基于光强实时反馈控制和同步校准的波长调谐移相干涉系统

卢庆杰; 刘薇; 魏光宇; 韩森

doi:10.3788/OPE.20202804.0878

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基于光强实时反馈控制和同步校准的波长调谐移相干涉系统

现代应用光学 | 更新时间：2020-08-13

- 基于光强实时反馈控制和同步校准的波长调谐移相干涉系统
- Wavelength-tuned phase-shifting interference system based on optical power real-time feedback and synchronous calibration
- 光学精密工程 2020年28卷第4期页码：878-884
- 作者机构：
  
  1.上海理工大学光电信息与计算机工程学院，上海 200093
  2.苏州维纳仪器有限责任公司，江苏苏州 215123
- 作者简介：
  
  [ "卢庆杰 (1991-)，男，广东湛江人，博士研究生，2016年于上海理工大学获得硕士学位，主要从事干涉仪光电系统控制方面的研究。Email: 161390018@student.usst.edu.cn" ]
  韩森 (1961-)，男，黑龙江哈尔滨人，教授，博士生导师，1997年于德国斯图加特大学获得博士学位，主要从事光学干涉技术、纳米测量技术、精密光学仪器、透射波前检测技术以及自动控制等方面的研究。Email: senhanemail@126.com HAN Sen, Email: senhanemail@126.com
- 基金信息：
  
  国家重大科学仪器设备开发项目(2016YFF0101903)
- DOI：10.3788/OPE.20202804.0878
  中图分类号： TH744.3
- 收稿日期：2019-08-27，
  
  修回日期：2019-10-20，
  
  录用日期：2019-10-20，
  
  纸质出版日期：2020-04-15
- 稿件说明：
移动端阅览
卢庆杰, 刘薇, 魏光宇, 等. 基于光强实时反馈控制和同步校准的波长调谐移相干涉系统[J]. 光学精密工程, 2020,28(4):878-884.

Qing-jie LU, Wei LIU, Guang-yu WEI, et al. Wavelength-tuned phase-shifting interference system based on optical power real-time feedback and synchronous calibration[J]. Optics and precision engineering, 2020, 28(4): 878-884.
卢庆杰, 刘薇, 魏光宇, 等. 基于光强实时反馈控制和同步校准的波长调谐移相干涉系统[J]. 光学精密工程, 2020,28(4):878-884. DOI： 10.3788/OPE.20202804.0878.

Qing-jie LU, Wei LIU, Guang-yu WEI, et al. Wavelength-tuned phase-shifting interference system based on optical power real-time feedback and synchronous calibration[J]. Optics and precision engineering, 2020, 28(4): 878-884. DOI： 10.3788/OPE.20202804.0878.

摘要

波长调谐移相干涉技术是通过改变光波长来计算相位的。为了减少可调谐激光器在变波长进行移相时光功率的随机变化对相位计算产生的误差，本文提出了一套光强实时反馈控制系统和同步校准方案。首先分析了光强在某一范围内的随机变化产生测量误差，并选用合适的光电检测设备搭建了一套光强控制系统。该系统能够将光信号转化为电信号，并通过PID来实现对光强的控制。实验结果表明，本系统能够将光强的变化范围控制在±0.002 mW以内，其响应速度达到600 kHz，已远远超过干涉仪CCD的取图速度。最后，对口径为50 mm的光学元件进行表面形貌检测，加入本控制系统后，面形精度的测量指标PV值和RMS值分别提高了1.53×10

-2

和2.43×10

-3

，表明本系统在高精度的光学元件检测领域具有重要的实用价值。

Abstract

Wavelength-tuned phase-shifting interferometry facilitates phase measurement by changing the wavelength of a tunable diode laser. Random variation of the optical power can cause phase errorsduring the phase-shifting process. To address this problem

an optical power real-time feedback control system and synchronous calibration scheme were developed. First

the measurement error caused by random variation of the optical power was analyzed. An optical power control system was then developed by utilizing suitable optoelectronic detection equipment to convert optical signals into electric signals

such that the optical power can be controlled using a PID. The experimental results show that the accuracy of the optical power is ±0.002 mW and the response speed can approach 600 kHz. Finally

the system was evaluated by detecting the optical component surface.When assembling the system

the PV and RMS are improved by 1.53×10

-2

和2.43×10

-3

respectively. This system has an important role in high-precision optical component detection.

关键词

Keywords

references

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