监督局科研项目资助(2018-06);国家重大科学仪器设备开发专项资助项目(2014YQ090709)
- DOI：10.3788/OPE.20202802.0415
  中图分类号： TH711
- 收稿日期：2019-07-26，
  
  修回日期：2019-09-21，
  
  录用日期：2019-9-21，
  
  纸质出版日期：2020-02-25
- 稿件说明：
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吴俊杰, 刘俭, 魏佳斯, 等. 双测头复合型微纳米测量仪的研制[J]. 光学精密工程, 2020,28(2):415-423.

Jun-jie WU, Jian LIU, Jia-si WEI, et al. Development of double probe composite micro-and nano measuring instrument[J]. Optics and precision engineering, 2020, 28(2): 415-423.
吴俊杰, 刘俭, 魏佳斯, 等. 双测头复合型微纳米测量仪的研制[J]. 光学精密工程, 2020,28(2):415-423. DOI： 10.3788/OPE.20202802.0415.

Jun-jie WU, Jian LIU, Jia-si WEI, et al. Development of double probe composite micro-and nano measuring instrument[J]. Optics and precision engineering, 2020, 28(2): 415-423. DOI： 10.3788/OPE.20202802.0415.

摘要

针对当前微纳米测量中存在的大范围高精度测量及复杂微结构几何参数表征难题，基于多测头传感和精密定位平台复用技术，开发了一台具有多种测量尺度和测量模式的复合型微纳米测量仪。为使其具备大范围快速扫描测量和小范围精细测量功能，仪器集成了白光干涉和原子力显微镜两种测头，通过设计适用于两种测头集成的桥架结构及宏/微两级驱动定位平台，实现整机的开发。为保证仪器测量结果的准确性和溯源性，利用标准样板对开发完成的仪器进行了校准。仪器搭载的白光干涉测头可以达到横向500 nm，纵向1 nm的分辨力；原子力显微镜测头横向和纵向分辨力均可达到1 nm。最后，利用目标仪器对微球样品进行了测量，通过大范围成像和小范围精细扫描，获得了微球的表面特征，验证了仪器对复杂微结构的测量能力。

Abstract

To solve the problems of large-scale and high-precision measurement as well as geometrical parameter characterization of complex microstructures

a composite micro-and nano-measuring instrument was developed based on multi-probe sensing and precise positioning platform multiplexing technology. To realize high-speed scans of a large area and fine measurement of a small area

a White Light Interference(WLI) microscope and an Atomic Force Microscope (AFM) were integrated into the bridge structure of the instrument.A macro/micro-driving platform was designed and tested to meet the positioning range and accuracy requirements. The instrument could work on in a contact or noncontact mode.Furthermore

different geometrical parameters could be characterized by the instrument. The instrument was calibrated using a nano dimensional standard to ensure accuracy and traceability. The WLI resolution of the instrument can reach 500 nm in the lateral direction and 1 nm in the vertical direction. The AFM resolution is better than 1 nm in both the lateral and vertical directions. Lastly

a micro ball was measured and its surface geometrical characteristics were obtained by large-range imaging and small-range fine scanning. Thus

the instrumental capability was verified.

关键词

Keywords

references

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