透明红外硫系薄膜非均匀性检测及影响因素

姚玉明; 宋宝安; 肖传富; 戴世勋

doi:10.3788/OPE.20202805.1005

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透明红外硫系薄膜非均匀性检测及影响因素

现代应用光学 | 更新时间：2020-07-09

- 透明红外硫系薄膜非均匀性检测及影响因素
- Optical non-uniformity test of transparent infrared chalcogenide film and influencing factors
- 光学精密工程 2020年28卷第5期页码：1005-1011
- 作者机构：
  
  1.宁波大学信息科学与工程学院，浙江宁波 315211
  2.宁波大学浙江省光电探测材料与器件重点实验室，浙江宁波 315211
- 作者简介：
  
  [ "姚玉明(1998－)，男，河南郑州人，主要从事红外光学薄膜光学性质方面的研究。E-mail:1025378785@qq.com" ]
  宋宝安(1980－)，男，山西平遥人，副教授，硕士生导师，2003年、2005年、2009年于哈尔滨工业大学分别获得学士、硕士、博士学位，主要从事激光技术、红外材料与器件、结构光成像等方面的研究。E-mail:songbaoan@nbu.edu.cn SONG Bao-an, E-mail:songbaoan@nbu.edu.cn
- 基金信息：
  
  浙江省自然科学基金资助项目(LY19F050003);宁波大学王宽诚幸福基金资助项目
- DOI：10.3788/OPE.20202805.1005
  中图分类号： O439
- 收稿日期：2019-11-19，
  
  修回日期：2019-12-19，
  
  录用日期：2019-12-19，
  
  纸质出版日期：2020-05-15
- 稿件说明：
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姚玉明, 宋宝安, 肖传富, 等. 透明红外硫系薄膜非均匀性检测及影响因素[J]. 光学精密工程, 2020,28(5):1005-1011.

Yu-ming YAO, Bao-an SONG, Chuan-fu XIAO, et al. Optical non-uniformity test of transparent infrared chalcogenide film and influencing factors[J]. Optics and precision engineering, 2020, 28(5): 1005-1011.
姚玉明, 宋宝安, 肖传富, 等. 透明红外硫系薄膜非均匀性检测及影响因素[J]. 光学精密工程, 2020,28(5):1005-1011. DOI： 10.3788/OPE.20202805.1005.

Yu-ming YAO, Bao-an SONG, Chuan-fu XIAO, et al. Optical non-uniformity test of transparent infrared chalcogenide film and influencing factors[J]. Optics and precision engineering, 2020, 28(5): 1005-1011. DOI： 10.3788/OPE.20202805.1005.

摘要

薄膜非均匀性的无损检测对于制备大面积高质量的红外透明薄膜尤为重要。针对红外薄膜光学均匀性难以获取的困难，提出了一种同时获得单层透明红外薄膜厚度和折射率均匀性的无损检测方法。实验上，通过磁控溅射法在二氧化硅衬底上制备了厚度约1.4 μm红外透明Ge-Sb-Se硫系薄膜，然后在该薄膜上标定出36个80 μm×80 μm区域，利用显微傅里叶红外光谱仪测得该36个区域的透射谱，通过分段滤波的方法滤除背景噪声，运用改进的Swanepoel方法计算得到了薄膜每一个区域的厚度和折射率，进而精确获得该薄膜的厚度和折射率均匀性，结果表明精度优于0.5%。

Abstract

The non-destructive testing of the non-uniformity of films is important in the preparation of large-area

high-quality infrared transparent films. In this study

a method is proposed to obtain the thickness and refractive index non-uniformity of the film. In the experiments

an infrared Ge-Sb-Se chalcogenide film was prepared on a silicon dioxide substrate using magnetron sputtering. The transmission spectra of 36 areas with a size of 80 μm×80 μm were measured using a microscopic Fourier infrared spectrometer. Further

the background noise was filtered out with the segmentation filtering method. Finally

the thickness and refractive index of each area were calculated using the improved Swanepoel method

and the non-uniformity of the film was accurately obtained by comparing the test results from different areas. The results indicate that the calculation accuracy of the film non-uniformity is better than 0.5%.

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