全视场外差短相干形貌测量技术

吕彤; 张文喜; 吕笑宇; 李杨; 伍洲; 孔新新

doi:10.3788/OPE.20202804.0800

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全视场外差短相干形貌测量技术

现代应用光学 | 更新时间：2020-08-13

- 全视场外差短相干形貌测量技术
- Full-field heterodyne short coherent topography measurement technology
- 光学精密工程 2020年28卷第4期页码：800-807
- 作者机构：
  
  1.中国科学院光电研究院计算光学成像技术重点实验室，北京 100094
  2.中国科学院大学光电学院，北京 100094
- 作者简介：
  
  [ "吕彤(1995-)，女，北京人，硕士研究生，2017年于长春理工大学取得学士学位，主要从事光学三维检测的研究。E-mail:lvtong@mais.ucas.edu.cn" ]
  张文喜, (1979-)，男，安徽宿州人，博士生导师，研究员，2003年于中国科学技术大学获得学士学位, 2006年于中国科学院西安光学与精密机械研究所获得硕士学位，2014年于中国科学院大学获得博士学位，主要从事干涉测量技术的研究。E-mail:zhangwenxi@aoe.ac.cn ZHANG Wen-xi, E-mail:zhangwenxi@aoe.ac.cn
- 基金信息：
  
  国家自然科学基金青年科学基金资助项目(No.61605217)
- DOI：10.3788/OPE.20202804.0800
  中图分类号： P164
- 收稿日期：2019-12-25，
  
  修回日期：2020-01-31，
  
  录用日期：2020-1-31，
  
  纸质出版日期：2020-04-15
- 稿件说明：
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吕彤, 张文喜, 吕笑宇, 等. 全视场外差短相干形貌测量技术[J]. 光学精密工程, 2020,28(4):800-807.

Tong LV, Wen-xi ZHANG, Xiao-yu LV, et al. Full-field heterodyne short coherent topography measurement technology[J]. Optics and precision engineering, 2020, 28(4): 800-807.
吕彤, 张文喜, 吕笑宇, 等. 全视场外差短相干形貌测量技术[J]. 光学精密工程, 2020,28(4):800-807. DOI： 10.3788/OPE.20202804.0800.

Tong LV, Wen-xi ZHANG, Xiao-yu LV, et al. Full-field heterodyne short coherent topography measurement technology[J]. Optics and precision engineering, 2020, 28(4): 800-807. DOI： 10.3788/OPE.20202804.0800.

摘要

针对工业检测中对微米量级测量精度、秒级测量时间的检测需求，提出了全视场外差短相干形貌测量方案。本方案采用短相干光源，实现大步长测量，节约扫描时间；采用全视场外差技术，实现干涉轮廓的快速反演，在抑制振动、直流噪声对测量精度影响的同时，提高数据反演的效率。搭建了实验验证系统，对测量时间和测量精度进行了实验验证，结果表明，系统的探测时长小于10 s，测量精度优于2

m。后续经进一步优化设计，探测时间可小于5 s，探测精度优于微米量级。该方案具有测量速度较快和测量精度较高等优势，在对效率要求较高的工业检测领域具有一定的应用前景。

Abstract

To satisfy the requirements of micron-level measurement accuracy and second-level measurement time in industrial detection

this study proposes a full-field heterodyne short coherent topography measurement scheme. A light source with short coherence is developed to achieve long stride measurement and save scanning time. This study uses full-field heterodyne technology to achieve fast inversion of interference contours

and suppresses the effects of vibration and DC noise on measurement accuracy to improve the efficiency of data inversion. Furthermore

an experimental verification system was set up

and the detection time of the system was verified to be less than 10 s with measurement accuracy superior to 2

m. The measurement time achieved by the system could be improved to less than 5 s with micron-level measurement accuracy by further optimizing the design. Therefore

the proposed technology was verified to be capable of satisfying the measurement requirements in industrial detection with the advantages of faster measurement speed and higher measurement accuracy compared to existing methods

and has prospective applications in the field of highly efficient industrial detection.

关键词

Keywords

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