基于数字微镜器件的并行彩色共聚焦测量系统

张一; 余卿; 张昆; 程方; 崔长彩

doi:10.3788/OPE.20202804.0859

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基于数字微镜器件的并行彩色共聚焦测量系统

现代应用光学 | 更新时间：2020-08-13

- 基于数字微镜器件的并行彩色共聚焦测量系统
- Parallel chromatic confocal measurement system based on digital micromirror device
- 光学精密工程 2020年28卷第4期页码：859-866
- 作者机构：
  
  1.华侨大学机电及自动化学院，福建厦门 361021
  2.华侨大学制造工程研究院，福建厦门 361021
- 作者简介：
  
  [ "张一 (1995-)，女，河北承德人，硕士研究生，2018年于华侨大学获得学士学位，主要研究方向为光电检测。E-mail:zhangyi5511@126.com" ]
  [ "余卿 (1983-)，男，江西定南人, 博士, 副教授，2005年、2011年于合肥工业大学分别获得学士、博士学位，主要研究方向为光电检测、精密机械设计等。E-mail: yuqing@hqu.edu.cn" ]
- 基金信息：
  
  国家自然科学基金资助项目(51505162);福建省科技计划项目(2019I0013);泉州市科技计划项目(2017T004);华侨大学研究生科研创新基金资助项目(18013080064)
- DOI：10.3788/OPE.20202804.0859
  中图分类号： TH742
- 收稿日期：2019-11-15，
  
  修回日期：2020-01-07，
  
  录用日期：2020-1-7，
  
  纸质出版日期：2020-04-15
- 稿件说明：
移动端阅览
张一, 余卿, 张昆, 等. 基于数字微镜器件的并行彩色共聚焦测量系统[J]. 光学精密工程, 2020,28(4):859-866.

Yi ZHANG, Qing YU, Kun ZHANG, et al. Parallel chromatic confocal measurement system based on digital micromirror device[J]. Optics and precision engineering, 2020, 28(4): 859-866.
张一, 余卿, 张昆, 等. 基于数字微镜器件的并行彩色共聚焦测量系统[J]. 光学精密工程, 2020,28(4):859-866. DOI： 10.3788/OPE.20202804.0859.

Yi ZHANG, Qing YU, Kun ZHANG, et al. Parallel chromatic confocal measurement system based on digital micromirror device[J]. Optics and precision engineering, 2020, 28(4): 859-866. DOI： 10.3788/OPE.20202804.0859.

摘要

彩色共聚焦技术因其高分辨率、高测速的特点，在表面形貌测量领域备受关注，然而现有的彩色共聚焦技术多为单点测量，一定程度上限制了测量效率。本文在彩色共聚焦技术的基础上，以DMD作为光分束器件，结合自主研发的大口径色散管镜，利用面阵彩色相机作为光电接收器件，研究和建立了基于数字微镜器件的并行彩色共聚焦实验平台，实现了对被测物面上多个探测点的并行图像处理。最终，利用所搭建的并行彩色共聚焦测量系统，对50 μm高的台阶和自制台阶进行了测量，并对硬币的表面形貌进行了三维恢复。实验结果表明，该测量系统的轴向测量范围为300 μm，测量精度达到微米级；同时，能够较好地恢复硬币的表面形貌特征，具有较好的测量效率与可靠性。

Abstract

The chromatic confocal technique has garnered much attention in the field of surface topography measurement due to its high accuracy

resolution

and rapidity of operation. However

the existing chromatic confocal methods are mostly based on single-point measurement

which restricts their measuring efficiencies.To address this shortcoming

parallel chromatic confocal measurement system based on the chromatic confocal technique was proposed and studied in this paper.In this experimental system

DMD was used as an optical beam splitter

a self-developed dispersive tube lens was applied to produce axial dispersion

and a color camera was used as a photoelectric receiving device. A self-developed color conversion algorithm was also used to simultaneously obtain spectral information from multi-confocal-points.Finally

a parallel chromatic confocal measurement experimental platform was constructed

the experimental measurements corresponding to 50 μm high steps and self-made steps were performed

and the surface topography restoration experiments were conducted.The experimental results indicate that the axial measuring range of the system is 300 μm

and the measuring accuracy is able to achieve micron level.Further

as a 3D measurement system

the proposed technique was verified to be capable of reconstructing the surface topography of a coin based on one-shot.

关键词

Keywords

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