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1.西安工业大学 光电工程学院,西安 710021
2.教育部薄膜与光学制造技术重点实验室, 西安 710021
[ "陈瑜(1996-),女,内蒙古赤峰人,硕士研究生,2017年于西安工业大学获得学士学位,主要研究方向为光学检测技术。Email:323107343@qq.com" ]
潘永强(1974-),男,陕西长安人,教授,硕士生导师,1998年、2004年于西安工业大学分别获学士、硕士学位,2009年于西安电子科技大学获理学博士学位。主要从事光学薄膜、光学检测技术等方面的研究与教学工作。E-mail:pyq_867@163.com E-mail: pyq_867@163.com
收稿日期:2019-12-24,
录用日期:2020-3-9,
纸质出版日期:2020-06-15
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陈瑜, 潘永强, 刘丙才, 等. 基于窗口傅里叶变换的线性相位误差抑制[J]. 光学精密工程, 2020,28(6):1314-1322.
Yu CHEN, Yong-qiang PAN, Bing-cai LIU, et al. Linear phase error suppression technique based on window Fourier transform[J]. Optics and precision engineering, 2020, 28(6): 1314-1322.
陈瑜, 潘永强, 刘丙才, 等. 基于窗口傅里叶变换的线性相位误差抑制[J]. 光学精密工程, 2020,28(6):1314-1322. DOI: 10.3788/OPE.20202806.1314.
Yu CHEN, Yong-qiang PAN, Bing-cai LIU, et al. Linear phase error suppression technique based on window Fourier transform[J]. Optics and precision engineering, 2020, 28(6): 1314-1322. DOI: 10.3788/OPE.20202806.1314.
在窗口傅里叶变换(WFT)相位提取技术中,抑制线性相位误差和背景光强干扰对窗口尺寸的需求条件存在矛盾,无法对二者进行同时抑制,故提出一种通过改变输入信号频谱成分的线性相位误差抑制技术,该技术利用傅里叶空频分析法将输入信号进行背景光强滤除并保留基频成分,使测量结果不受背景光强影响;考虑到线性相位误差同样受到窗口尺寸选取的影响,通过仿真分析确定最优窗口尺寸判定依据;采用该方法重构抛物面形并以相移干涉技术所获面形结果为基准进行对比分析,结果表明,本文提出方法可实现线性相位误差与背景光强干扰的综合抑制效果并提高了传统WFT相位提取精度。
In the Window Fourier Transform (WFT) phase extraction technique
there is a contradiction between suppressing the linear phase error and background intensity interference on the window size
and it is impossible to suppress both simultaneously. Therefore
a linear phase error suppression technique based on changing the spectral components of the input signal was proposed. The Fourier space-frequency analysis method was used to filter the input signal and preserve the fundamental frequency components.This ensured that the measurement results were not affected by the background intensity. Considering that the linear phase error was also affected by the window size selection
the optimal window size was determined by simulation analysis.Finally
the parabolic shape was reconstructed by this method and compared with the surface shape obtained by the phase-shifting. The results show that compared to the traditional phase extraction technique
the proposed method achievesa comprehensive suppression effect of the linear phase error and background intensity interference.Moreover
it improves the traditional WFT phase extraction accuracy.
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