图像式角位移测量的光栅偏心度监测系统

王亚洲; 于海; 易进; 张士伟; 韦宗喜

doi:10.3788/OPE.20202805.1038

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图像式角位移测量的光栅偏心度监测系统

现代应用光学 | 更新时间：2020-07-09

- 图像式角位移测量的光栅偏心度监测系统
- Grating eccentricity monitoring system for image-based angular displacement measurement
- 光学精密工程 2020年28卷第5期页码：1038-1045
- 作者机构：
  
  1.长光卫星技术有限公司，吉林长春 130000
  2.中国科学院长春光学精密机械与物理研究所，吉林长春 130033
- 作者简介：
  
  [ "王亚洲(1990-)，男，山东枣庄人，硕士，工程师，2016年于中国科学院长春光机所获得硕士学位, 主要从事卫星测试设备的研发工作。E-mail:wangyazhou791@163.com" ]
  [ "于海(1987-)，男，博士，副研究员，2009年于东北电力大学获得学士学位，2014年于中国科学院长春光学精密机械与物理研究所获得博士学位，主要从事光电位移精密测量技术的研究。E-mail:yuhai5158@163.com" ]
- 基金信息：
  
  国家自然科学基金资助项目(51605465);吉林省重大科技攻关项目(20170201006GX)
- DOI：10.3788/OPE.20202805.1038
  中图分类号： TP212.12
- 收稿日期：2019-12-27，
  
  修回日期：2020-01-13，
  
  录用日期：2020-1-13，
  
  纸质出版日期：2020-05-15
- 稿件说明：
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王亚洲, 于海, 易进, 等. 图像式角位移测量的光栅偏心度监测系统[J]. 光学精密工程, 2020,28(5):1038-1045.

Ya-zhou WANG, Hai YU, Jin YI, et al. Grating eccentricity monitoring system for image-based angular displacement measurement[J]. Optics and precision engineering, 2020, 28(5): 1038-1045.
王亚洲, 于海, 易进, 等. 图像式角位移测量的光栅偏心度监测系统[J]. 光学精密工程, 2020,28(5):1038-1045. DOI： 10.3788/OPE.20202805.1038.

Ya-zhou WANG, Hai YU, Jin YI, et al. Grating eccentricity monitoring system for image-based angular displacement measurement[J]. Optics and precision engineering, 2020, 28(5): 1038-1045. DOI： 10.3788/OPE.20202805.1038.

摘要

图像式角位移测量装置中，光栅的安装偏心标定结果直接影响着角位移测量的精度。为此，本文设计了一种用于调试图像式角位移测量装置光栅偏心度的系统。首先，根据图像式角位移测量机理，提出了基于线阵图像传感器的标定光栅偏心度监测原理；然后，在图像传感器上建立了偏心调试监测信号的模型，并提出存在偏心时偏心监测信号的变化机理；最后，对某型号角位移测量装置进行了实验，并给出了调试建议。实验表明，经过调节误差均方差由1 017″降低到12.8″。本文设计的偏心监测系统能够实现对标定光栅的高精度安装调试，提高了图像式角位移测量装置的批量生产效率。

Abstract

In an image-based angular displacement measuring device

the installation eccentricity of the calibration grating directly affects the accuracy of angular displacement measurements. In this paper

a system for debugging the eccentricity of the grating in the angular displacement measuring device was designed. First

according to the mechanism of image-based angular displacement measurement

a method for monitoring the eccentricity of the calibration grating was proposed utilizing a linear array image sensor. A model of the eccentricity monitoring signal on the image sensor was subsequently established

and a mechanism for changing the signal was determined. Finally

an experiment on a certain type of angular displacement measurement device was carried out and debugging suggestions were provided. The experiment demonstrates that the adjustment reduces the root mean square error from 1 017″ to 12.8″.The eccentricity monitoring system designed in this paper can achieve installation and debugging of the calibration grating with high precision

and improve the efficiency of mass production of image-based angular displacement measurement devices.

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Keywords

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